JPS58141374A - Automatic controlling method of electroless plating solution - Google Patents

Abstract

PURPOSE:To decrease alkali errors and to control electroless plating solns. automatically without labor for maintenance by diluting the electroless plating soln. to be measured with a large volume of a specified ratio of water then measuring the compsn. thereof as a homogeneous soln. CONSTITUTION:A general electroless copper plating soln. contg. copper salts such as copper sulfate, complexing agents such as EDTA, reducing agents such as HCHO, and pH control agents such as NaOH is controlled automatically in the following way in the stage of measuring the compsn. of said plating soln. and replenishing the comsumed components: Said plating soln. is diluted with the tap water by which specified quality of water is obtained and which is so added thereto that the concn. ratio before and after the dilution attains 1/2-1/20. Parameters of >=1 kinds among the concn. of copper ions, pH, the concn. of HCHO, the concn. of stabilizers, the concn. of complexing agents, etc. are measured with respect to the diluted liquid. Since specified measuring conditions for samples are assured by the above-mentioned method, the errors in the measurement are decreased and the life of the measuring electrode is extended.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention is an electroless copper metal 9I used for continuous operation of electroless copper metal self-destruction! This relates to the plating solution method.In electroless steel plating, the performance of the deposited steel is greatly affected by the deposition characteristics or the plating solution composition.

The working pipe layer in electroless plating work requires a density of 1 & 1. However, manual plating? Analysis of l
For replenishment of P and consumed components, stable operation of the electroless methacrylic solution over a long period of time is essential. So electroless copper plating! Automatic analysis and replenishment of liquid a'
Figure 1 shows a block diagram of a conventional automatic controller, and diagram 7 shows a part of the detection part.

In the first example, Figure 2, 1 is the detection unit, 2 is the control unit, 3 is the Tenbling pump, 4 is the heat exchanger, and SRI brightening liquid. 8 is an electrolytic solution tank, 8 is an electrolyte with integrated wax, 9 is a steel colorimetric cell, and 10 is a formalin detection 5111 is an air vent. 11 scoops of the stock solution were added to the sampled plating solution. The investigation (in the case of υ state 1) Alkaline mistake! Il or X1vh (FH12 or higher) +0
*Because of the alkali, the response of ionization is blocked by IR...)5
(1) Since it is alkaline, the life of the electric current is short. (2) In the case of steel (1) There are many restrictions on the design of the luminosity cell.

(3) In the case of HCHO (analysis using ammonium soda)
1) Same as the state (4) Others 1) Plating easily deposits on the piping system - 0 problem Kame 1 57t.

In view of these points, the present invention has been developed based on 7!1n72. Something,
This article relates to an automatic tube m method for electroless steel plating solution that has few alkaline errors and requires no maintenance.

