JPS58117695A - プラズマ装置 - Google Patents

プラズマ装置

Info

Publication number
JPS58117695A
JPS58117695A JP57000100A JP10082A JPS58117695A JP S58117695 A JPS58117695 A JP S58117695A JP 57000100 A JP57000100 A JP 57000100A JP 10082 A JP10082 A JP 10082A JP S58117695 A JPS58117695 A JP S58117695A
Authority
JP
Japan
Prior art keywords
plasma
anode
electrostatic
plug
potential
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57000100A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0526320B2 (enExample
Inventor
影山　賀都鴻
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP57000100A priority Critical patent/JPS58117695A/ja
Publication of JPS58117695A publication Critical patent/JPS58117695A/ja
Publication of JPH0526320B2 publication Critical patent/JPH0526320B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Plasma Technology (AREA)
JP57000100A 1982-01-05 1982-01-05 プラズマ装置 Granted JPS58117695A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57000100A JPS58117695A (ja) 1982-01-05 1982-01-05 プラズマ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57000100A JPS58117695A (ja) 1982-01-05 1982-01-05 プラズマ装置

Publications (2)

Publication Number Publication Date
JPS58117695A true JPS58117695A (ja) 1983-07-13
JPH0526320B2 JPH0526320B2 (enExample) 1993-04-15

Family

ID=11464675

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57000100A Granted JPS58117695A (ja) 1982-01-05 1982-01-05 プラズマ装置

Country Status (1)

Country Link
JP (1) JPS58117695A (enExample)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56134454A (en) * 1980-03-26 1981-10-21 Toshiba Corp Ion-producing system

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56134454A (en) * 1980-03-26 1981-10-21 Toshiba Corp Ion-producing system

Also Published As

Publication number Publication date
JPH0526320B2 (enExample) 1993-04-15

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