JPS58128024A - Magnetic recording medium - Google Patents
Magnetic recording mediumInfo
- Publication number
- JPS58128024A JPS58128024A JP57010361A JP1036182A JPS58128024A JP S58128024 A JPS58128024 A JP S58128024A JP 57010361 A JP57010361 A JP 57010361A JP 1036182 A JP1036182 A JP 1036182A JP S58128024 A JPS58128024 A JP S58128024A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- permalloy
- film
- recording medium
- cobalt
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910000889 permalloy Inorganic materials 0.000 claims abstract description 22
- 229910000599 Cr alloy Inorganic materials 0.000 claims abstract 6
- 239000010409 thin film Substances 0.000 claims description 41
- WAIPAZQMEIHHTJ-UHFFFAOYSA-N [Cr].[Co] Chemical compound [Cr].[Co] WAIPAZQMEIHHTJ-UHFFFAOYSA-N 0.000 claims description 25
- 229910000684 Cobalt-chrome Inorganic materials 0.000 claims description 12
- 239000010952 cobalt-chrome Substances 0.000 claims description 12
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 4
- 239000011651 chromium Substances 0.000 claims description 4
- 229910000531 Co alloy Inorganic materials 0.000 claims 1
- 239000000758 substrate Substances 0.000 abstract description 15
- 239000010408 film Substances 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 229910045601 alloy Inorganic materials 0.000 description 5
- 239000000956 alloy Substances 0.000 description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 5
- 229910052782 aluminium Inorganic materials 0.000 description 5
- 239000013078 crystal Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 229910000859 α-Fe Inorganic materials 0.000 description 5
- 229910052804 chromium Inorganic materials 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 239000013081 microcrystal Substances 0.000 description 2
- 229910001369 Brass Inorganic materials 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 238000010306 acid treatment Methods 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 239000000872 buffer Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 150000001845 chromium compounds Chemical class 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 230000005415 magnetization Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/64—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent
- G11B5/66—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent the record carriers consisting of several layers
- G11B5/672—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent the record carriers consisting of several layers having different compositions in a plurality of magnetic layers, e.g. layer compositions having differing elemental components or differing proportions of elements
Abstract
Description
【発明の詳細な説明】
水発ｆｌｔｊコバルトクロミウム、パーマロイ、コバル
ト々ロミウム三層榔造とした゛磁気記録媒体に関する０
近年ＶＴＲの発展及びコンピューター大衆化にいるのβ
垂直＄化記録と呼ばれる磁気記録方式である。垂直磁化
記録方式に用いられる記録媒体は第１図に示す如（’１
’ＩＣＴ等のフレキシブルあるいにアルミニウム等のリ
ジッドな基板１上にパーマ・イ膜２を約５ｏｏｏＸの厚
みに形成し更にその上に々ロミウムを２０アトミツクパ
ーセント含有したコバルトクロミウム合金膜５が溶成さ
れている・最上部に形成されているコバルトクロミウム
合金膜５打基析１に対して垂直にｓイヒしやすい特性を
有している。この新しい記録媒体への記録再生に新しい
構造の磁気ヘッドが用いられる。Detailed Description of the Invention [Regarding a magnetic recording medium made of three layers of cobalt chromium, permalloy, and cobalt chromium] In recent years, the development of VTRs and the popularization of computers have been
This is a magnetic recording method called perpendicular $ recording. The recording medium used in the perpendicular magnetization recording method is as shown in Figure 1 ('1
'A permanent film 2 is formed to a thickness of approximately 500X on a flexible substrate 1 such as ICT or rigid substrate 1 such as aluminum, and a cobalt-chromium alloy film 5 containing 20 atomic percent of chromium is melted on top of it. The cobalt chromium alloy film 5 formed at the top has a characteristic of being easily blown perpendicular to the substrate 1. A magnetic head with a new structure is used for recording and reproducing information on this new recording medium.
