JPS58135647A - Manufacture of copper-carbon fiber compound material - Google Patents

Manufacture of copper-carbon fiber compound material

Info

Publication number
JPS58135647A
JPS58135647A JP1754682A JP1754682A JPS58135647A JP S58135647 A JPS58135647 A JP S58135647A JP 1754682 A JP1754682 A JP 1754682A JP 1754682 A JP1754682 A JP 1754682A JP S58135647 A JPS58135647 A JP S58135647A
Authority
JP
Japan
Prior art keywords
core material
carbon fiber
copper
carbon fibers
coated carbon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1754682A
Other languages
Japanese (ja)
Inventor
Kenji Suzuki
建治 鈴木
Kazutoyo Narita
成田 一豊
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1754682A priority Critical patent/JPS58135647A/en
Publication of JPS58135647A publication Critical patent/JPS58135647A/en
Pending legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C49/00Alloys containing metallic or non-metallic fibres or filaments
    • C22C49/14Alloys containing metallic or non-metallic fibres or filaments characterised by the fibres or filaments

Abstract

PURPOSE:To obtain a Cu-C compound material having almost no difference between the coefficient of thermal expansion on the center part and that on the circumference of the material by a method wherein copper coated carbon fibers, which are made into a bundle and twisted, is used as a core material, other steel coated carbon fibers are wound thereon, and then they are compressed and heated up. CONSTITUTION:The core material 11 is obtained by having a plurality of steel coated carbon fibers made into bundles and twisted. This core material is twisted in a clockwise direction, for example, the tensile dorce at both ends as shown by the arrows A and B, and twisting force as shown by the arrows C and D are added, and the above is formed into a strong stick form body. Nos. 12 and 13 are the side plates provided on the stick type core material 11, and a steel coated carbon fiber bundle 14 is wound around the core material 11 using the side plates 12 and 13. After a prescribed amount of the steel coated carbon fiber 14 has been wound around, the side plates 12 and 13 are removed, and the carbon fiber is soaked into the slurry of copper powder and copper powder is impregnated into the carbon fibers, as occasion demands, for the purpose of regulating the composition ratio between copper and carbon. Then, the wound body is heated and compressed together with the core material 11, copper is formed into matrix and a Cu-C compound material wherein carbon fibers are enbedded can be obtained.

Description

【発明の詳細な説明】 本発明は銅−炭素繊維複合材の製造方法、特に半導体装
置のta材として好適な鋼マトリクス中に炭素繊維を1
設した銅−炭素繊維複合材の製造方法に関するものであ
る。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for producing a copper-carbon fiber composite material, in particular a method for manufacturing a copper-carbon fiber composite material, in which carbon fiber is incorporated into a steel matrix suitable as a TA material for semiconductor devices.
The present invention relates to a method for producing a copper-carbon fiber composite material.

鋼−炭素繊維複合材(以下Cu−Cm合材と略記する。Steel-carbon fiber composite material (hereinafter abbreviated as Cu-Cm composite material).

)は銅の持つ導電性、導熱性、炭素繊維の持つ低熱膨張
性を活かし、組成比により、自由に特性を変え得る点で
有効であり、特に半導体装置において半導体基体を支持
するfIL極材として用いた場合に効力を発揮する。
) is effective in that its properties can be freely changed by changing the composition ratio by taking advantage of the electrical conductivity and thermal conductivity of copper and the low thermal expansion of carbon fiber, and it is particularly useful as a fIL pole material that supports the semiconductor substrate in semiconductor devices. It is effective when used.

第1図はこのCu −、C複合材を用いた半導体装置l
を示しており、半導体基体2はpn接合Jを有し、その
端部けg3に露出している。′a3にはガラス4がll
rM安定化材として焼付けられている。
Figure 1 shows a semiconductor device using this Cu-,C composite material.
, the semiconductor substrate 2 has a pn junction J and is exposed at its end g3. 'a3 has glass 4
It is baked in as rM stabilizing material.

