JPS58142780A - Ceramic heater - Google Patents
Ceramic heaterInfo
- Publication number
- JPS58142780A JPS58142780A JP2402682A JP2402682A JPS58142780A JP S58142780 A JPS58142780 A JP S58142780A JP 2402682 A JP2402682 A JP 2402682A JP 2402682 A JP2402682 A JP 2402682A JP S58142780 A JPS58142780 A JP S58142780A
- Authority
- JP
- Japan
- Prior art keywords
- ceramic heater
- alumina
- heating element
- ceramic
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000919 ceramic Substances 0.000 title claims description 18
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 12
- 238000010438 heat treatment Methods 0.000 claims description 11
- 239000011521 glass Substances 0.000 claims description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
- 239000002131 composite material Substances 0.000 claims description 5
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 5
- 229910052751 metal Inorganic materials 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 2
- 150000002222 fluorine compounds Chemical class 0.000 claims 1
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 claims 1
- 239000000843 powder Substances 0.000 description 6
- 239000003779 heat-resistant material Substances 0.000 description 5
- 239000013078 crystal Substances 0.000 description 4
- 229910001120 nichrome Inorganic materials 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 238000002844 melting Methods 0.000 description 3
- 238000005245 sintering Methods 0.000 description 3
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- BYFGZMCJNACEKR-UHFFFAOYSA-N aluminium(i) oxide Chemical compound [Al]O[Al] BYFGZMCJNACEKR-UHFFFAOYSA-N 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000010304 firing Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- KKCBUQHMOMHUOY-UHFFFAOYSA-N Na2O Inorganic materials [O-2].[Na+].[Na+] KKCBUQHMOMHUOY-UHFFFAOYSA-N 0.000 description 1
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 1
- 229910052661 anorthite Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- GWWPLLOVYSCJIO-UHFFFAOYSA-N dialuminum;calcium;disilicate Chemical compound [Al+3].[Al+3].[Ca+2].[O-][Si]([O-])([O-])[O-].[O-][Si]([O-])([O-])[O-] GWWPLLOVYSCJIO-UHFFFAOYSA-N 0.000 description 1
- KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 description 1
- 239000002241 glass-ceramic Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000013081 microcrystal Substances 0.000 description 1
- 229910052863 mullite Inorganic materials 0.000 description 1
- 239000007790 solid phase Substances 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
- 239000013585 weight reducing agent Substances 0.000 description 1
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
不発明は耐熱材と発熱体か一体に形成て八たセラミック
ヒータ−に関テる。DETAILED DESCRIPTION OF THE INVENTION The invention relates to a ceramic heater in which a heat-resistant material and a heating element are integrally formed.
セラミックヒータ−は自動車用気化器、家底軍化製品な
どに広く使用さｎはじめており、そ几にともない特性の
向上？！０ざした改善も進んできている。Ceramic heaters have begun to be widely used in automobile vaporizers, household military products, etc., and their characteristics have improved as they have become more popular. ! Improvements have also been made to achieve zero goals.
（１）
従来耐熱材と発熱体が一体化さ几たセラミックヒータ−
は耐熱材さしては高純度なアルミナ粉末が、発熱体さし
て（グＷ−Ｍｏｆｒ、どの高融点金属がを
用いられている。さらに焼成は水素ガス賓囲気下１５
（ｌ ｏ’ｃ以上の高温で行なわルている。(1) Conventional ceramic heater with integrated heat-resistant material and heating element
The heat-resistant material used is high-purity alumina powder, and the heating element used is any high-melting point metal.Furthermore, the firing is carried out under a hydrogen gas atmosphere for 15 minutes.
(The process is carried out at a high temperature higher than 100 ft.
しかし従来のセラミックヒータ−は装造方法や特性に多
くの欠点がある・
上述した通り高純度アルミナ粉末の固相焼結ｒ利用した
場合１５０４１”０というされのて高温で処理しなけｎ
はならないし、こｎにともない発熱体こして利用可能な
材料も限足さ１１てしまい、実用」二ではタングステン
、モリブデンなどの高融点金鴫しかない、−Ｆたセラミ
ックヒータ−の重さが重く、軽量化の要求に対して十分
満足下るものではない。However, conventional ceramic heaters have many drawbacks in their manufacturing methods and characteristics.As mentioned above, when using solid-phase sintering of high-purity alumina powder, the temperature is as high as 15041"0 and must be treated at high temperatures.
