JPS58123558U - Secondary ion mass spectrometer - Google Patents
Secondary ion mass spectrometerInfo
- Publication number
- JPS58123558U JPS58123558U JP1996182U JP1996182U JPS58123558U JP S58123558 U JPS58123558 U JP S58123558U JP 1996182 U JP1996182 U JP 1996182U JP 1996182 U JP1996182 U JP 1996182U JP S58123558 U JPS58123558 U JP S58123558U
- Authority
- JP
- Japan
- Prior art keywords
- mass spectrometer
- ion mass
- secondary ion
- sample holder
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Tubes For Measurement (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案を説明するための正面図、第２図は平面
図、第３図は試料ホルダ部の平面図と正面図である。
−
１・・・ガス導入装置、２・・・−次粒子源、３・・・
試料ホルダ、６・・・物点スリット、７． ８． ９・
・・質量分析計、１０・・・溝、１３・・・グリセロー
ル。FIG. 1 is a front view for explaining the present invention, FIG. 2 is a plan view, and FIG. 3 is a plan view and a front view of the sample holder section.
- 1... gas introduction device, 2... -order particle source, 3...
Sample holder, 6... object point slit, 7. 8. 9・
...Mass spectrometer, 10...Groove, 13...Glycerol.
Claims (1)
次粒子源、分析するための試料とこれを。 保持するための試料ホルダ、スパッタされた二次イオン
を分析するための質量分析計より成る装置において、上
記試料ホルダは質量分析計の物点スリットの長さ方向と
同じ方向に長く、二次イオンの加速方向と反対側に凹の
溝を有する二次イオン質量分析計。[Claims for Utility Model Registration] A gas introduction device, a primary particle source for generating primary particles of the gas, and a sample for analysis. In an apparatus consisting of a sample holder for holding the secondary ions and a mass spectrometer for analyzing the sputtered secondary ions, the sample holder is long in the same direction as the length of the object point slit of the mass spectrometer, and A secondary ion mass spectrometer with a concave groove on the opposite side to the direction of acceleration.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1996182U JPS58123558U (en) | 1982-02-17 | 1982-02-17 | Secondary ion mass spectrometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1996182U JPS58123558U (en) | 1982-02-17 | 1982-02-17 | Secondary ion mass spectrometer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS58123558U true JPS58123558U (en) | 1983-08-23 |
Family
ID=30032149
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1996182U Pending JPS58123558U (en) | 1982-02-17 | 1982-02-17 | Secondary ion mass spectrometer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58123558U (en) |
-
1982
- 1982-02-17 JP JP1996182U patent/JPS58123558U/en active Pending
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