JPS58117501A - Plane microlens - Google Patents

Abstract

PURPOSE:To shorten the diffusion treating time of metallic ions by diffusing metallic ions in a glass substrate of optically uniform quality which has micropores and forming a plane microlens having a refractive index distribution. CONSTITUTION:On a surface of the microporous glass substrate 5 of optically uniform quality formed by solgale method, an anticorrosive metallic mask 6 having small holes 7 as diffusion windows is formed by vapor deposition, sputtering, etc., to obtain a blank substrate. The anticorrosive metallic mask material is selected on the basis of the kind of metallic ions to be diffused from the small holes 7 and treatment temperature depending upon its salt and substrate glass composition, but Ti and Ta should be relatively superior. Said blank substrate is placed in a heat-resistant container 8 containing salt 9 as a metallic ion source, thereby diffusing metallic ions. The metallic ions to be diffused are Tl<+>, Cs<+>, Pb<++>, etc.

Description

DETAILED DESCRIPTION OF THE INVENTION In this invention, a mask suitable for the flat glass is used to partially diffuse the gold ion + rs into a flat plate microlens with a refractive index distribution type. Engineering 9,@
This article relates to a novel half-plate microlens with a refractive table distribution type, in which the diffusion processing time τ of 4 ions has a relatively short axis of t%.

Recently, microlenses have been attracting attention as lenses for fruit light and directing, and glass rond-shaped microlenses are commercially available. On the flat plate of JIkIal! ! The Rondo-shaped microlens, which can be made into 9 arrays with multiple microlenses attached at once, is being used in a variety of fields for the first time! ? For example, put PP0 (plain paper copying machine) in one of the tens. In PPO, a lens system is required to transfer the image, and conventionally a normal lens was used. So, I created an array by combining several rond-shaped microlenses with short focal lengths.
If used in a lens system, it can be made thinner and more compact. It is also attracting attention as a lens for O laser beam output. However, C
For example, the Rondo-shaped microlens requires 6 VCs and 6 tris to form an array. Don't stick around I/'''ff
'L is not the same, but in order to create a structure in which the refractive index decreases gently from the center axis to the outer circumference, T
'iX such as n (thallium) and Os (cesium)
The skin must be heat-treated for a long time so that it can interact with ions such as 7K (potassium). 4.Productivity is not necessarily good because the diffusion processing time is usually 150 to 200 hours. With this gradient index microlens,! The same problem can be solved even if the flat microlenses arranged in 1'I are used for 2 hours.This paper describes the processing time r1 equivalent to the time it takes to fully produce a single lens. In order to use the plate r, it is said that the refractive index distribution type flat microlens, which has been left behind since 1998, is used as a field. In general, in order to form a refractive index distribution by ion agglomeration exchange, the electron polarization is small. Ions (such as K) become valence ions (Tl
, C: etc.) and the bath melting weir through the F interface, the refractive index distribution approximating the square distribution corresponds to the ion concentration distribution in the glass 2115 temporary that occurs at the bottom of the can. That's what happens.

Figure 1 schematically shows the original characteristics of a gradient index lens7.
2. It comes out.

Since light #■ is always bent in the direction of the larger refractive index,
Even when it passes through the glass substrate (2), it bends at the IINIJlliI folding region (2), and focuses at the IIK point (2).

- Maki is diffused into g4 elephants by the following formula, and 1 occurs in the n;b law.

a%t=DΔc+aiv (MCff)-〇, \C
: Particle degree, r: Sword that acts on the grain, μ: Particle movement jl
oMID: diffusion coefficient of (r, llr −1) order 21′
9°.

In terms of diffusion coefficient, in the case of solids and liquids, it is atomic or so &'9!
The process of changing requires activation energy E, and L in the following equation
5 @ person is established.

D = ('4) III X I) (her)! 1
: Particle spacing, τ = Frequency of particle flying.

k: Boltzmann constant.

