JPS58116232U - Electrostatic chuck type heating table device - Google Patents
Electrostatic chuck type heating table deviceInfo
- Publication number
- JPS58116232U JPS58116232U JP1367382U JP1367382U JPS58116232U JP S58116232 U JPS58116232 U JP S58116232U JP 1367382 U JP1367382 U JP 1367382U JP 1367382 U JP1367382 U JP 1367382U JP S58116232 U JPS58116232 U JP S58116232U
- Authority
- JP
- Japan
- Prior art keywords
- electrostatic chuck
- type heating
- table device
- heating table
- chuck type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Jigs For Machine Tools (AREA)
- Devices For Use In Laboratory Experiments (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
図は本考案の一実施例として静電チャック式加熱台装置
を示すものであつり、第１図はその全体構成図、第２図
はその静電チャック用電極のパタ 一ンを示す
譚叩図、第３．４図はその静電チャック用電極の変形例
を示すもので、第３図はその形 ・。
状を示す平面図、第４図はその試料台への埋設状−態を
示す説明図である。
１・・・・・・試料台、２・・・・・・固定台、３・・
・・・・試料、４・・・・・・ダミーシリンコン、５．
５’・・・・・・静電チャック用電極、６・・・・＝
・ヒータ、７・・・・・・塩度検出器、８・・・・・・
試料移動機構、９・・・・・・水冷台、１０．１１・・
・・・・給電用接点。The figure shows an electrostatic chuck type heating table device as an embodiment of the present invention. Figure 1 is a diagram of its overall configuration, and Figure 2 is a diagram showing the pattern of the electrode for the electrostatic chuck. Figures 3 and 4 show modified examples of the electrostatic chuck electrode, and Figure 3 shows its shape. FIG. 4 is an explanatory diagram showing the state of being buried in the sample stage. 1...Sample stand, 2...Fixed stand, 3...
...Sample, 4...Dummy silicone, 5.
5'...electrode for electrostatic chuck, 6...=
・Heater, 7... Salinity detector, 8...
Sample moving mechanism, 9...Water cooling stand, 10.11...
...Power supply contact.
Claims (1)
、同試料台に静電チャシフ周電極カセ埋設されるととも
に、上記試料台内における上記静電チャック用電極の埋
設部分よりも深層部にヒータが埋設されたことを特徴と
する、静電チャック式加熱台装置。A sample stand made of an insulating material with relatively good thermal conductivity is provided, and an electrostatic chuck circumferential electrode casing is embedded in the sample stand, and the electrostatic chuck electrode casing is embedded in a deeper part of the sample stand than the part where the electrostatic chuck electrode is buried. An electrostatic chuck type heating table device characterized by having a heater embedded.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1367382U JPS58116232U (en) | 1982-02-03 | 1982-02-03 | Electrostatic chuck type heating table device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1367382U JPS58116232U (en) | 1982-02-03 | 1982-02-03 | Electrostatic chuck type heating table device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS58116232U true JPS58116232U (en) | 1983-08-08 |
Family
ID=30026174
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1367382U Pending JPS58116232U (en) | 1982-02-03 | 1982-02-03 | Electrostatic chuck type heating table device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58116232U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH033250A (en) * | 1989-05-30 | 1991-01-09 | Ulvac Corp | Substrate holder |
| JPH04304941A (en) * | 1991-03-29 | 1992-10-28 | Ngk Insulators Ltd | Manufacture of wafer holder |
-
1982
- 1982-02-03 JP JP1367382U patent/JPS58116232U/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH033250A (en) * | 1989-05-30 | 1991-01-09 | Ulvac Corp | Substrate holder |
| JPH04304941A (en) * | 1991-03-29 | 1992-10-28 | Ngk Insulators Ltd | Manufacture of wafer holder |
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