JPS58144754U - 試料移動装置 - Google Patents

試料移動装置

Info

Publication number
JPS58144754U
JPS58144754U JP4145082U JP4145082U JPS58144754U JP S58144754 U JPS58144754 U JP S58144754U JP 4145082 U JP4145082 U JP 4145082U JP 4145082 U JP4145082 U JP 4145082U JP S58144754 U JPS58144754 U JP S58144754U
Authority
JP
Japan
Prior art keywords
sample moving
moving table
moving device
sample
drive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4145082U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6336924Y2 (enExample
Inventor
英昭 鹿熊
亀谷　隆
粕川　敦彦
Original Assignee
株式会社明石製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社明石製作所 filed Critical 株式会社明石製作所
Priority to JP4145082U priority Critical patent/JPS58144754U/ja
Publication of JPS58144754U publication Critical patent/JPS58144754U/ja
Application granted granted Critical
Publication of JPS6336924Y2 publication Critical patent/JPS6336924Y2/ja
Granted legal-status Critical Current

Links

JP4145082U 1982-03-24 1982-03-24 試料移動装置 Granted JPS58144754U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4145082U JPS58144754U (ja) 1982-03-24 1982-03-24 試料移動装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4145082U JPS58144754U (ja) 1982-03-24 1982-03-24 試料移動装置

Publications (2)

Publication Number Publication Date
JPS58144754U true JPS58144754U (ja) 1983-09-29
JPS6336924Y2 JPS6336924Y2 (enExample) 1988-09-29

Family

ID=30052634

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4145082U Granted JPS58144754U (ja) 1982-03-24 1982-03-24 試料移動装置

Country Status (1)

Country Link
JP (1) JPS58144754U (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60232654A (ja) * 1984-04-28 1985-11-19 Hitachi Ltd 走査形電子顕微鏡に於ける試料台装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60232654A (ja) * 1984-04-28 1985-11-19 Hitachi Ltd 走査形電子顕微鏡に於ける試料台装置

Also Published As

Publication number Publication date
JPS6336924Y2 (enExample) 1988-09-29

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