JPS58118415U - Optical path splitting member - Google Patents

Optical path splitting member

Info

Publication number
JPS58118415U
JPS58118415U JP1433382U JP1433382U JPS58118415U JP S58118415 U JPS58118415 U JP S58118415U JP 1433382 U JP1433382 U JP 1433382U JP 1433382 U JP1433382 U JP 1433382U JP S58118415 U JPS58118415 U JP S58118415U
Authority
JP
Japan
Prior art keywords
incident
optical path
luminous flux
reflection surface
semi
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1433382U
Other languages
Japanese (ja)
Inventor
望 北岸
進 松村
Original Assignee
キヤノン株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by キヤノン株式会社 filed Critical キヤノン株式会社
Priority to JP1433382U priority Critical patent/JPS58118415U/en
Publication of JPS58118415U publication Critical patent/JPS58118415U/en
Pending legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第・・1図、第7図は合焦検出光学系の原理的説明図、
第2菌、第3図は従来の光路分割部材の構成図、第4図
は受光素子に分割光が斜めに入射した場合の説明図、第
5図、第6図、第8図は本考案に係る光路分割部材の実
施例の構成図、第9図はカメラ内に実装する場合の光路
分割部材と受光素子との構成図である。  。 符号2. 3. 4. 31は受光素子、9はセンサ基
板、20は光路分割部材、21は入射面、22゜24.
32は半透過性の反射面、23は全反射面、25.26
.27は光学的部材、28.28’は射出面である。 第3図       − @511    、シ、 第4図 / 一1′、第6図
Figures 1 and 7 are principle explanatory diagrams of the focus detection optical system,
Fig. 3 is a configuration diagram of a conventional optical path splitting member, Fig. 4 is an explanatory diagram when divided light is incident obliquely on a light receiving element, and Figs. 5, 6, and 8 are a diagram of the present invention. FIG. 9 is a configuration diagram of an optical path dividing member and a light receiving element when mounted in a camera. . Code 2. 3. 4. 31 is a light receiving element, 9 is a sensor substrate, 20 is an optical path splitting member, 21 is an incident surface, 22°24.
32 is a semi-transparent reflective surface, 23 is a total reflective surface, 25.26
.. 27 is an optical member, and 28.28' is an exit surface. Figure 3 - @511, Figure 4/11', Figure 6

Claims (1)

【実用新案登録請求の範囲】 1 光束を3つ以上に分割す仝光路分割部材に於いて、
入射光束及び分割された射出光束をそれぞれ入射面及び
射出面に対してほぼ垂直に入射及び射出させると共に、
入射光束に対し傾斜して置かれた全反射面と該全反射面
に平行に置か、 れた半透過性反射面とを有し、該半透
過性反射面は各受光素子への入射光量が略等しくなるよ
−うに反射の回数が増すに従って透過率を大きくするこ
とを特徴とする光路分割部材。 2 光束をn分割(n≧3)する場合に於いて、入射側
から数えて第1番目の受光素子へ入射する光束を通過さ
せる前記半透過性反射面の部分の透過率を、 1/ (n−(i−t) ) とした実用新案登録請求の範囲第1項詰載の光路付割部
材。
[Claims for Utility Model Registration] 1. In an optical path dividing member that divides a luminous flux into three or more parts,
The incident luminous flux and the divided output luminous flux are made to enter and exit approximately perpendicularly to the incident surface and the exit surface, respectively, and
It has a total reflection surface placed at an angle with respect to the incident light flux, and a semi-transparent reflection surface placed parallel to the total reflection surface, and the semi-transmission reflection surface adjusts the amount of light incident on each light receiving element. An optical path splitting member characterized in that the transmittance increases as the number of reflections increases so that the transmittance becomes substantially equal. 2. When dividing the luminous flux into n parts (n≧3), the transmittance of the portion of the semi-transparent reflective surface that passes the luminous flux incident on the first light receiving element counting from the incident side is 1/ ( A split member with an optical path according to claim 1 of the utility model registration claim.
JP1433382U 1982-02-04 1982-02-04 Optical path splitting member Pending JPS58118415U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1433382U JPS58118415U (en) 1982-02-04 1982-02-04 Optical path splitting member

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1433382U JPS58118415U (en) 1982-02-04 1982-02-04 Optical path splitting member

Publications (1)

Publication Number Publication Date
JPS58118415U true JPS58118415U (en) 1983-08-12

Family

ID=30026803

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1433382U Pending JPS58118415U (en) 1982-02-04 1982-02-04 Optical path splitting member

Country Status (1)

Country Link
JP (1) JPS58118415U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01266506A (en) * 1988-04-18 1989-10-24 Think Lab Kk Light beam splitting method and light beam splitting and modulating method
JP2009016850A (en) * 2004-02-18 2009-01-22 Asml Netherlands Bv Lithographic apparatus and device manufacturing method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01266506A (en) * 1988-04-18 1989-10-24 Think Lab Kk Light beam splitting method and light beam splitting and modulating method
JP2009016850A (en) * 2004-02-18 2009-01-22 Asml Netherlands Bv Lithographic apparatus and device manufacturing method

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