The present invention is electroless plating! In the automatic tube method for electroless plating, which continuously adjusts the composition of the solution and continuously replenishes the components after consumption, the electroless plating solution to be added to 1R4 was sampled and the amount for one person was Add a drop of water to the diluted #k to make a homogeneous solution and add 1ml of water to make a t% image. The solution is diluted with water to a constant concentration of 111%, stirred to make a homogeneous solution, and then mixed with electroless steel. ! Liquid composition t-
In the present invention, due to the dilution rate limit, the limit of the detector such as the a base plate cell, or the buffer of the plating chain used. Considering these points, the dilution rate and 1Iatoil [K tx to maintain stability]
s After dilution and before dilution # A ratio between 1/2 and 1/20 is desirable, 1 hour stirring is not necessarily mechanical, but mv 6ts long. In particular, using the expanded f/ILjJ phenomenon to prepare a homogeneous solution,
◎The water used for dilution is not necessarily distilled water, IRJ ion exchange water, or careful water, but tap water can be used to obtain sufficient water quality.In the present invention , dilute the electroless glazing solution to be prepared with water at a certain ratio, and determine the concentration of steel ions, concentration of formalin, stabilizer transport, complexing agent concentration, etc. And the parameters above n are 11 wji! The electroless steel solution 11, which is uninventive, consists of a copper salt, an anchoring agent, a reducing agent, and a roofing agent, rather than a special combination of IR. Electroless steel plating solution is used.
Copper salts include cypress steel, halogenated steel, nitrate steel, acetate steel, etc., and complexing agents include ethylenediaminetetraacetic acid s"t.
Formalin, puffed formaldehyde, etc. are used as reducing agents, and water-containing sodium, etc. are used as reducing agents.K in the present invention is electroless steel plating! Means for sampling liquid and dilution water at a fixed ratio, manual installation for stirring and mixing the liquid and dilution water to form a uniform casing,
Oeranime-) 1! Add the necessary bar 2 meters t-#J to liquid crawling @, and make sure to add Todoroki bar 2 meters! Electroless copper plating solution automatic analysis replenishment i! What can be done with i-den? That's all MS! As mentioned above, at Fumiaki, we add 1 ton of electroless polishing liquid to a child's daily dose of water (for example, tap water)! ri-foot 1II1 foot striations
Therefore, the lifetime of the measuring electrode is changed.In other words, in the present invention, a first-order effect is achieved on the concrete K. )
The response speed will be faster. Also, (3) The life of the electrode will be 2-5.
In the case of Baitobi Kusou Steel, (1) the thickness of the absorbance cell can be made thicker; (2) Effects such as being able to change the light source to weak tOK - 1JX ・Others include (1) Due to the battle: 2
Analysis of steel inside the controller #1 is eliminated, so operations such as p1 etching are no longer necessary.) The amount of Templiner liquid is reduced, so the amount of pumping is reduced and the margin is less than 90%. CaSO4・5HmO10g/J EDTA 30 g/l...12.0 HCHO (57%) 4mi/j NaCN! ! OW@/JGAFAC-R
E610 (L25111/JS degrees
72℃ Me-) area 1 dm'/j Total filtration liquid jl 2004 The liquid components S), CuSO4"5H*O
With regard to HCHO, the controller shown in Figure W43 automatically analyzes and supplements NaCN at a dilution rate of 115.
, EDTA, GAFAC-RE610 (surfactant)
While analyzing and replenishing by hand, we operated continuously for 24 hours.・The rtyt component was replenished once every two hours, and the RTYT component was also refilled once every two hours. In the 90th S@, 3 μ sampling tube 1.4 is a heat exchanger 7rX electroless plating, 8 is a reference integrated electrode,
9 is a steel colorimetric cell, 10 is an HCHO side outlet, 11 is an air vent L12 stile high speed stirrer, and 15 is a water tank.

The l11 ellipse IjL of the composition by the controller is ±1θ%
Within 6 points, no problems at all, 8II of precipitation steel! Also, no steel precipitation was observed inside the controller. l1IK shows the enemy's entire stool, and the undiluted solution and 1/2
Change in state ionization output in case of 0 dilution is 11! I guessed it. With the undiluted solution, the output of the 0-position electrode deviated by more than 10% from the standard 1 shift, and the output aai* had to be performed twice in 24 hours, whereas with the V20 diluted solution, the output at the 0-position electrode deviated by more than 10% from the standard 1st shift, whereas with the V20 diluted solution, the III.

[Brief explanation of the drawing]

#G1 Diagram 10 diagram of conventional conventional Kundt μm2, 2nd
The figure is a block diagram of a conventional detection unit, and a block diagram of a detection system according to the present invention. Explanation of symbols 1 Detection s 2 Control 5
Sampling pump 4 Heat exchanger 5 Replenisher addition pump 6 (No. II braided wire 7 Electroless filter 8
F1 (-Reference integrated Dendan 9 Steel colorimetric cell 10
HCHO detection part 11 air bleed! 12
a16m stirrer 15 water tank-3 (

Claims (1)

[Claims] 1. In an automatic tube station for an electroless liquid that is sequentially applied and erased and continuously refilled with nine components, l1lj! L
! 5 Electroless Meat 51 liquid t Nangling, add a certain amount of water t' to dilute it, make a homogeneous solution and apply electric current C and t* Electroless Meat 5 liquid Automatic pipe layering method 2. A disadvantage of the buttock claim where the chain ratio after dilution and before dilution is 1/2-1/20! Automatic tube layering method for electroless plating solution as described in Section 1 4. Automatic tube layering method for electroless plating self-destruction according to the range of 1 machine or 2nd JJI report where the dilution water is tap water ◎