その概要を第２図に示、コバルトクロミウム合金記録媒
体４の上部に主磁極５と称するタンザク状パターンのパ
ーマロイ族が構成され、その反対側には補助磁極６と称
する棒状のフェライトにコイルを巻きつけた磁極が配置
される。この構造の磁気ヘッドによりコバルトクロミウ
ム合金ｎｃｂｔｌ１体への記録再生が行なわれる・
・コバルトクロミウム合金打その結晶＊ｉｂ六方最密構
造であり、それをα０１丁ｏ ｒ ｒｉ％ｉ度のアルゴ
ン圧力でスパッタ法によシ薄膜を形成すると基飯面に対
し［ｌＩ［Ｋ立った円柱状の構造となシ、垂直−気異方
性が生じる・その様子を第３図に示＋ ｎ ”’ｊ：！
軸方′向に長い円柱状被結晶７が基枦８上に立っている
。このＣ軸が基枦の垂直方向に沿っているｔ今ど磁気異
方＋！ｒが高く１鈴も容易で再生出力も高い。この垂直
方向からのずれｔ−ｔＸ線回折により測定することがで
きロッキングカーブと称され△θ５０なる特性が呼ばれ
−ている・即ち第４図に示す如きロッキングカーブで通
常コバルトクロミウム＊＊にΔθ５０ｔｌｊ５度以下と
なる−即ち円柱状微結晶のほとんどがそのＣ軸の基ｌｉ
！直方肉方向の傾きが５闇以内に揃っていることになる
・通常ＰＩテ基板もしく−けアルミニウム基板上にスパ
ッタ法で形成したコバルトクロミウム合金薄膜の場合に
にΔθ５０に３度以下になる・しかし通常基数とコバル
ト々ロミウム合金薄膜との中間にパーマロイ薄膜を千成
して記録再生効率を向上させる方式が行かわれている◎
この場合Ｋにパーマロイ薄膜による効果に加わるがコバ
ルトクロミウム合金薄膜のΔ０５０に悪くなり１０度近
くになシ磁気異方性に劣化してしまう□従って現在垂直
製方性磁什記−一として用いられているコバルトクロミ
ウム薄膜の垂直磁気異方性け・良（ない１ま木来の特性
を発揮できない状況となっている。その原因としてパー
マロイ薄膜−Ｓｆ ｃ ｃ構造の結晶構造で基参面に平
行に原子間々隔が２６５０オングストロームの（１１１
）面が現われているのに対し、その上に結晶構造がｈａ
ｐ構造で原子間々１ｌｌＩ％が２．５２オングストロー
ムのコバルトクロミウム展が形成されるために必ずしも
基板に平行でにないパーマロイ薄膜の（１１１）面に従
ってコバルトクロミウム展が形成される為に逆にコバル
トクロミクム薄膜の配向性が乱れてしまう結果となって
いる・
本発明にこれらの欠点を解消しパーマロイｆｉ！膜の上
にも配向性の良好なコバルトクロミウム薄膜を形成し記
録再生効率の良好なる垂直記録媒体を完成したものであ
る・
本発明の目的は配向性だ良く再生出力の大なる垂直記録
媒体を提供することにある・
本発明の他の目的に記叡密度の高い磁気記録媒体を提供
することにある０
本発明の基本にパーマロイ薄膜の下部にコバルト〃ロミ
白ム薄膜をＦｆｆしパーマロイ薄膜の（１１１）配向性
を向上させたものである・即ちＦＥＴもしくにアルミニ
ウム基板に直接形成したコバルトクロミウム膜のΔθ５
０に５度以内に揃一つでいる。従ってその上ＫＹ成され
るバーマロ゛イ薄膜の〔１１１〕配向は非常に良好とな
る。従って最上部にヤ成されるコバルトクロミウム合金
薄−膜の配向性に従来のパーマロイ上のコバルトクロミ
ウム合金薄膜の配向性や基更の上に直接形成されたコバ
ルト々ロミウム合金薄膜の配向性よシも格段に良い配向
性が得られた。The outline is shown in Fig. 2, where a tanzak-shaped permalloy group called the main magnetic pole 5 is formed on the top of the cobalt-chromium alloy recording medium 4, and a coil is wound around a rod-shaped ferrite called the auxiliary magnetic pole 6 on the opposite side. The attached magnetic poles are placed. A magnetic head with this structure performs recording and reproducing on a cobalt chromium alloy NCBTL1 body. The cobalt chromium alloy has a crystal *ib hexagonal close-packed structure, which is sputtered with an argon pressure of α01 degrees. When a thin film is formed by the method, it forms a cylindrical structure standing upright with respect to the base plane, and vertical gas anisotropy occurs.This situation is shown in Figure 3: !