半導体基体2の上下主表面にはろう材5.6を介してC
u−C複合材で形成した電極材7.8が固着されている
。半導体基体2の周囲はシリコーンゴム9を介して両電
甑材7.8にかけてエポキシ樹脂10によりモールドさ
れている。
C is applied to the upper and lower main surfaces of the semiconductor substrate 2 through a brazing material 5.6.
Electrode material 7.8 made of u-C composite material is fixed. The periphery of the semiconductor substrate 2 is molded with an epoxy resin 10 via a silicone rubber 9 and over both electrode plates 7 and 8.

このような構造の半導体装lf1はボタン型と称せられ
、両電極板7.8に図示していない冷却体が押圧されて
使用される午とが多いつ 両電極板7.8はCU−C複合材であり、その組成比に
より、半導体基体2と熱膨張係数を億めて近付けること
ができるので、半導体基体2には熱応力が加わらず、従
って、半導体基体2Vi破塙しない筈である。
The semiconductor device lf1 having such a structure is called a button type, and is often used with a cooling body (not shown) pressed against both electrode plates 7.8. Since it is a composite material and its composition ratio allows it to have a coefficient of thermal expansion close to that of the semiconductor substrate 2, no thermal stress is applied to the semiconductor substrate 2, and therefore, the semiconductor substrate 2Vi should not rupture.

−しかしながら、半導体基体2がほぼ中央から周辺に向
う亀裂を生じて破壊することが確認された〇そこで、そ
の1因を究明したところ、CU−C複合材の製造に問題
があるのではないかと考えるに到った。
-However, it was confirmed that the semiconductor substrate 2 cracked from approximately the center toward the periphery and was destroyed.When we investigated the cause of this, we found that there may be a problem in the manufacturing of the CU-C composite material. I got to thinking.

破壊を生じたものは、炭素繊維が半導体基体2の主表面
と平行に渦巻状に巻かれたもので、その中央には、芯材
を抜いた後に銅粉を詰め、焼結してあった。
The one that caused the destruction was one in which carbon fiber was spirally wound parallel to the main surface of the semiconductor substrate 2, and the center of the fiber was filled with copper powder and sintered after the core material had been removed. .

つまり、周囲けCU−C複合材となっていても中央ば鋼
そのもので、熱膨張量が異なり、そこで、冷却体から押
圧力を受けているため、半導体基体2の中央部に過荷重
が加わって中央から周辺に向う亀裂を生じたと推定され
るう それ故、本発明の目的は炭lA繊維が渦巻状に埋込まれ
たものであっても中央部にまで充分巻込まれており、従
って、中央と周辺で熱膨張系数に差をほとんど生じない
Cu−C複合材の製造方法を提供するにあろう 上記目的を達成する本発明の特徴とするところけ鋼被覆
炭素繊維を束ねて撚ったものを芯材とし加圧することに
ある。
In other words, even if the surrounding CU-C composite material is used, the steel in the center itself has a different amount of thermal expansion, and as it is receiving pressing force from the cooling body, an overload is applied to the center of the semiconductor substrate 2. Therefore, the object of the present invention is to ensure that even if the charcoal IA fibers are embedded in a spiral shape, they are sufficiently rolled up to the center, and therefore, The present invention is characterized by providing a method for producing a Cu-C composite material with almost no difference in thermal expansion coefficient between the center and the periphery. The purpose is to apply pressure using a material as a core material.

以下、図面に示した実施例に基づいて本発明製造方法を
説明する。
Hereinafter, the manufacturing method of the present invention will be explained based on the embodiments shown in the drawings.

第2図において、11は炭素繊維に鋼めっき層を設けた
もの、つまり、鋼被覆炭素繊維を複数本束ねて撚って得
た芯材である。この芯材は例えば右方向に撚られており
、両端で矢印A、Bで示すよう忙引張力と、また、矢印
C,Dで示すように搬込力が加えられ、強固な棒状体と
されている。
In FIG. 2, reference numeral 11 is a core material obtained by bundling and twisting a plurality of steel-coated carbon fibers, that is, carbon fibers provided with a steel plating layer. This core material is twisted, for example, in the right direction, and tension is applied at both ends as shown by arrows A and B, and carrying force is applied as shown by arrows C and D, resulting in a strong rod-shaped body. ing.

