JPS58147027A - Preparation apparatus for semiconductor device - Google Patents

Abstract

PURPOSE:To smoothly move an operation rod without air leak by using a seal of the accordion type to the part for pulling a content operating rod from the reaction tube. CONSTITUTION:Before a boat is inserted into a furnace 1, an accordion seal 18 consisting of a material which does not give any effect on liquid phase growth such as a stainless steel, rubber etc. is contracted 23. After a furnace is heated, a rod 8 is moved to the left, the boat is inserted into the furnace by contracting the seal 18, then a fused liquid pot is moved by extending the seal 23 moving the rod 9 to the right. Thereby, the N type and P type fused liquids 6, 7 are placed in contact with a substrate 4, sequentially. After liquid phae growth, the seal 18 is extended moving the rod to the right 8 and the boat can be pulled. According to this structure, when an apparatus is once set, the air does not leak into the quartz reaction tube 2 even while the quartz rods 8, 9 are moving and the rod moves smoothly since there is no sliding portion and thereby a motor can also be driven.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to semiconductor manufacturing equipment, and more particularly to semiconductor manufacturing equipment having a bottle structure suitable for maintaining a seal with the outside air and being freely movable.

Conventionally, in semiconductor manufacturing equipment having a part that moves while maintaining a seal with the outside world, a method has been adopted in which a moving II □ 11 ring, such as a Wilson seal, is used for the seal part.

FIG. 1 is a schematic cross-sectional view showing an example of semiconductor manufacturing equipment, particularly a GaAa liquid phase growth equipment, which uses the above-mentioned conventional sealing method. The movement of the seal part is shown in the order of the liquid phase growth process. In the figure, (1) is an electric furnace, (2) is a quartz reaction tube, (3)
is the slider of the liquid-phase growth boat, (4) is the GaAa substrate set on the slider (8), (5) is the melt reservoir of the liquid-phase growth boat, and (6) and (7) are the respective melts. The Ga-I+ melt for n-type and □; and p-type stored in the liquid reservoir (5), (8) is
), (9) is a quartz melt reservoir operation rod that is hooked on melt reservoir (5), (6) is a quartz reaction tube (2) and boat operation rod ( Wilson seal (11) and (1) are the movement II□11 rings in the Wilson seal (A) to connect the quartz reaction tube (2 ) and the outside world, and the boat operating rod (
8) constitutes a seal portion that allows the boat operating rod to slide left and right in the figure while maintaining a seal between the boat and the outside world. 01 is a Wilson seal (1) that connects the boat operating rod (8) and the melt reservoir operating rod (9) and maintains a seal from the outside world.
4 and H (1~ is for exercise II□ in Wilson Seal Q1
Slide the melt reservoir operating rod (9) from side to side in the figure while maintaining the seal between the boat operating rod (8) and the outside world, and the seal between the melt reservoir operating rod (9) and the outside world, respectively. Construct a possible seal part. In addition, (l groan is a quartz reaction tube (
The gas inlet Q7) for introducing ultra-high purity hydrogen gas into the liquid phase growth atmosphere in 2) is the hydrogen gas outlet.

Next, a method for epitaxially growing an n-type GaAs layer and a p-type GaAs layer continuously on a GaAA substrate (4) using the conventional liquid phase growth apparatus having the conventional sealing method will be described in order of each step in Jii2. Figure A - Tsumugi will be explained. j112 Diagram A shows the reeds, the Wilson seal box, and the inside of the U venue (DJ operation "O" riff / (11) j (I2Jl) before inserting the boat into the electric furnace (1).
(lljhi (16) Tessealed. Figure 2B
The boat was inserted into the electric furnace (1) heated to about 800"C, and the Wilson Seal αQ movement +IQI+ ring (If4) was connected to the boat operating rod (8 ) by sliding it.jg
Figure 2C shows that during epitaxial growth, the molten g reservoir operating rod (9) f is slid with the motor 11 oIl ring (16) provided by Wilson Seal slightly loosened.
This is carried out by sequentially contacting the n-type GA-As melt (6) and the p-type G5L-AB m liquid (7) on the A3 substrate (4). Figure 2: With DtJ growth completed, move the Wilson Seal QQ by slightly loosening the II□II Ung (I@) and moving it in the opposite direction to that shown in Figure 82B above.