An axially long cylindrical crystal target 7 stands on a base 8. This C-axis is along the perpendicular direction of the base t Now magnetic anisotropy +! The r is high, one bell is easy to play, and the reproduction output is high. This deviation from the vertical direction can be measured by t-t X-ray diffraction, and is called a rocking curve, and the characteristic Δθ50 is called. In other words, the rocking curve as shown in Figure 4 usually shows Δθ50tlj5 for cobalt chromium**. - i.e., most of the cylindrical microcrystals are based on the C axis
! This means that the inclination in the rectangular direction is within 5 degrees. Usually, in the case of a cobalt chromium alloy thin film formed by sputtering on a PI substrate or an aluminum substrate, Δθ50 is 3 degrees or less. However, a method is being used to improve the recording and reproducing efficiency by forming a permalloy thin film between the normal base and the cobalt-talomium alloy thin film.
In this case, K is added to the effect of the permalloy thin film, but the Δ050 of the cobalt chromium alloy thin film deteriorates and the magnetic anisotropy deteriorates to nearly 10 degrees. The perpendicular magnetic anisotropy of the cobalt chromium thin film is not good (which is not good), so it is unable to exhibit its original properties.The reason for this is that the permalloy thin film has a crystal structure of Sfcc structure, which is parallel to the basic plane. The atomic spacing is 2650 angstroms (111
) surface appears, whereas the crystal structure appears above it.
In the p-structure, 1llI% between atoms forms cobalt chromium with a thickness of 2.52 angstroms, so cobalt chromium is formed along the (111) plane of the permalloy thin film, which is not necessarily parallel to the substrate. This results in disordered orientation of the Kumu thin film.The present invention eliminates these drawbacks and provides permalloy fi! A perpendicular recording medium with good recording and reproducing efficiency was completed by forming a cobalt chromium thin film with good orientation on the film.The purpose of the present invention is to create a perpendicular recording medium with good orientation and high reproduction output. Another object of the present invention is to provide a magnetic recording medium with a high recording density.The basics of the present invention are to Fff a cobalt romilium thin film under a permalloy thin film. (111) Improved orientation, i.e. Δθ5 of cobalt chromium film formed directly on FET or aluminum substrate
All are within 5 degrees of 0. Therefore, the [111] orientation of the Vermalloy thin film formed by KY is very good. Therefore, the orientation of the cobalt chromium alloy thin film formed on the top layer is different from the orientation of the cobalt chromium alloy thin film on conventional permalloy or the orientation of the cobalt chromium alloy thin film formed directly on the substrate. A significantly better orientation was also obtained.
第５図に本発明の原理を説ψすゐ。ＰＫ？＋陽極酸ｆビ
したアルミニウム郷の基板９の上にコバルト〃ロミウム
合金薄膜１０が形成され、その上にはパーマロイ薄膜１
１が形成され、更にその上にコバルトクロミウム合金薄
膜１２が形成されている。これらの合金薄膜にスパッタ
１１ング、イオンブレーティング、メッキ等の方法によ
り形成される・本発明のこれらの垂Ｗ研倖紀録媒体への
１叡再生は第２図に示した主磁極、補助磁極を備えた磁
気ヘッドにもちろん通常の１１ングヘツドや薄膜ヘッド
、更に変形ヘッドでも配録再生が可能である・第６図に
リングヘッドと本発明の記録媒体を組合わせた構成を示
寸・１３にフェライトコアーで、１４はコイルである・
第７図に薄膜、ヘッドと本発明の記録媒体を組合わせた
構成を示す０１５にパーマロイ薄膜コアーで１６は薄膜
コイル、１７にスライダーである・第８図はｆ形ヘッド
と本発明の記４に媒体を組合わせた構成を示す図である
。１８にパーマロイ薄膜主磁極である０１９に薄膜コイ
ル、２０けフェライトコアー〃−である〇以下に本発明
の実線−を示す。Figure 5 explains the principle of the present invention. PK? A cobalt-romium alloy thin film 10 is formed on a substrate 9 of aluminum which has been subjected to anodic acid treatment, and a permalloy thin film 1 is formed on it.
1 is formed, and a cobalt chromium alloy thin film 12 is further formed thereon. These alloy thin films are formed by methods such as sputtering, ion blating, plating, etc. ・The reproduction of the present invention into these TEPCO recording media is based on the main magnetic pole and auxiliary magnetic pole shown in Figure 2. Of course, recording and playback can be performed using a magnetic head equipped with a ring head, a normal 11 ring head, a thin film head, and even a modified head. Figure 6 shows a configuration in which a ring head and the recording medium of the present invention are combined. It is a ferrite core, and 14 is a coil.