As a result, the number of materials that can be used for heating elements has become limited, and in practical use only high-melting point gold such as tungsten or molybdenum is available, and the weight of ceramic heaters such as -F It is heavy and does not fully satisfy the demand for weight reduction.
また耐熱材と発熱体との間に熱膨張係政に大きな差があ
るためにセラミックヒータ−の断、読を繰収丁ことにＪ
：０発熱体の劣化が起こる。In addition, because there is a large difference in thermal expansion between the heat-resistant material and the heating element, it is necessary to carefully cut off and read the ceramic heater.
:0 Deterioration of the heating element occurs.
本発明の目的は上述の欠点盆改良し７ｊものであり、低
温で焼結でき、＠置でかつ発熱体の劣化の見ら−ｎない
セラミックヒータ−ｒ得ることである・不発明のセラミ
ックヒータ−はアルミナ（Ａｌ ２０． ’１お工び酸
化珪素（Ｓｉｎ２）のｑ！ｒ微結晶粒さ少なくともアル
ミナ（Ａｌ２Ｏ，）、酸化珪素（ＳｉＯ２）のうちのい
づｒしかｔ含み、かつ２種以上の酸化物からなる複合酸
化物の微結晶粒とこれらの微結晶粒以外の部分を占める
ガラス質からなる構造体の内部に金属の発熱体部分が形
成さ几ていることヶ特徴としている−
不発明で示したＩｆ構造体アルミナと結晶化ガラス粒子
全焼結することにエリ、アルミナと珪酸結晶（代表的に
はタリストバライトやトリジマイトなど）さらにアルミ
ナとガラス成分との複合酸化物結晶との微結晶の連続的
ネットワークから出来上がっている。The object of the present invention is to improve the above-mentioned drawbacks, and to obtain a ceramic heater which can be sintered at a low temperature, can be placed in an @ position, and shows no deterioration of the heating element. An uninvented ceramic heater - is alumina (Al 20. '1 q!r microcrystalline grains of manufactured silicon oxide (Sin2), contains at least one of alumina (Al2O,) and silicon oxide (SiO2), and contains two or more types. It is characterized by the fact that a metal heating element is formed inside a structure consisting of microcrystalline grains of a composite oxide consisting of an oxide of If the structure shown in the invention is completely sintered with alumina and crystallized glass particles, microcrystals of alumina and silicate crystals (typically talistobalite, tridymite, etc.) and composite oxide crystals of alumina and glass components are used. It is made up of a continuous network of
構造体に使用可能な結晶化ガラスとしては主成分かＳｉ
Ｏ２イ■トＰｂ（）−Ｂ２０ ％ ８１０２−Ｌｉ ２
０ ％ ５ｉｎ２−ＺｎＯなどの結晶化ガラスが用いら
扛る。The main component of crystallized glass that can be used for structures is Si.
O2itePb()-B20% 8102-Li 2
A crystallized glass such as 0% 5in2-ZnO is used.
そしてアルミナとガラス成分との複合酸化物結晶こして
はアノーサイト（ＣａＯｂ Ａｌ ２０．．２８＋０２
）、ガーナイト（ＺｎＯ−ＡＩ 、Ｏ，） ＆ ウィ
ルマイト（２Ｚｎ０ ・８１０２ ）、（３）
ムーライト（Ａｌ ２０３ ・Ｓ １０２） ”−ディ
ライト（２Ｍｇｏ・２Ａｌ ２０．・５８１０２） ｓ
β−スボンジーメｙ （Ｌｉ ２Ｏ−Ａｔ ２０． ’
４８ ｔ ０２ ）などが形成される可能性がある。Then, the composite oxide crystal of alumina and glass components is anorthite (CaOb Al 20..28+02
), Garnite (ZnO-AI, O,) & Wilmite (2Zn0 ・8102), (3) Mullite (Al 203 ・S 102) ”-Delight (2Mgo・2Al 20.・58102) s
β-Subongimey (Li 2O-At 20.'
48 t 02 ) etc. may be formed.