Published by Dosan, the expansion modulus varies depending on the temperature, and at the same time, the diffusion coefficient changes in proportion to the square of the particle spacing.The present invention is based on the conventional diffusion of metal ions into glass. In order to use microporous glass, the diffusion coefficient was increased several times to nearly an hour, increasing the diffusion coefficient by several times to nearly an hour. As a specific example of the microporous glass substrate described in this paper, the gE and weight r of the microlens with ml folding table distribution type are set to 1-β'・1.
The sword of the genus Alfuxito ■ Water-splitting heron A friend of the so-called sol-gel method is the use of a glass substrate with an optical microporous layer that can withstand the temperature required for the necessary ion diffusion treatment. The following is a sol that uses the hydrolysis of 1 Peng alcohol + 7 alcohol.
Explaining how to prepare a glass base by the gel method.
[0con that requires about 20 tlOC as a raw material
When using silicon alkoxide as a raw material using the sol-gel method, for example, ethyl silicate (Si(OC)
*H@) Mix a) with water and ethyl alcohol, decompose the water into ethyl silicate r〃n, and form a silicate gel with a certain shape.
t) 10 While heating, expel water and alcohol, 8
10. Silica glass with a three-dimensional structure can be obtained.

In this case, the temperature at 'R pigeon 1200℃ and the degree of rotation is 810℃.
4gI depending on the initial 7IO* decomposition conditions at the complete three-dimensional structure of 2 or at an intermediate temperature, respectively! Take a certain structure. One of them is 1152!1 of adsorbed water and gas.
7b9 Microphones with pore diameters ranging from tens of angstroms to hundreds of angstroms due to silica glass are formed at temperatures of 500°C to 700°C.The pore diameter of this microporous is Processing temperature and 'vJJ
Various types of gold
Changing the water-splitting properties of υU can be controlled from a few tens of angstroms to a few six angstroms.

The target glass substrate composition can be almost any gold S oxide, but it is also possible to use overlay silica glass, borosilicate glass, ultra-low chiseling silica tania glass ( 81
0,-'rso,)lit thermal silica-7ru<f-'
) Luconi 7 Cufflinks (S iol 1N20B-
It is especially easy to create a microporous substrate with special characteristics.

Next, the present invention will be specifically explained.

As shown in Figure 21, small holes for diffusion windows are formed on the surface of a glass substrate (2) having optically homogeneous microporous holes prepared by the Solbur method. The corrosion-resistant mask material, which is shown schematically on the raw material substrate prepared, is processed depending on the type of gold ions diffused through the small holes (7), its salt pattern, and the composition of the three-layer glass. It can be selected depending on the temperature, but Ti and Ta are preferable depending on the temperature.

Figure 3 shows the raw material for microlenses prepared in 〆j2 and excluding *XfL, J! The plate was placed in a heat-resistant container (1) and immersed in salt (1), which serves as a source of metal ions to be diffused. Of course, the surrounding area must spread the word! processing temperature environment.

The metal ions that cause the expansion of the ridges include Ti, Os, and Pb, and their sulfate, nitric acid, and hydrochloric acid fillings are effective. Heat treatment for 150 to 200 hours for conventional glass substrates
In contrast to the conventional method, which takes about 1 hour (at a processing temperature of 600° C.), it is possible to obtain the same wide distribution in 20 to 25 hours on average.

What's more, the heat treatment time is extremely shortened.
The corrosion resistance of the mask, which had been an issue in F'14, was resolved with great advantage.

The outline of the present invention has been mainly explained above using a 4-polymer substrate with optically homogeneous microporous using a sol-gel method. It is also possible to introduce microporous gas by controlling it properly and adsorb it inside. >41, as mentioned above, is a microlens that requires an extremely long heat treatment and a long period of dense microlens [by using four microporous plates]. L! 7 Planar microlens raw #L note has dramatically improved iaJ0

[Brief explanation of the drawing]

Figure 1 shows the optical time characteristic of the Heisei microlens according to the present invention. It's evil. Figure 2 is a picture of a man made by Gisaku Kushizaka microlens according to the present invention, and the fifth section is a picture of Masaaki of a plate microlens fitted with a flat plate microlens according to the present invention. 776 1) i, Ii 2 Figure 31'53

Claims (1)

[Claims] tl) Force with scientifically sensitive microporous 2
A flat plate microlens with a metal column ion r magnification sazeno Il refractive index formed on the glass plate. -2) The semi-covered microlens described in item 1 of the scope of Tomo W. C. L9 using a microporous glass plate prepared by a sol-gel method utilizing hydrolysis of metal alkogides.