Figure 7 shows a combination of a thin film, a head, and the recording medium of the present invention. 015 is a permalloy thin film core, 16 is a thin film coil, and 17 is a slider. Figure 8 is an f-type head and a recording medium of the present invention. FIG. 3 is a diagram showing a configuration in which media are combined. 18 is a permalloy thin film main pole, 019 is a thin film coil, and 20 ferrite cores are shown below.The solid line of the present invention is shown below.
実線ｐＨ
陽極酸化したアルミニウム基板を１５０℃に保ち、その
上にＦｆスパッタＩＩングで１８アトミツク囁のクロミ
ウムを含有したコバルトクロミウム合金−膜”５０００
オングストロームを形成し、更にパーマロイ薄膜を５０
００オングストローム、ｉｔに１８アトミツ７）４の々
ロミウムを含有したコバルト々ロミウム合金薄膜を５０
００オングストローム形成した・この構成で最上部のコ
バルトクロミウムのΔθ５０ｔｊ２度であった°。こめ
記録謀体で第８図のＩＩ’形ヘッドによシ配録再生を行
なうと２００ ＫＢＦＩまでの配録再生が可能であった
・再生ａＪ！ｔ’ｆｆ ５０ ＃ Ｖ／ｗ、ｔｕｒｎで
あった。Solid line pH An anodized aluminum substrate is kept at 150°C, and a cobalt chromium alloy film containing 18 atomic chromium is deposited on it by Ff sputtering II.
50 angstroms and then a permalloy thin film of 50 angstroms.
Cobalt-Tarium alloy thin film containing 18 atoms 7) 400 angstroms and 500 angstroms
00 angstroms were formed.In this configuration, the Δθ50tj of the top cobalt chromium was 2°. When recording and playing back with the II' type head shown in Figure 8 using Kome Recording System, it was possible to record and play back up to 200 KBFI.・Playback aJ! t'ff 50 # V/w, turn.
実維例２
Ｐ′ＦＪＴ上に５０℃でＦＩｆＸパフ タＩＩ ７グで
２゜アトミツクチのクロミウムを含有したコバルトクロ
４ウム合金薄’！Ｉｓ ｏ ｏ ｏオングストローム、
パーマロイＨｐｓｏｏａオンゲストｔ”−Ａ、ＩＫ−ｆ
バルトクロミウム合金１１１１１１７０００オングスト
ロ−ムＦｆｆした・この構成で更上部のコバルトクロミ
ウム合金薄膜のΔθｓｏｔ’ｓｓ度であった。第２図に
示したヘッドにより記録再生を行ない２５０ＫＢＦ工の
密度で４０ ｐ’ｉ／ｍ％ｔ ｕ ｒ ｎの出力を得た
。Actual fiber example 2 Cobalt chromium alloy thin containing 2° atoms of chromium in FIFX puffer II 7g at 50℃ on P'FJT! Is o o o angstrom,
Permalloy Hpsooa Onguest t”-A, IK-f
Baltochromium alloy 1111117000 angstroms Fff · In this configuration, the upper cobalt chromium alloy thin film had a Δθ sot'ss degree. Recording and reproduction were performed using the head shown in FIG. 2, and an output of 40 p'i/m% turn was obtained at a density of 250 KBF.
第１図は従来の垂直♂イ？配録媒体を！９印する図であ
る。第２図に主磁極と補助ｓｅを有する磁気ヘッドを説
ｆ１＋る図である・第３図赫コバルトクロミウム合金薄
膜の結晶構造を説−する図である。Figure 1 is the conventional vertical ♂ A? Distribution media! This is a diagram marked with 9 marks. FIG. 2 is a diagram illustrating a magnetic head having a main pole and an auxiliary se. FIG. 3 is a diagram illustrating the crystal structure of a cobalt-chromium alloy thin film.
