JPS58138095A - Method of producing ceramic multialyer circuit board - Google Patents

Method of producing ceramic multialyer circuit board

Info

Publication number
JPS58138095A
JPS58138095A JP2008682A JP2008682A JPS58138095A JP S58138095 A JPS58138095 A JP S58138095A JP 2008682 A JP2008682 A JP 2008682A JP 2008682 A JP2008682 A JP 2008682A JP S58138095 A JPS58138095 A JP S58138095A
Authority
JP
Japan
Prior art keywords
layer
conductive
holes
laminated
layers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2008682A
Other languages
Japanese (ja)
Inventor
近藤 治己
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Tokushu Togyo KK
Niterra Co Ltd
Original Assignee
NGK Spark Plug Co Ltd
Nippon Tokushu Togyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Spark Plug Co Ltd, Nippon Tokushu Togyo KK filed Critical NGK Spark Plug Co Ltd
Priority to JP2008682A priority Critical patent/JPS58138095A/en
Publication of JPS58138095A publication Critical patent/JPS58138095A/en
Pending legal-status Critical Current

Links

Landscapes

  • Laminated Bodies (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 本発明はセライック多層配線基@0製造昧に係り、更に
詳しくは積層する金層の鱒てO導通孔の穿@およびその
孔への導電ペース)0孔雛め充填を各々同一の金層で同
時に行い、上下層との績纏に必要な導通路のみを使用し
、不必要な4通路は積層によ〉閉鎖状態とする方法であ
シ、金層の刺作費および金層の取替えII&亀時開時間
減して、低コストで劇作するセツ々ツク多層配−基板O
員造法に関するものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to the manufacture of Ceracic multilayer wiring boards, and more specifically to the drilling of conductive holes in the gold layers to be laminated and the filling of conductive paste into the holes. Embroidery of the gold layer is performed simultaneously on the same gold layer, using only the conductive paths necessary for connecting the upper and lower layers, and closing the unnecessary four paths by laminating the layers. Replacement of cost and gold layer II & Setstsutsu multi-layer circuit board O to reduce cost and opening time and create drama at low cost
It concerns the construction method.

従来のセラセック多層配−基板OIl造法は。The conventional CERASEC multilayer wiring board OIl manufacturing method is as follows.

グリーンシートを積層枚数だけ截断製作して。Cut the green sheet to the number of sheets to be laminated.

各々層の規定位置に各層毎のパンチング金層を使用して
導通孔を穿設し、その導通孔内にWt九は励或いはW 
+ Mo O金属粉末をバインダーと濤剤とを混合して
調製し先導電性ペーストを各層別に孔纏め充填して、次
いで各層別011111配−gilIを印刷形威して、
これを積重ね接着し加熱樹脂抜き后、焼結して製作する
一〇″e6つ九。この製造法によれば、積層する各層0
4)規定位置に、各層毎のパンチング金層を使用して導
通孔を穿設し、壕えぞの孔への導電性ペーストの孔部め
充IKも各層毎に別々にわけて実施せねばならず、七〇
九め導通孔の孔位置O違つ九パンチング金臘および孔部
め充填用金層を、別々K11作せねばならなかった。蜆
に金臘O属作費が賞与、かつ穿設中充填の丸めO金層の
取替え段取時間を多く必要としsII造=ストが非常に
鳥かつ丸。ま九それに加え、最近O高書鷹^集積化OI
I求で積層枚数がII度に増加し、かつ各層O/枚に設
けられる導通孔数も増加して。
A conductive hole is formed at a prescribed position in each layer using a punched gold layer for each layer, and Wt9 is excited or Wt is inserted into the conductive hole.
+ Mo O metal powder was prepared by mixing a binder and a scattering agent, and the leading conductive paste was packed into holes for each layer, and then the 011111 distribution was printed for each layer,
This is stacked and bonded, heated and resin is removed, and then sintered to produce a 10"e6x9. According to this manufacturing method, each layer to be laminated has 0.
4) Conductive holes must be punched at specified positions using the punched gold layer for each layer, and IK filling the holes with conductive paste must be performed separately for each layer. Therefore, it was necessary to make separate K11 punching metal bolts and a gold layer for filling the holes at different hole positions for the 709th through holes. In addition, the gold layer cost was a bonus, and it took a lot of time to set up the replacement of the rounded gold layer during drilling, so the sII construction was extremely difficult. In addition to that, recently O high book hawk ^ integrated OI
The number of laminated layers increased to 100% due to demand, and the number of conductive holes provided in each layer increased as well.

