JPS58145675A - 表面に凹凸部分を有するセラミツク製品の製造方法 - Google Patents
表面に凹凸部分を有するセラミツク製品の製造方法Info
- Publication number
- JPS58145675A JPS58145675A JP2513382A JP2513382A JPS58145675A JP S58145675 A JPS58145675 A JP S58145675A JP 2513382 A JP2513382 A JP 2513382A JP 2513382 A JP2513382 A JP 2513382A JP S58145675 A JPS58145675 A JP S58145675A
- Authority
- JP
- Japan
- Prior art keywords
- glass
- layer
- resist layer
- corrosive
- ceramic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000919 ceramic Substances 0.000 title claims description 15
- 238000004519 manufacturing process Methods 0.000 title claims description 10
- 239000011521 glass Substances 0.000 claims description 37
- 239000007789 gas Substances 0.000 claims description 19
- 239000003518 caustics Substances 0.000 claims description 13
- 239000000203 mixture Substances 0.000 claims description 11
- 239000000126 substance Substances 0.000 claims description 10
- 238000000034 method Methods 0.000 claims description 9
- 229920005989 resin Polymers 0.000 claims description 9
- 239000011347 resin Substances 0.000 claims description 9
- 238000009792 diffusion process Methods 0.000 claims description 7
- 238000010438 heat treatment Methods 0.000 claims description 7
- 238000002844 melting Methods 0.000 claims description 7
- 239000007787 solid Substances 0.000 claims description 7
- 229910010272 inorganic material Inorganic materials 0.000 claims description 6
- 239000011147 inorganic material Substances 0.000 claims description 6
- 230000008018 melting Effects 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 5
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 claims description 2
- 239000002341 toxic gas Substances 0.000 claims 2
- 231100001010 corrosive Toxicity 0.000 description 16
- 230000002265 prevention Effects 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 4
- 239000011230 binding agent Substances 0.000 description 4
- 239000003795 chemical substances by application Substances 0.000 description 4
- 229910000040 hydrogen fluoride Inorganic materials 0.000 description 4
- 239000004642 Polyimide Substances 0.000 description 3
- 238000005260 corrosion Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229920001721 polyimide Polymers 0.000 description 3
- 125000003118 aryl group Chemical group 0.000 description 2
- 239000002585 base Substances 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000010304 firing Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000007639 printing Methods 0.000 description 2
- 238000007650 screen-printing Methods 0.000 description 2
- 229920001187 thermosetting polymer Polymers 0.000 description 2
- 240000001548 Camellia japonica Species 0.000 description 1
- 239000004962 Polyamide-imide Substances 0.000 description 1
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 229910052783 alkali metal Inorganic materials 0.000 description 1
- 150000001340 alkali metals Chemical class 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 210000004556 brain Anatomy 0.000 description 1
- 150000004649 carbonic acid derivatives Chemical class 0.000 description 1
- 235000018597 common camellia Nutrition 0.000 description 1
- 210000003298 dental enamel Anatomy 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- -1 etc. Polymers 0.000 description 1
- 235000013305 food Nutrition 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 229920006015 heat resistant resin Polymers 0.000 description 1
- 150000004678 hydrides Chemical class 0.000 description 1
- 150000004679 hydroxides Chemical class 0.000 description 1
- OOYGSFOGFJDDHP-KMCOLRRFSA-N kanamycin A sulfate Chemical class OS(O)(=O)=O.O[C@@H]1[C@@H](O)[C@H](O)[C@@H](CN)O[C@@H]1O[C@H]1[C@H](O)[C@@H](O[C@@H]2[C@@H]([C@@H](N)[C@H](O)[C@@H](CO)O2)O)[C@H](N)C[C@@H]1N OOYGSFOGFJDDHP-KMCOLRRFSA-N 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 229910001510 metal chloride Inorganic materials 0.000 description 1
- 239000000025 natural resin Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 229920002312 polyamide-imide Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 230000003449 preventive effect Effects 0.000 description 1
- RMAQACBXLXPBSY-UHFFFAOYSA-N silicic acid Chemical class O[Si](O)(O)O RMAQACBXLXPBSY-UHFFFAOYSA-N 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 230000002269 spontaneous effect Effects 0.000 description 1
- LEDMRZGFZIAGGB-UHFFFAOYSA-L strontium carbonate Chemical compound [Sr+2].[O-]C([O-])=O LEDMRZGFZIAGGB-UHFFFAOYSA-L 0.000 description 1
- 229910000018 strontium carbonate Inorganic materials 0.000 description 1
- 229920001169 thermoplastic Polymers 0.000 description 1
- 239000004416 thermosoftening plastic Substances 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Surface Treatment Of Glass (AREA)
- ing And Chemical Polishing (AREA)
- Compositions Of Oxide Ceramics (AREA)
- Devices For Post-Treatments, Processing, Supply, Discharge, And Other Processes (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2513382A JPS58145675A (ja) | 1982-02-17 | 1982-02-17 | 表面に凹凸部分を有するセラミツク製品の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2513382A JPS58145675A (ja) | 1982-02-17 | 1982-02-17 | 表面に凹凸部分を有するセラミツク製品の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58145675A true JPS58145675A (ja) | 1983-08-30 |
| JPH0144676B2 JPH0144676B2 (OSRAM) | 1989-09-28 |
Family
ID=12157460
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2513382A Granted JPS58145675A (ja) | 1982-02-17 | 1982-02-17 | 表面に凹凸部分を有するセラミツク製品の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58145675A (OSRAM) |
-
1982
- 1982-02-17 JP JP2513382A patent/JPS58145675A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0144676B2 (OSRAM) | 1989-09-28 |
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