However, when the above-mentioned liquid phase growth was carried out using the above-mentioned conventional sealing method, problems often occurred, such as air leaking into the quartz reaction tube (2). In other words, if the exercise +IQII rings a@, ara are tightened too much, the quartz operating rod (8J, (9)) will not slide, and if they are loosened too much, leaks will occur from that area. If there are any scratches, the contact with the IIQII!J ring will deteriorate and leaks may occur, and if the quartz operating rod is slid inside the II□I+ ring over and over again, the II□11 ring may wear out and leaks may occur. I was doing things like that.

Such leakage not only in the above-mentioned liquid phase growth apparatus but also in semiconductor manufacturing equipment causes oxidation of semiconductor materials, semiconductor manufacturing jigs, etc., and deteriorates device performance.

As mentioned above, with the conventional sealing method described above, it is difficult to completely eliminate leakage from the dynamic IQII ring, and it is impossible to mechanically move the quartz operating rod by driving a motor. It was close.

The above-mentioned seal portion in semiconductor manufacturing equipment has been a major obstacle to improving the reproducibility of device characteristics, improving single-chip performance, and automating the equipment.

The present invention was developed in view of the above-mentioned drawbacks, and the purpose of the present invention is to provide a semiconductor manufacturing equipment using a sealing method that maintains a seal with the outside air and is movable freely. Out.

Hereinafter, the present invention will be described in detail with reference to the embodiments shown in FIGS. 3 and 4. The third to third figures are schematic sectional views showing the structure of a liquid phase growth apparatus according to an embodiment of the present invention, and an accordion seal for moving a boat, which is the main point of this invention, is made of a thin stainless steel plate.

Teflon, rubber, t! The seal is made of a material that does not affect liquid phase growth, such as R-vinyl vinyl, and can be expanded and contracted like an accordion. (II is one end plate of the accordion seal vehicle for port movement to which one end of the quartz reaction tube (2) is sealed; 0@ is the other end plate of the accordion seal H for port movement, which is fixed to the fixed base. The quartz boat operating rod is sealed and the jll is movable on a fixed base.
It is mounted on the mobile platform (2). (2) is a melt reservoir whose one end plate (2) is shared with an Accove ion seal flag for boat movement, and a quartz melt reservoir operating rod (9) is fixed to the other end plate (c). This is a moving accordion sticker. The other end plate above is provided with a hydrogen gas outlet (+7). The tower is listed o $
11) and the second moving table) are motor-driven and drive the boat operating rod (8) and the melt reservoir operating rod (9), respectively. FIGS. 14A to 14D are schematic cross-sectional views showing the operating state of this embodiment device in the order of its steps. Fig. 4A shows the state before the boat is inserted into the electric furnace (1), in which the accordion seal H for moving the boat is fixed in an extended state, and the accordion seal (E) for moving the melt reservoir is fixed. It is fixed in the retracted position. Figure 4 B shows the boat at about 800℃.
This is done by contracting the accordion seal sb for moving the boat, which is in good condition, while inserted into the electric furnace (1), which has been heated to sb, and moving the boat operating rod (8) to the right in the figure.

Figure 4C shows the state during epitaxial growth, and the accordion seal for moving the melt reservoir was in a contracted state)
By extending the melt reservoir operating rod (9) to the right side in the figure, the n-type Ga-As melt (6) and the p-type Ga-As melt (7) are placed on the GaAs substrate (4). ) are sequentially brought into contact with each other.
To extend the boat moving accordion seal 01 which was in the contracted state, move the boat operating rod (8) to the right side in the figure.

As mentioned above, this example device uses an accordion seal and does not use sliding rings, so once the device is set up, the quartz operating rod (8).

Even during the movement of (9), there is no leakage of air into the quartz reaction tube (2). Also, since there are no sliding parts, movement is very smooth.

