JPS5812831Y2 - gate valve - Google Patents
gate valveInfo
- Publication number
- JPS5812831Y2 JPS5812831Y2 JP636681U JP636681U JPS5812831Y2 JP S5812831 Y2 JPS5812831 Y2 JP S5812831Y2 JP 636681 U JP636681 U JP 636681U JP 636681 U JP636681 U JP 636681U JP S5812831 Y2 JPS5812831 Y2 JP S5812831Y2
- Authority
- JP
- Japan
- Prior art keywords
- gate valve
- valve body
- partition wall
- hole
- conveying device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Physical Vapour Deposition (AREA)
- ing And Chemical Polishing (AREA)
- Sliding Valves (AREA)
Description
【考案の詳細な説明】
本考案は、隔壁に開口している通孔を開閉するためのケ
ート弁の改良に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an improvement in a gate valve for opening and closing a through hole opened in a partition wall.
例えば−第１図に示すような真空処理装置は。For example - a vacuum processing apparatus as shown in FIG.
処理真空室１内でスパッタリング−エツチングなどの処
理を行なうものであるが、圧力差を小さくするために処
理真空室１０両側には中間真空室２Ａ、２Ｂが隣設され
ており、各室１，２Ａ。Processing such as sputtering and etching is performed within the processing vacuum chamber 1. In order to reduce the pressure difference, intermediate vacuum chambers 2A and 2B are adjacently provided on both sides of the processing vacuum chamber 10. 2A.
２Ｂを密閉するためにゲート弁３，３・・・・・・が各
隔壁４に配設されている。Gate valves 3, 3, .
一方、各室１，２Ａ。２Ｂ内には被処理物を搬送するた
めのベルトコンベア５，５．５が配設されている。On the other hand, each room is 1 and 2A. Belt conveyors 5, 5.5 for conveying the objects to be processed are disposed within 2B.
ところが、ゲート弁３の弁体は比較的厚いため、ベルト
コンベア５の端部はゲート弁３を避けるために、各室１
゜２Ａ、２Ｂを区画している隔壁４，４かもかなりの距
離離間しなげればならない。However, since the valve body of the gate valve 3 is relatively thick, the end of the belt conveyor 5 has to be connected to each chamber 1 in order to avoid the gate valve 3.
The partition walls 4, 4 that partition 2A and 2B must also be separated by a considerable distance.
したがって、ベルトコンベア５により被処理物全他室に
搬送する際には、ベルトコンベア５の端部間にレール、
ローラ（図示せず）等を介装しなければならなかった。Therefore, when conveying all the objects to be processed by the belt conveyor 5 to other rooms, there is a rail between the ends of the belt conveyor 5.
A roller (not shown) or the like had to be interposed.
本考案は、このような点に鑑み、前述したレール、ロー
ラ等を介装しなくとも被処理物を隔壁の一側から他側へ
搬送し得るようにしたゲート弁を提供することを目的と
してなされたもので、弁体ノ背部ニベルトコンベアのよ
うな搬送装置の端部を受容し得る受容部を形威し−この
受容部内に搬送装置の端部を受容して搬送装置を隔壁に
近接せしめるようにしたものである。In view of these points, the purpose of the present invention is to provide a gate valve that can transport objects to be processed from one side of a partition wall to the other side without using the above-mentioned rails, rollers, etc. The back of the valve body is formed with a receptacle capable of receiving the end of a conveying device such as a Nibelt conveyor - the end of the conveying device is received in this receptacle to bring the conveying device close to the bulkhead. It was designed to encourage them.
包丁１本考案を図面に示す実施例により説明する０
第２図および第３図において、室６，７の隔壁４には通
孔８が開口しており、この通孔８を介して室６から室７
へ物品（図示せず）を搬送するようになっている。The present invention will be explained with reference to an embodiment shown in the drawings. In FIGS. 2 and 3, a through hole 8 is opened in the partition wall 4 of the chambers 6 and 7, and the chamber 6 is opened through the through hole 8. Kara room 7
It is adapted to transport articles (not shown) to.
そして、この通孔８を開閉するためのゲート弁３が配設
されており、このゲート弁３は隔壁４の一側の弁座９に
接離し得る板状の弁体１０を有している。A gate valve 3 for opening and closing the through hole 8 is provided, and the gate valve 3 has a plate-shaped valve body 10 that can be moved into and out of contact with a valve seat 9 on one side of the partition wall 4. .
この弁体１０は図示しない駆動装置により第２図の実線
位置と想像線位置との間を移動し得るようになっており
、実線位置で通孔８を閉し、想像線位置で通孔８を開く
ものである。This valve body 10 can be moved between a solid line position and an imaginary line position in FIG. 2 by a drive device (not shown), and the through hole 8 is closed at the solid line position and the through hole 8 is closed at the imaginary line position. It opens.
なお、前記弁座９にはシール部材１１゜１１・・・・・
・が埋設されている。In addition, the valve seat 9 has a sealing member 11°11...