製作時間の増大と製造コストのより上昇を招来し丸。This increases production time and production costs.

本尭−は上記問題点を解決すると同時に、完成品の品質
を低下することなく、剃造工1を効率化し九セラ電ツク
多層配線fi11[O製造法を提供するものであ)、そ
O要旨aS許請求の範−に記載し丸内容によるもOで、
積層する金層の導通路形成の丸めの總での導通孔を、一
括して6層の総てのグリーンシートに同様で同時に穿設
して、この総ての導通孔に一括して導電性ペーストを同
時に充填孔部めして導通路とし、その上下層との結線に
必ll!な導通路のみを使用して各層の上面に配線回路
を印刷形威し、積層接着して不必要な導通路は閉鎖状態
とする製造法を採用するものである。その丸め多層配線
基板の積層枚数の多少に抱わらず、導通孔O孔−け金l
1ltIP゛よび孔部め充填機部は最少個数−’t”a
gusm工m、w出来るもので、積層枚数の多い多層配
線基板の製造に、よp効率を発揮する調達法で参る。
Motoya solves the above problems and at the same time improves the efficiency of the shaving process 1 without degrading the quality of the finished product. It is also O according to the content of the summary aS claims.
Conductive holes for forming conductive paths in the gold layers to be laminated are simultaneously drilled in all six layers of green sheets in the same manner, and all conductive holes are made conductive at the same time. Fill the holes with paste at the same time to create a conductive path and connect it to the upper and lower layers! A manufacturing method is adopted in which wiring circuits are printed on the top surface of each layer using only conductive paths, and unnecessary conductive paths are closed by laminating and bonding. Regardless of the number of laminated layers of the rounded multilayer wiring board, the conductive hole O hole
Minimum number of 1ltIP' and hole filling machine parts -'t"a
We will use a procurement method that is highly efficient in manufacturing multilayer wiring boards with a large number of laminated boards, using products that can be manufactured by GUSM.

本発明の製造法採用によ)、従来妹での金臘纒作費、金
層纒作期間および食膳りa取〉替え時間が各々馳以下に
低減或いは短縮出来て、II造ココスト低減に大暑〈役
立つ丸。′*九多層配線基板完成品の4&能能中縁性品
質において従来品と何畳差違なく嵐好なものであった。
By adopting the manufacturing method of the present invention), the cost of making gold layer, the period of making gold layer, and the time for changing meals can be reduced or shortened to less than the conventional method. <Useful circle. '*9 The completed product of the multilayer wiring board was superior to the conventional product in terms of quality and quality.

以下、実施例によりIF細iIc説明するが、本発明の
要旨を越えない範囲内において、これWc@定されない
Hereinafter, IF details will be explained using examples, but this will not be determined within the scope of the gist of the present invention.

実施例 ム110s粉末タコ重量−に焼結剤どしてCaO5Mg
0 、810s O金量で1重量%tlsjt金計10
0mに対し、解膠剤ajmsブチラール樹脂−1@ 。
Example Mu 110s Powder Octopus Weight - Added sintering agent to CaO5Mg
0, 810s O gold amount 1% by weight tlsjt gold total 10
0m, peptizer ajms butyral resin-1@.