Note that in the embodiments described above, among the semiconductor manufacturing equipment,
In particular, although it has been described above that it is used for GaAa liquid phase growth, the present invention is not limited to this, and for example, a CVD apparatus,
The present invention can be widely applied to devices such as a diffuser 2 alloy device that requires moving contents while maintaining a high-purity atmosphere and maintaining a seal with the outside air.

As detailed above, in the semiconductor manufacturing apparatus according to the present invention, an accordion-type seal is used for the part where the operating rod for manipulating the contents is pulled out from the reaction tube. No leakage occurs at the sealed portion, and the reaction tube can be completely isolated from the outside air. In addition, since there are no sliding parts in the seal, the movement of the operating rod is extremely smooth, and it is also possible to use a motor drive, making it possible to automate semiconductor manufacturing equipment, which was difficult with conventional equipment.

[Brief explanation of the drawing]

FIG. 1 is a schematic cross-sectional view showing an example of a liquid phase growth apparatus using a conventional sealing method, FIGS. A schematic cross-sectional view showing the configuration of a liquid phase growth apparatus according to an embodiment of the present invention, and FIGS. In the figure, (2) is the reaction tube, (3) is the boat slider (contents), (4) is the boat melt reservoir (contents), and (8) is the boat operating rod (first operating rod). , (9)
is the melt reservoir operating rod (second operating rod), the vehicle is the accordion seal for moving the boat (first cylindrical body),
The end plate of / ), ■ is the third end plate, (
2) is the second moving table. In addition, the same reference numerals in the drawings indicate the same parts or Buddhist priest parts (0) Agent: Makoto Kuzuno (1 other person) Figure 2 = 11 (Procedural amendment (spontaneous) Mr. Commissioner of the Japan Patent Office 1, Indication of the case Patent application passed away in 1983 4o IF14#2
, Name of the invention al1 body Il! 111 Gigi 3,
Relationship with the case of the person making the amendment Patent applicant 6, column 6 of the brief explanation of the drawings in the specification subject to amendment, page 10, line 15 of the specification of the contents of the amendment says "(4) is". of"
(i) is”. that's all

Claims (1)

[Scope of Claims] (1) An odor system having a reaction tube and an operation rod for moving the contents contained in the reaction tube from the outside while isolating the inside of the reaction tube from the outside air; a first end plate hermetically fixed to the reaction tube; and a central portion at the other end of the operating rod, one end of which is inserted into the reaction tube by slidably penetrating the central portion of the first end plate. is airtightly attached between a second end plate to which is airtightly fixed, and the first end plate and the @2 end plate, surrounding the operating rod of the part, and a cylindrical tube that is expandable and retractable in an accordion style. (2) A semiconductor manufacturing apparatus characterized in that it is equipped with a sealing device consisting of a reaction tube, and a first device for moving the contents contained in the reaction tube from the outside while rapidly disconnecting the inside of the reaction tube from outside air. and a second operating rod, the first end plate having a peripheral edge hermetically fixed to the reaction tube, and the central part of the end plate of the rattan 1 are slidably penetrated to allow the reaction to occur. a 20th end plate having one end inserted into the tube and a central portion hermetically fixed to the other end of the round tubular first operating rod; a third end plate whose central portion is airtightly fixed to the other end of the second operating rod, one end of which is inserted into the reaction tube through the rod so as to be slidable therein; A first cylindrical body that is airtightly attached between the second end plate and surrounding the first operating rod of the part and that is extendable and retractable in an accordion style; and the second end plate and the third end. A semiconductor manufacturing apparatus comprising a sealing device comprising a second cylindrical body that is airtightly attached between plates surrounding the second operating rod of the part and is expandable and retractable like an accordion. (3) The first end plate is fixed to the pedestal, and the second end plate is fixed to the first end plate.
is attached to the moving table, and the third end plate is movably placed on the first moving table; tllll12
1. A semiconductor manufacturing apparatus as described in Section 2 of Patent No. MT, characterized in that the device is attached to a moving table.