不発明のガラス−セラミック構造体は次に示す理由にエ
リセラミックヒータ−用耐熱材として上針機能？１１−
はだす。ガラスの結晶化温度やアルミナとガラス成分と
の複合酸化物結晶の生成温度に組成を選足することによ
り７００’Ｃ〜９００°（：位の焼結温度１ｃ調整する
ことができ、しかも十分な機械的。Does the uninvented glass-ceramic structure function as a heat-resistant material for ceramic heaters for the following reasons? 11-
Bare. By selecting the composition of the glass crystallization temperature and the formation temperature of composite oxide crystals of alumina and glass components, the sintering temperature can be adjusted from 700°C to 900° (: mechanical.
電気的特性を示す７次に流動性の面で見るならば微結晶
粒子全含有した状態で焼結するたに′）に流動性が小さ
く発熱体への影響かあ’Ｊりみらルない。In terms of fluidity, which shows electrical properties, since sintering is performed in a state where all the microcrystalline particles are contained, the fluidity is small and there is no impact on the heating element.
また熱膨張係数奮発熱体のそれに合わ亡るこｔは結晶化
ガラスの組成葡選足丁＾ことｖｃＪ：りある程度自由に
調整可能であるー
次に不発明を実施例によって具体的１ｃ説明する。In addition, the thermal expansion coefficient can be adjusted to a certain extent freely depending on the composition of the crystallized glass, depending on that of the heating element.Next, the invention will be specifically explained using examples. .
用いたアルミナ粉末は平均粒径が０５〔μｍ）である。 The alumina powder used has an average particle size of 05 [μm].
また結晶化ガラス粉末は重量比８ｉ０２：６５．（１。Moreover, the weight ratio of crystallized glass powder is 8i02:65. (1.
Ｂ２０ニア、０ 、 ＰｂＯ： １７．［１、ＭｇＯ：
６．＋１ 、 Ｎａ２Ｏ：２．（１、ＴｉＯ２： ２．
１１、（４）
盆高温（約１，４００Ｔ）で溶融接急冷却して微粉末形
状に加工したものであり、平均粒径ば０．７５（μｍ）
である。こルらの粉末音用いてセラミックのグリーンテ
ープを製作しその上にジグザグ模様に加工した直径０．
５ｍｍのニクロム線ｔグリーンテープ上に重ねて、その
上にニクロムヒーター線が完全におおわｆ″Ｌ々工うに
別のグリーンテープを重ね合せてから熱圧着を施し、つ
づいて第１図に示す温度曲線ｔＭする焼成炉で焼結した
。B20 near, 0, PbO: 17. [1, MgO:
6. +1, Na2O:2. (1, TiO2: 2.
11, (4) It is melted and rapidly cooled at high temperature (approximately 1,400T) and processed into a fine powder shape, with an average particle size of 0.75 (μm).
It is. I made a ceramic green tape using these powders and processed a zigzag pattern on it with a diameter of 0.
Lay the 5mm nichrome wire on top of the green tape, then layer another green tape until the nichrome heater wire is completely covered, then heat-press it, and then heat it to the temperature shown in Figure 1. It was sintered in a kiln with curve tM.
このように作製したセラミックヒータ−に外部に露出し
た端子部にニクロムヒーター線の外部引出し線ｒ取り付
け１種々の特性を測定し九結果を表に示したー
表
（５）
この特性は市販品と比較しても優劣がない。The external lead wire r of the nichrome heater wire was attached to the terminal portion exposed to the outside of the ceramic heater manufactured in this way.1 Various characteristics were measured and the results are shown in Table (5). There is no difference in comparison.
さらにセラミックヒータ−の寿命試験として電圧印加１
５時間、電圧未印加０５時間の条件１１１−８５°Ｃの
恒温槽内で繰返してそのときの抵抗変化率について市販
品との比較を行った。Furthermore, voltage application 1 was applied as a life test of the ceramic heater.
The resistance change rate at that time was compared with a commercially available product by repeating the test in a constant temperature bath at 111-85° C. for 5 hours with no voltage applied for 05 hours.
第２の図にはこの寿命試験の結果？示しである。The second figure shows the results of this life test? This is an indication.
図からも明らかなように市販品は３００時間位を丁ざる
とヒーターの抵抗値がきわめて大きくなり、１００１）
時間全経過するとほとんど断線状態になってしまり。こ
ｎｗニ一対して本発明のセラミックヒータ−は抵抗変化
も小さく１０００時間経過して本抵抗変化率は＋１０％
であった・
以上不発明によるセラミックヒータ−は、カナり低温で
焼結でき、軽量であり、かつその寿命は市販品に比べて
数段向上した優几た特徴全方している。As is clear from the figure, the resistance value of the heater becomes extremely large when the commercially available product is left unused for about 300 hours.
