JPS58127107A - Mirror mounting structure for xy table - Google Patents

Abstract

PURPOSE:To easily and positively permit high accurate setting of parallelism for a table and mirror by a structure wherein support members each having a U- shape in section and comprising opposed pieces capable of being adjusted in their opposed attitude are placed on above the other. CONSTITUTION:A support member 12 having a U-shaped in section and comprising opposed pieces 14, 16 capable of being adjusted in their opposing attitude by a bolt 17, and a similar support member 13 comprising opposed pieces 20, 21 capable of being adjusted in their opposing attitude by bolts 22, 23, provided with a mirror 11 for reflecting a laser beam, etc. and having the direction of opposing attitude different from that of the member 12 by 90 degrees, are arranged on an XY table 10 one above the other. Thus, the parallelism of the mirror 11 in the horizontal plane direction with respect to the table 10 is adjusted by the bolts 17, while the parallelism of the mirror 11 in the vertical plane direction therewith is adjusted by the bolts 22, 23. This three-dimensional adjustment permits to easily and positively achieve parallelism setting of a table and mirror with high accuracy.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an XY table having a laser length measuring device, and more particularly to a mounting structure for a mirror mounted on the XY table for reflecting laser light.

XY tables are used in berent bonders and wire bonders, which are one of the manufacturing devices for conductor devices, as well as visual inspection devices for masks and reticles. A machine is often attached. For example, as shown in FIG. 1, this laser length measuring machine has a mirror 2 (plane mirror) attached to one side of an XY table 1, and the laser beam emitted from a laser oscillator 3 is reflected by this mirror 2. , the position of the table is detected by counting the reflected light.For this reason, the mirror 2 is connected to the XY table 1.
It must be installed parallel to the X direction (or Y direction).

However, in the past, the mirror 2 was
Since it is directly attached to the table 1, it is difficult to obtain parallelism of the side surface of the table by machining, and this makes it difficult to set the parallelism of the mirror with high precision. For this reason, it is necessary to adjust the parallelism of the mirror by adjusting the degree of tightening of the screws, etc., but it is extremely difficult to use mirrors three-dimensionally parallel, and it is difficult to be fully satisfied. There is a problem that accuracy cannot be obtained.

Therefore, an object of the present invention is to provide a support member having a substantially U-shaped cross section and capable of adjusting the facing posture of its opposing pieces by means of a bolt, arranged so as to overlap each other with different posture change directions, and to place a mirror in the forefront thereof. This is an XY table that is fixed and configured so that the posture of the mirror can be adjusted three-dimensionally by adjusting each supporting member, which allows the parallelism of the mirror with respect to the table's movement direction to be achieved with high precision. The mirror mounting structure is for evening prayers.

Hereinafter, the present invention will be explained based on illustrated embodiments.

2 to 4 show one embodiment of the present invention, 10 is an X table, 11 is a mirror to be attached to one side of this X table 10, and this mirror 11 is the X table.
A pair of support members 12 attached to one side of the table 10.
It is attached via 13. the pair of support members 12,
13, the support member 12 directly attached to one side of the X-table 10 has a longitudinal slit 14 formed approximately at the center in its thickness direction from one end to the vicinity of the other end to form a planar shape approximately U. An adjustment bolt 17 is screwed in the thickness direction at one end of each of the inner and outer opposed pieces 15 and 16 formed by the slit 14. The inner facing piece 15 is attached to one side of the X-table 10 with bolts 18, 18, and another support member 13 is fixed to the outer facing piece 16 by, for example, adhesive.

The other support member 13 has a longitudinal slit 19 formed in the center in its thickness direction from one side (upper side) to the other side (lower side) to form a substantially U-shaped elevational shape. Inner and outer opposing pieces 20 and 21 are formed. Then, the inner facing piece 20 is connected to the outer facing piece 1 of the one support member 12.
6, and a mirror 11 is attached to the front surface of the outer facing piece 21 by pasting or the like. In addition, support member 1
There are a pair of adjustment poles (22 and 23) near both ends of 3.
It is threaded in the thickness direction across the outer opposing pieces 20 and 21.