DIP (ヂプチルフタレート)JiltエタノールJ
oOII * )ルエンJoy*を加え、叱ル内にて/
j時間渦会して泥漿とし九。ヒO泥漿を市−晶のプラス
チツタフィルム上に、既知のドクターブレードエ繊で厚
さo、j−のグリーンレートを成形し、/IOx/DO
−の寸法に裁断して1枚を準備しえ。
DIP (dibutyl phthalate) Jilt ethanol J
oOII *) Add Luen Joy* and in the scolding room/
j Time turns into a whirlpool and turns into mud. A green plate of thickness o, j is formed using a known doctor blade fiber on a plastic film made of IOx/DO.
Prepare one sheet by cutting it to the dimensions of -.

以下、本発@O平画−である第JIKより説―する。ム
―は積層−着し九と自上層に位置するものであり、B図
は中間層%C′図は下層に位置する平面図である0図中
lla、//b、/ICは上記し九グリーンシートであ
如、この1層の上下層連結に必要な導通路形成の丸めの
導通孔の全部の孔を箇を孔11aJwKて打all/台
でJ層間時に穿設する。その導通孔に1粒径I〜jp@
Qタンダステン粉車にエチルセル闘−ズ樹脂とブチルカ
ルピトールアセテ−)OIII剤を加えて波状にし九も
のを、圧入法によJ)J層間時に注入して導通路/Jt
ii成する0次に各1層の上面に必要な配線印刷/J@
、/1b、/Jaを上記タングステンの液状物にてそれ
ぞれを形成する。この時配線印刷位置紘、不必要な導通
路箇所と交接しない離れ九J6に形成されるものとする
0次KJ層を積重ねて不易ll!な導通路紘閉鎖状態と
し、温111!76cm11にで圧力を加えて積層接着
し、温度JOOC#PKて樹脂練盾、水素と窒素の混食
雰囲気中の温度tzzocycて鉤威し、一体化し九多
層配−基I[O飾鐘体を得た。
Below, I will explain from the first JIK, which is the original @Ohiraga. Figure B is the intermediate layer. Figure C' is a plan view of the lower layer. As with the case of the green sheet, all of the rounded conductive holes for forming conductive paths necessary for connecting the upper and lower layers of this one layer are drilled between the J layers using holes 11aJwK. One particle size I ~ jp @ in the conduction hole
Add ethyl cell resin and butylcarpitol acetate (OIII) agent to Q Tandasten powder wheel, make it into a wave shape, and inject it between the J) J layers using the press-in method to form a conductive path/Jt.
ii Required wiring printing on the top surface of each 1st layer to be formed/J@
, /1b, and /Ja are formed using the above-mentioned tungsten liquid material. At this time, the 0th order KJ layer is stacked on top of each other so that the wiring is printed in the same position as the wiring, and the 0th order KJ layer is formed at a distance of 9 J6 that does not intersect with any unnecessary conductive paths. With the conduit passage closed, laminated and bonded under pressure at a temperature of 111!76cm11, a resin shield at a temperature of JOOC#PK, and a hook at a temperature of tzzocyc in a mixed atmosphere of hydrogen and nitrogen, were integrated. A multilayered base I[O decorated bell body was obtained.

そ011Nlメツ中およびムUメツ命O真−JaIlを
施し、規定位置にシリコンチップが実装されて装置に取
付は使用される。この時の基板の絶縁性中性総画におい
て何等の支障も生ぜず、嵐好に使用−統中である。
Then, the silicon chip is mounted in the specified position and used for installation in the device. At this time, there were no problems with the insulating neutrality of the board, and it was used successfully.