第４回灯ロッキングカーブを示す図である。第５図に本
発明をｖｌ、明する図である・第６し１、第７図、第８
図ｉｊ木発−磁気記録媒体と各ｅ硬気ヘッドの組合わせ
を１明する図である・
１・・・基板
２・・・パーマロイ膜 −
３・・・コバルトクロミウム合１ｌ１
４・・・１鍮媒体
５・・・主磁極
６・・・補助Ｓ極
７・・・円柱状微結晶
８・・・基板
９・・・基板
１０・・・コバルトクロミウム合金薄膜１１・・・パー
マロイ薄膜
１２・・・コバルトクロミウム合金薄膜１３・・・フェ
ライトコア
１４・・・コイル
１５・・・薄膜コアー
１６・・・薄膜コイル
１７・・・スライダー
１８・・・薄膜主磁極
１９・・−薄膜コイル
２０・・・フェライトスライダー
以上
出願人 株式会社 睡訪精工金
代理人 弁理士 最上 務
寥 １ い
′ｌ！２毘
１３い
￥Ｊ貸出
多νい
ｚｂ いIt is a figure which shows the 4th light rocking curve. Figure 5 is a diagram explaining the present invention, Figure 6, Figure 7, Figure 8.
Figure ij Kihatsu - A diagram illustrating the combination of a magnetic recording medium and each e-hard head. 1...Substrate 2...Permalloy film -3...Cobalt chromium compound 1l1 4...1 Brass medium 5... Main magnetic pole 6... Auxiliary S pole 7... Cylindrical microcrystal 8... Substrate 9... Substrate 10... Cobalt chromium alloy thin film 11... Permalloy thin film 12... - Cobalt chromium alloy thin film 13... Ferrite core 14... Coil 15... Thin film core 16... Thin film coil 17... Slider 18... Thin film main magnetic pole 19... - Thin film coil 20... Ferrite slider and above Applicant Suiwa Seikokin Co., Ltd. Agent Patent attorney Mutsuko Mogami 1 I'l! 2 bibi 13 yen J loan amount νi zb
Claims (1)
媒体において該コバルト々ロミウム薄膜層の下部にパー
マロイ薄膜層及びコノくルトクロミ〜ウム薄膜層を４成
したことを特徴ｔする磁気記録媒体。1. A magnetic recording medium mainly composed of an alloy of cobalt and chromium, characterized in that a permalloy thin film layer and a cobalt chromium thin film layer are formed below the cobalt chromium thin film layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57010361A JPS58128024A (en) | 1982-01-26 | 1982-01-26 | Magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57010361A JPS58128024A (en) | 1982-01-26 | 1982-01-26 | Magnetic recording medium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS58128024A true JPS58128024A (en) | 1983-07-30 |
Family
ID=11748021
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57010361A Pending JPS58128024A (en) | 1982-01-26 | 1982-01-26 | Magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58128024A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60131615A (en) * | 1983-12-19 | 1985-07-13 | Seiko Epson Corp | Laminated soft magnetic film |
-
1982
- 1982-01-26 JP JP57010361A patent/JPS58128024A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60131615A (en) * | 1983-12-19 | 1985-07-13 | Seiko Epson Corp | Laminated soft magnetic film |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2911050B2 (en) | Perpendicular magnetic recording medium and method of manufacturing the same | |
| JPS58141433A (en) | Magnetic recording medium and its production | |
| US8320078B1 (en) | Perpendicular magnetic recording write head with antiparallel-coupled laminated main pole having a tapered trailing edge | |
| JPH0268906A (en) | Highly saturated flux density soft magnetic film and magnetic head | |
| US7150819B2 (en) | Structure and plating method of thin film magnetic head and magnetic storage apparatus | |
| JPS615407A (en) | Magnetic head | |
| US6795272B2 (en) | Thin film magnetic head and magnetic storage apparatus | |
| JP2002183909A5 (en) | ||
| JP2007335788A (en) | Magnetic shield and manufacturing method thereof, and thin-film magnetic head | |
| JPS58128024A (en) | Magnetic recording medium | |
| JPH07105027B2 (en) | Perpendicular magnetic recording medium | |
| JPH0323972B2 (en) | ||
| JPH08241503A (en) | Thin film magnetic head and its production | |
| JPH06105499B2 (en) | Magnetic recording medium | |
| JPS6153769B2 (en) | ||
| US9355656B1 (en) | Dual purpose tape write transducer | |
| JPS58133628A (en) | Magnetic recording medium | |
| US6826013B2 (en) | Thin film magnetic head | |
| JP3045797B2 (en) | Perpendicular magnetic recording media | |
| JPS615421A (en) | Magnetic recording medium | |
| JPS61229209A (en) | Magnetic head | |
| JPH053050B2 (en) | ||
| JPS5987612A (en) | Vertical magnetic recording system | |
| JPS58130439A (en) | Magnetic recording medium | |
| JPS58130437A (en) | Magnetic recording medium |