Although each of the support members 12 and 13 is made of a material with a high degree of distribution, it is important that the support members 12 and 13 have some elasticity.

According to the above configuration, the parallelism of the mirror 11 with respect to the X table 10 is determined by the outer facing piece 15 of each of the supporting members 12 and 13 interposed between the X table 10 and the mirror 11.
and 16. It is determined by the parallelism of 20 and 21. Therefore, by tightening and loosening the adjusting bolt 17 screwed into the support member 12, the inner and outer opposing pieces 15 and 16 are moved closer to each other in the thickness direction as shown by the arrow in FIG. 3, with the other end serving as a fulcrum. Or make them leave. As a result, the inner facing piece 1
5 as a reference, that is, the parallelism of the outer facing pieces 16 can be changed in the plane direction of the X table, and at the same time, the parallelism of the mirror 11 in the plane direction can be changed and adjusted. On the other hand, when the adjustment poles (22.23) screwed onto the support member 13 are tightened or loosened, the inner and outer facing pieces 20.21 of the support member 13 are moved 1M++ above them as shown by the arrows in FIG. to approach or separate from each other in the thickness direction. As a result, the inner facing piece 20! The facing attitude of the outer facing piece 210 when used as a reference, that is, the parallelism can be changed in the vertical direction of the iX table, and at the same time, the parallelism of the mirror 11 in the vertical direction can be changed and adjusted. In addition, if the facing posture (dimensions) between the outer facing pieces 20 and 21 of the support member 13 at the V4 straightening bolt 22° and 23 positions are different, the mirror 11 will be twisted, and more complicated parallelism will be achieved. be able to.

Therefore, the parallelism of the mirror 11 with respect to the X-table IO can be adjusted three-dimensionally by simply tightening and loosening the adjusting bolts 17 and 22, 23, making the work extremely simple. .

Here, the same mirror adjustment can be performed even if the superimposition order of the support members 12 and 13 is reversed, the support member 13 is fixed to the X table 10, and the mirror 11 is attached to the support member 12. Can be done.

Further, other means, such as a welded structure, may be used for the attachment structure of each support member 12, 13 to the X table 10 or to each other.

As described above, according to the mirror mounting structure of the present invention, the supporting members each having a substantially U-shaped cross section and whose facing positions can be adjusted by means of bolts are arranged so as to overlap each other with different orientation changing directions. By fixing the mirror to the frontmost surface of the mirror and adjusting the posture of each supporting member, the mirror's posture can be adjusted three-dimensionally, so the parallelism of the mirror to the moving direction of the XY table is extremely high. This has the effect of being able to perform simple work with high precision.

[Brief explanation of the drawing]

FIG. 1 is a plan view of a laser length measuring machine for an XY table, FIG. 2 is a perspective view of a main part of the mirror mounting structure of the present invention, third is a plan view thereof, and FIG. 4 is a front view. 10...X table (XY table), 11...Mirror, 12.13...Support member, 15.16...Opposing piece, 17...Adjustment bolt, 20.21...Opposing piece, 2
2.23...adjustment bolt. Agent Patent Attorney Susuki 1) Rikan・-'1' (7) ・・i・、・1-・ノ5-1-１ １Figure'b \ . \

Claims (1)

[Scope of Claims] 1. An
In the Y table, a pair of support members each having a substantially U-shaped cross section and whose opposing positions can be adjusted using bolt means or the like is interposed between the mirror and the XY table, and each of these support members is A mirror mounting structure for an XY table, characterized in that the opposing postures are stacked so that the directions of change are different from each other. 2. One of the supporting members is configured such that the opposing attitude of the opposing piece can be changed in the planar direction, and the other supporting member is configured so that the opposing attitude of the opposing piece can be changed in the vertical direction. Mirror mounting structure of XY table.