・is buried.
一方、前記室７内には物品搬送用の一対のベルトコンベ
ア５，５が左右に間隔を隔てて配設されている。On the other hand, inside the chamber 7, a pair of belt conveyors 5, 5 for transporting articles are arranged at a distance from each other on the left and right sides.
これらのベルトコンベア５は、固定的なブラケツＮ２，
１２に軸受（図示せず）を介して回転自在に支持された
支軸１３にプーリ１４が取付けられ、このプーリ１４に
ベルト１５が巻回されたものであり１図示しない他端部
には駆動プーリが配設されている。These belt conveyors 5 have fixed brackets N2,
A pulley 14 is attached to a support shaft 13 which is rotatably supported by a shaft 12 via a bearing (not shown), and a belt 15 is wound around this pulley 14. A pulley is provided.
そして、これらのベルトコンベア５の一端部は、ゲート
弁３の弁体１０の背部に形成された受容部１６内に臨ん
でおり、したがって１通孔８と近接している。One end of each of these belt conveyors 5 faces into a receiving portion 16 formed at the back of the valve body 10 of the gate valve 3, and is therefore close to the one-through hole 8.
前記受容部１６は、弁体１０の左右中央位置の上端に開
放されており、ここから下端部にまで延在し、よって。The receiving portion 16 is open at the upper end of the left-right center position of the valve body 10, and extends from there to the lower end.
ベルトコンベア５の端部は弁体１０の移動を制限しない
。The end of the belt conveyor 5 does not restrict the movement of the valve body 10.
前述した横取によれば、ベルトコンベア５の端部が弁体
１０の受容部１６内に臨んでいるので。According to the above-mentioned stealing, the end of the belt conveyor 5 faces into the receiving part 16 of the valve body 10.
この端部は通孔８に近接し、したがって、この通孔８を
介して室６から室７に物品を搬送する際に。This end is close to the through hole 8 and therefore when conveying the articles from the chamber 6 to the chamber 7 via this through hole 8.
通孔８およびベルトコンベア５間にレール、ローラなど
を介装する必要はない。There is no need to interpose a rail, roller, etc. between the through hole 8 and the belt conveyor 5.
なお１本考案のゲート弁は真空処理装置のみに限定され
るものではない。Note that the gate valve of the present invention is not limited to use only in vacuum processing equipment.
以上訣明したように１本考案に係るゲート弁は一弁体の
背部に、搬送装置の端部を受容し得る受容部を形成した
ので、搬送装置を隔壁の通孔に近接せしめることができ
、物品を処理する際にレール。As explained above, in the gate valve according to the present invention, a receiving part capable of receiving the end of the conveying device is formed on the back of the valve body, so that the conveying device can be brought close to the through hole of the partition wall. , rail when processing goods.
ローラ等を必要としないという実用的な効果を奏する。This has the practical effect of not requiring rollers or the like.
第１図は一般的な真空処理装置を示す説明図。
第２図は本考案に係るゲート弁の実施例を示す縦断面図
、第３図は第２図の相当部分の横断面図である。
１．２Ａ、２Ｂ、６．７・・・室、３・・・ゲート弁。
４・・・隔壁−５・・・ベルトコンベア、８・・・通孔
、１０・・・弁体、１５・・・ベルト−１６・・・受容
部。FIG. 1 is an explanatory diagram showing a general vacuum processing apparatus. FIG. 2 is a longitudinal cross-sectional view showing an embodiment of the gate valve according to the present invention, and FIG. 3 is a cross-sectional view of a corresponding portion of FIG. 2. 1.2A, 2B, 6.7...chamber, 3...gate valve. 4... Partition wall - 5... Belt conveyor, 8... Through hole, 10... Valve body, 15... Belt - 16... Receiving part.
Claims (1)
壁の一側から他側へ物品を搬送するために隔壁に開口し
ている通孔を開閉する弁体を有するものにおいて、前記
弁体の背部に、前記搬送装置の端部を受容し得る受容部
を形成したことを特徴とするゲート弁。A device having a valve body for opening and closing a through hole opened in the partition wall for transporting articles from one side of the partition wall to the other side by a conveying device disposed at least in one throat of the partition wall, wherein the valve body A gate valve characterized in that a receiving portion capable of receiving an end portion of the conveying device is formed on the back portion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP636681U JPS5812831Y2 (en) | 1981-01-20 | 1981-01-20 | gate valve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP636681U JPS5812831Y2 (en) | 1981-01-20 | 1981-01-20 | gate valve |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57121674U JPS57121674U (en) | 1982-07-28 |
| JPS5812831Y2 true JPS5812831Y2 (en) | 1983-03-11 |
Family
ID=29804674
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP636681U Expired JPS5812831Y2 (en) | 1981-01-20 | 1981-01-20 | gate valve |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5812831Y2 (en) |
-
1981
- 1981-01-20 JP JP636681U patent/JPS5812831Y2/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57121674U (en) | 1982-07-28 |
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