JPS58113766U - 蒸発源監視機構 - Google Patents

蒸発源監視機構

Info

Publication number
JPS58113766U
JPS58113766U JP743682U JP743682U JPS58113766U JP S58113766 U JPS58113766 U JP S58113766U JP 743682 U JP743682 U JP 743682U JP 743682 U JP743682 U JP 743682U JP S58113766 U JPS58113766 U JP S58113766U
Authority
JP
Japan
Prior art keywords
evaporation source
monitoring mechanism
source monitoring
vacuum chamber
reflective surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP743682U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6129722Y2 (enrdf_load_stackoverflow
Inventor
一雄 中村
信也 宝満
Original Assignee
日電アネルバ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日電アネルバ株式会社 filed Critical 日電アネルバ株式会社
Priority to JP743682U priority Critical patent/JPS58113766U/ja
Publication of JPS58113766U publication Critical patent/JPS58113766U/ja
Application granted granted Critical
Publication of JPS6129722Y2 publication Critical patent/JPS6129722Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP743682U 1982-01-25 1982-01-25 蒸発源監視機構 Granted JPS58113766U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP743682U JPS58113766U (ja) 1982-01-25 1982-01-25 蒸発源監視機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP743682U JPS58113766U (ja) 1982-01-25 1982-01-25 蒸発源監視機構

Publications (2)

Publication Number Publication Date
JPS58113766U true JPS58113766U (ja) 1983-08-03
JPS6129722Y2 JPS6129722Y2 (enrdf_load_stackoverflow) 1986-09-01

Family

ID=30020184

Family Applications (1)

Application Number Title Priority Date Filing Date
JP743682U Granted JPS58113766U (ja) 1982-01-25 1982-01-25 蒸発源監視機構

Country Status (1)

Country Link
JP (1) JPS58113766U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6129722Y2 (enrdf_load_stackoverflow) 1986-09-01

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