12.13はこの棒状芯材11に設けた側板で、鋼被覆
炭素繊維の束14が側板12,13をガイドとして芯材
11に巻付けられる。このようにして所定量の鋼被覆炭
素繊維束14が巻付けられたら、側板12,13を外し
、鋼と炭素の組成比を調整するため、必要に応じて、銅
粉スラリー中に浸漬して 炭素繊維間に銅粉を含浸させ
る。次に、この巻付体を芯材11も含めて加熱加圧して
、鋼      1□をマトリクスとし、炭素繊維が埋
込まれたCu−C複合材を得る。
Reference numerals 12 and 13 denote side plates provided on this rod-shaped core material 11, and a bundle 14 of steel-coated carbon fibers is wound around the core material 11 using the side plates 12 and 13 as guides. After a predetermined amount of the steel-coated carbon fiber bundle 14 has been wound in this way, the side plates 12 and 13 are removed, and if necessary, the side plates 12 and 13 are dipped in copper powder slurry to adjust the composition ratio of steel and carbon. Copper powder is impregnated between carbon fibers. Next, this wound body including the core material 11 is heated and pressurized to obtain a Cu--C composite material in which the steel 1□ is used as a matrix and carbon fibers are embedded therein.

加熱加圧した時、芯材11は搬込まれているため、加圧
力によって炭素繊維がいわば伸びたコイルが縮まるよう
な状態を呈するだけで、各炭素繊維が不規則に変形する
ことはない。
When the core material 11 is heated and pressurized, the core material 11 is carried in, so that the carbon fibers are only stretched and contracted by the pressurizing force, and each carbon fiber is not irregularly deformed.

とのCU−C複合材は芯材41自体が炭素繊維を有し、
かつ一体化しているため、中央部から周辺部の間に炭素
繊維が存在したものであり、中央部における芯材11の
撚込率帯鋼めつき層と炭素繊維の組成比を調整すれば中
央部から周辺部にかけてほぼ均一な熱膨張係数を持つC
U−C複合材とすることができろう 従って、中央部と周辺部でほぼ均一に膨張・収縮が起り
、中央部で突出するようたことけない。
In the CU-C composite material, the core material 41 itself has carbon fiber,
And since they are integrated, carbon fibers existed between the center and the periphery, and by adjusting the composition ratio of the strip steel plating layer and the carbon fiber of the core material 11 in the center, the center C has an almost uniform coefficient of thermal expansion from the center to the periphery.
It may be made of a U-C composite material. Therefore, expansion and contraction occur almost uniformly in the center and periphery, and no protrusion occurs in the center.

このため、半導体装置の電極板として用いた場合、冷却
体から押圧力を受けそも、半導体基体の一部に過荷重が
加わることはなく、半導体基体が破壊するととけないう 鋼被覆炭素繊維束14に代えて、銅被覆炭素繊維を布状
に織ったものを芯材11に巻付けてもよい。この場合、
バイアスを加えた鋼被覆炭素繊維織布を用いると加熱加
圧した時に各炭素繊維が不規則に変形することはない。
For this reason, when used as an electrode plate of a semiconductor device, even when subjected to pressing force from a cooling body, no overload is applied to a part of the semiconductor substrate, and the steel-coated carbon fiber bundle does not melt when the semiconductor substrate breaks. Instead of 14, a cloth-like weave of copper-coated carbon fiber may be wound around the core material 11. in this case,
By using a biased steel-coated carbon fiber woven fabric, each carbon fiber will not deform irregularly when heated and pressurized.

