JPS5812267U - 真空蒸着装置における支持体 - Google Patents

真空蒸着装置における支持体

Info

Publication number
JPS5812267U
JPS5812267U JP10343481U JP10343481U JPS5812267U JP S5812267 U JPS5812267 U JP S5812267U JP 10343481 U JP10343481 U JP 10343481U JP 10343481 U JP10343481 U JP 10343481U JP S5812267 U JPS5812267 U JP S5812267U
Authority
JP
Japan
Prior art keywords
support
vacuum evaporation
evaporation equipment
heating element
jacket
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10343481U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6113551Y2 (enrdf_load_stackoverflow
Inventor
宏 永目
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ricoh Co Ltd
Original Assignee
Ricoh Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ricoh Co Ltd filed Critical Ricoh Co Ltd
Priority to JP10343481U priority Critical patent/JPS5812267U/ja
Publication of JPS5812267U publication Critical patent/JPS5812267U/ja
Application granted granted Critical
Publication of JPS6113551Y2 publication Critical patent/JPS6113551Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Photoreceptors In Electrophotography (AREA)
  • Physical Vapour Deposition (AREA)
JP10343481U 1981-07-14 1981-07-14 真空蒸着装置における支持体 Granted JPS5812267U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10343481U JPS5812267U (ja) 1981-07-14 1981-07-14 真空蒸着装置における支持体

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10343481U JPS5812267U (ja) 1981-07-14 1981-07-14 真空蒸着装置における支持体

Publications (2)

Publication Number Publication Date
JPS5812267U true JPS5812267U (ja) 1983-01-26
JPS6113551Y2 JPS6113551Y2 (enrdf_load_stackoverflow) 1986-04-26

Family

ID=29898044

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10343481U Granted JPS5812267U (ja) 1981-07-14 1981-07-14 真空蒸着装置における支持体

Country Status (1)

Country Link
JP (1) JPS5812267U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6159662U (enrdf_load_stackoverflow) * 1984-09-21 1986-04-22

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1991009148A1 (en) * 1989-12-11 1991-06-27 Hitachi, Ltd. Device for vacuum treatment and device for and method of film formation using said device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6159662U (enrdf_load_stackoverflow) * 1984-09-21 1986-04-22

Also Published As

Publication number Publication date
JPS6113551Y2 (enrdf_load_stackoverflow) 1986-04-26

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