比較例 従来方法の千画図である第1図と、そO繍に−に’よp
O積層接着断面図であるIIJIIKよp説明する。s
1図のム図は積層接着し九と自上層に位置し、Bllは
中間層、0図は下層に位置するものである0図中’ &
 + ’ b + 76は上記実施例で成形し九と同じ
グリーンシートであ如これに上下層との導通路1a+J
b*Joとなる形成方法は、各個々のパンチング金部を
使用して導通孔を穿設する。この場合3層である丸め1
台の金部を使用しえ。この導通孔に上記実施例と同じタ
ングステンのペーストを注入法によ〉1層別々に注入し
て導通路J & * J b * J Oを形成した。
Comparative example Figure 1 is a 1000-page drawing of the conventional method, and the
This will be explained from IIJIIK, which is a cross-sectional view of O laminated adhesive. s
The M diagram in Figure 1 is laminated and bonded and is located in the upper layer, Bll is the middle layer, and Figure 0 is the lower layer.
+ ' b + 76 is the same green sheet as 9 molded in the above embodiment, and a conductive path 1a+J between the upper and lower layers
The forming method b*Jo uses each individual punching metal part to punch through holes. Rounding 1 which in this case is 3 layers
Use the metal part of the stand. One layer of the same tungsten paste as in the above embodiment was separately injected into the conductive holes by the injection method to form conductive paths J&*Jb*JO.

次に各1層の上面に配線印刷J&+J b * J c
を上記タングステンペーストにてそれ(れ形成する。次
に1層を積重ねて、加熱しながら圧力を加えて接着し、
実施例と同一条件で焼成し、一体化し九多層配線基板の
焼結体を得た。その焼結体KNiメッキおよびムUメッ
キの表面処理を施し、規定位置にシリコンチップが実装
されて使用される。
Next, print wiring on the top surface of each layer J&+J b * J c
Form it with the above tungsten paste.Next, stack one layer and bond by applying pressure while heating.
Firing was performed under the same conditions as in the example, and a sintered body of nine multilayer wiring boards was obtained. The sintered body is subjected to surface treatment with KNi plating and MuU plating, and a silicon chip is mounted at a specified position for use.

以上の実施例と比較例はそO製造方法について図面上、
最も簡単な3枚の積層配線基板を例に採〉説明したが、
通常1枚以上が一般的である。蛾近では^密度高集積化
の要求でJo、〜10枚の積層配線基板の生産が増加し
ている丸め、本発明の製造法は金m*作費、金m製作期
間および金臘の段取シ替え時間を大巾に低減或いは短縮
出来て、製造コストを大きく低減出来、かつ品質面の保
証も確認出来て、産業上寄与する画人である。
The above examples and comparative examples are based on the drawings regarding the O manufacturing method.
I explained using the simplest three-layer wiring board as an example, but
Usually, one or more sheets are common. In Mochichi, the production of ~10 laminated wiring boards is increasing due to the demand for higher density integration.The manufacturing method of the present invention reduces production costs, production time, and stages of production. It is an artist who can greatly reduce or shorten replacement time, greatly reduce manufacturing costs, and ensure quality assurance, making it an artist who can contribute to industry.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は従来の製造法で形成し丸干面図で69、A図は
積層接着し九と自上層に位置するもの、B図は中間層、
0図は下層で6D、mK−によpの断固積層体をIIJ
IK示し、嬉J閣は本発明の製造法で形成した各層の平
向図である。 ’ & a / b m / @ e /’a+//b
+/10  ”” グリーンシート、コ1.コb、コc
、/J・・・上下層への導通路、J & * J b 
a J (! + IJk*/Jb*/J、・・・導体
配− 特許出願人日本特殊一業株式金社 代表者小川修次
Figure 1 is a circular view of the product formed using the conventional manufacturing method.
Figure 0 shows the bottom layer of a 6D, mK-p resolute stack of IIJ
IK is a plan view of each layer formed by the manufacturing method of the present invention. '& a / b m / @ e /'a+//b
+/10 ”” Green sheet, Co1. Kob, Koc
, /J... Conduction path to upper and lower layers, J & * J b
a.