鋼被覆炭素繊維織布を用いて得たCU−C複合材はその
半径方向、円周方向だけでなく、厚さ方向においても、
熱膨張係数を半導体基体に近似させることができ、との
CU−C複合材は、1対の電極間に少くとも1枚の半導
体基体をろう付し、周囲を半導体基体と熱膨張係数が近
似し、表面安定化機能を有するガラスで封止したガラス
モールド聾半導体装置の上記1対の電極として適用する
ことができる。
The CU-C composite material obtained using the steel-coated carbon fiber woven fabric exhibits high resistance not only in the radial direction and circumferential direction, but also in the thickness direction.
The CU-C composite material can have a thermal expansion coefficient similar to that of a semiconductor substrate, and the CU-C composite material has at least one semiconductor substrate brazed between a pair of electrodes, and the surrounding area has a thermal expansion coefficient similar to that of the semiconductor substrate. However, it can be applied as the pair of electrodes of a glass-molded deaf semiconductor device sealed with glass having a surface stabilizing function.

以上述べたように、本発明製造方法によれば、中央と周
辺で熱膨張係数の差をほとんど生じないCU−C複合材
を得ることができる。
As described above, according to the manufacturing method of the present invention, it is possible to obtain a CU-C composite material in which there is almost no difference in coefficient of thermal expansion between the center and the periphery.

【図面の簡単な説明】 第1図はCu−C複合材を電極板として用いた半導体!
uJlの断面図、第2図は本発明製造方法を説明する図
である。 1・・・半導体装置、2・・・半導体基体、5.6・・
・ろう材、7.8・・・電極板、11・・・芯材、12
.13・・・¥11 躬2(21 ↑
[Brief explanation of the drawings] Figure 1 shows a semiconductor using a Cu-C composite material as an electrode plate!
A cross-sectional view of uJl, FIG. 2 is a diagram illustrating the manufacturing method of the present invention. 1... Semiconductor device, 2... Semiconductor substrate, 5.6...
・Brazing material, 7.8... Electrode plate, 11... Core material, 12
.. 13...¥11 謬2(21 ↑

Claims (1)

【特許請求の範囲】 1、鋼被覆炭素繊維を束ねてこれを撚って得た芯材に更
に他の鋼被覆炭素繊維を巻付け、その後加熱加圧するこ
とを特徴とする銅−炭素繊維複合材の製造方法。 2、特許請求の範囲第1項〈おいて、芯材に引張力と撚
込力を加えつつ他の鋼被覆炭素繊維を巻付けることを!
!If微とする鋼−炭素繊維複合材の製造方法う
[Claims] 1. A copper-carbon fiber composite characterized by further wrapping other steel-coated carbon fibers around a core material obtained by bundling and twisting steel-coated carbon fibers, and then heating and pressurizing the core material. Method of manufacturing wood. 2. Claim 1: Wrapping other steel-coated carbon fibers while applying tensile force and twisting force to the core material!
! Method for manufacturing fine steel-carbon fiber composite material
JP1754682A 1982-02-08 1982-02-08 Manufacture of copper-carbon fiber compound material Pending JPS58135647A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1754682A JPS58135647A (en) 1982-02-08 1982-02-08 Manufacture of copper-carbon fiber compound material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1754682A JPS58135647A (en) 1982-02-08 1982-02-08 Manufacture of copper-carbon fiber compound material

Publications (1)

Publication Number Publication Date
JPS58135647A true JPS58135647A (en) 1983-08-12

Family

ID=11946905

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1754682A Pending JPS58135647A (en) 1982-02-08 1982-02-08 Manufacture of copper-carbon fiber compound material

Country Status (1)

Country Link
JP (1) JPS58135647A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5158828A (en) * 1988-10-17 1992-10-27 Sumitomo Metal Industries, Ltd. Carbon/metal composite

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5158828A (en) * 1988-10-17 1992-10-27 Sumitomo Metal Industries, Ltd. Carbon/metal composite
US5531943A (en) * 1988-10-17 1996-07-02 Sumitomo Metal Industries, Ltd. Method of making a carbon/metal composite

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