After all the time has passed, it becomes almost disconnected. In contrast, the resistance change of the ceramic heater of the present invention is small and the actual resistance change rate is +10% after 1000 hours.
The above uninvented ceramic heater can be sintered at extremely low temperatures, is lightweight, and has all of the excellent features that its lifespan is improved by several orders of magnitude compared to commercially available products.
なお不発明においてニクロム線の代わ！１ｌｌＣタング
ステンあるいにモリブデン等の高融点金属を用いても優
ｎた特性が得らｎることは明らかでろ２′＞−（６）In addition, it is a substitute for nichrome wire in non-invention! It is clear that excellent properties can be obtained even if high melting point metals such as 111C tungsten or molybdenum are used.2'>-(6)
第１図は不発明の一実施例の焼成方法を示す温度曲線図
である〜
第２図は本発明のセラミックヒータート従来のセラミッ
クヒータ−の寿命試験での抵抗変化率の経時変化會示す
図である。
（７）
垢Ｉ記
０ ノ Ｚ モ５ ４ ４５′ 乙 ７ ２
？ ≦２７０尺口
ムロＥｆｆ ｉロ どＨ）−ジFig. 1 is a temperature curve diagram showing the firing method of an embodiment of the invention. Fig. 2 is a diagram showing the change in resistance change rate over time in a life test of the ceramic heater of the present invention and a conventional ceramic heater. It is. (7) Skull Iki 0 No Z Mo5 4 45' Otsu 7 2
? ≦270 shakuguchi
Muro Eff iro DoH)-di
Claims (1)
〕 の各微結晶粒さ少なくともアルミナ（Ａ１２０５）
、 酸化珪素（Ｓ ｉｏ□）のうちのいづ几かｒ含み
、かつ２種以上の駿化物からなめ複合層化物の微結晶粒
とこれらの微結晶粒以外の部分で占めるガラス・１から
なる構造体の内部に金属の発熱体部分が形成されている
ことケ特致とするセラミックヒータ−０Alumina (Al 20.) and silicon oxide 1 (SiO□
] Each microcrystalline grain of at least alumina (A1205)
, a structure consisting of microcrystalline grains of a composite layered material made from two or more types of fluorides and glass 1, which contains silicon oxide (Sio□) and occupies parts other than these microcrystalline grains. Ceramic heater 0 characterized by a metal heating element formed inside the body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2402682A JPS58142780A (en) | 1982-02-17 | 1982-02-17 | Ceramic heater |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2402682A JPS58142780A (en) | 1982-02-17 | 1982-02-17 | Ceramic heater |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS58142780A true JPS58142780A (en) | 1983-08-24 |
Family
ID=12127008
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2402682A Pending JPS58142780A (en) | 1982-02-17 | 1982-02-17 | Ceramic heater |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58142780A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5554839A (en) * | 1993-03-12 | 1996-09-10 | Nippondenso Co., Ltd. | Ceramic heater |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5098911A (en) * | 1974-01-02 | 1975-08-06 | ||
| JPS5533741A (en) * | 1978-08-31 | 1980-03-10 | Murata Manufacturing Co | Method of manufacturing heater |
| JPS5585459A (en) * | 1978-12-22 | 1980-06-27 | Tokyo Shibaura Electric Co | Sintered body |
| JPS5717474A (en) * | 1980-06-30 | 1982-01-29 | Nippon Electric Co | Multilayer ceramic substrate |
-
1982
- 1982-02-17 JP JP2402682A patent/JPS58142780A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5098911A (en) * | 1974-01-02 | 1975-08-06 | ||
| JPS5533741A (en) * | 1978-08-31 | 1980-03-10 | Murata Manufacturing Co | Method of manufacturing heater |
| JPS5585459A (en) * | 1978-12-22 | 1980-06-27 | Tokyo Shibaura Electric Co | Sintered body |
| JPS5717474A (en) * | 1980-06-30 | 1982-01-29 | Nippon Electric Co | Multilayer ceramic substrate |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5554839A (en) * | 1993-03-12 | 1996-09-10 | Nippondenso Co., Ltd. | Ceramic heater |
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