Claims (1)

【特許請求の範囲】 V)積層する各層の上面に導体回路O配線印刷と、その
上下各層O配線とを結ぶ導通路を設けた・グリーンシー
トを積重ね接着し、焼成して作成するセライック多層配
線基板の製造法において、上記1.積層する金層O導通
路形成の丸めの総てO導通孔を、一括して積層する各層
の総てのグリーンシー)に、llil時に一般して、こ
の総ての導通孔に導電性ペーストを全層同時に充填孔部
めして導通路とし、その上下層との結線に必要な導通路
のみを使用して各層の上1に起重回路を印刷形威し、積
層接着して不必**導通路は閉鎖状態として、加熱樹脂
抜自后、l≠10−/400Cの非酸化雰−気中で焼結
することを411Ikとする一ランツク多層配線基板の
製造法。 −) 特許−京の範−s1項記載の積層する金層O11
てO導通孔O穿歇は、岡−のパンチング金−で形成する
ことを譬黴とするセラミツタ多層配線ts*o馴造味・ (3)  譬許請求の範m*iil[IF!載o金層總
−co。 通孔への導電性ペーストの充填孔部め紘、同一〇金層で
同時に行うことを41I徴とするセラミツタ多層配線基
板の製造法。
[Claims] V) Conductive circuit O wiring printed on the upper surface of each layer to be laminated, and a conductive path connecting the O wiring of each layer above and below the layer.Ceraic multilayer wiring created by stacking and bonding green sheets and firing. In the method for manufacturing a substrate, the above 1. At the time of lamination, conductive paste is generally applied to all the conductive holes of the gold layers to be laminated. Fill the holes in all layers at the same time to create a conductive path, print a hoisting circuit on the top of each layer using only the conductive paths necessary for connection with the upper and lower layers, and glue them together to eliminate unnecessary conductors. A method for producing a one-rank multilayer wiring board according to 411Ik, in which the passages are closed and the resin is removed by heating, followed by sintering in a non-oxidizing atmosphere at l≠10-/400C. -) Patent-Kyo no Han-Laminated gold layer O11 described in s1
(3) Scope of claims m*iil [IF! Posted by 金layer-co. A method for manufacturing a ceramic ivy multilayer wiring board, in which filling the through holes with conductive paste and filling the holes at the same time in the same gold layer is a 41I feature.
JP2008682A 1982-02-10 1982-02-10 Method of producing ceramic multialyer circuit board Pending JPS58138095A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008682A JPS58138095A (en) 1982-02-10 1982-02-10 Method of producing ceramic multialyer circuit board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008682A JPS58138095A (en) 1982-02-10 1982-02-10 Method of producing ceramic multialyer circuit board

Publications (1)

Publication Number Publication Date
JPS58138095A true JPS58138095A (en) 1983-08-16

Family

ID=12017289

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008682A Pending JPS58138095A (en) 1982-02-10 1982-02-10 Method of producing ceramic multialyer circuit board

Country Status (1)

Country Link
JP (1) JPS58138095A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6059798A (en) * 1983-09-13 1985-04-06 日立化成工業株式会社 Ceramic circuit board
JPS6059797A (en) * 1983-09-13 1985-04-06 日立化成工業株式会社 Ceramic circuit board
JPS6178116A (en) * 1984-09-25 1986-04-21 日本電気株式会社 Multilayer hybrid electronic component
JPS6179218A (en) * 1984-09-26 1986-04-22 日本電気株式会社 Multilayer hybrid electronic component

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51127377A (en) * 1975-04-28 1976-11-06 Fujitsu Ltd Laminated ceramic circuit substrate
JPS56100495A (en) * 1980-01-16 1981-08-12 Fujitsu Ltd Method of manufacturing ceramic multilayer printed circuit board

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51127377A (en) * 1975-04-28 1976-11-06 Fujitsu Ltd Laminated ceramic circuit substrate
JPS56100495A (en) * 1980-01-16 1981-08-12 Fujitsu Ltd Method of manufacturing ceramic multilayer printed circuit board

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6059798A (en) * 1983-09-13 1985-04-06 日立化成工業株式会社 Ceramic circuit board
JPS6059797A (en) * 1983-09-13 1985-04-06 日立化成工業株式会社 Ceramic circuit board
JPS6178116A (en) * 1984-09-25 1986-04-21 日本電気株式会社 Multilayer hybrid electronic component
JPS6179218A (en) * 1984-09-26 1986-04-22 日本電気株式会社 Multilayer hybrid electronic component

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