JPS58111727A - 光ビ−ムの照射位置検出装置 - Google Patents
光ビ−ムの照射位置検出装置Info
- Publication number
- JPS58111727A JPS58111727A JP21576981A JP21576981A JPS58111727A JP S58111727 A JPS58111727 A JP S58111727A JP 21576981 A JP21576981 A JP 21576981A JP 21576981 A JP21576981 A JP 21576981A JP S58111727 A JPS58111727 A JP S58111727A
- Authority
- JP
- Japan
- Prior art keywords
- light beam
- irradiating position
- detected
- frequency
- piezoelectric vibrator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000001678 irradiating effect Effects 0.000 title abstract description 6
- 230000000694 effects Effects 0.000 claims abstract description 7
- 239000000463 material Substances 0.000 claims description 2
- 241000270666 Testudines Species 0.000 claims 1
- 230000003247 decreasing effect Effects 0.000 abstract 1
- 239000010409 thin film Substances 0.000 description 8
- 238000001514 detection method Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 239000003990 capacitor Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 1
- 241000282693 Cercopithecidae Species 0.000 description 1
- 241000257465 Echinoidea Species 0.000 description 1
- 229910000673 Indium arsenide Inorganic materials 0.000 description 1
- 238000009412 basement excavation Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 210000000744 eyelid Anatomy 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000003760 hair shine Effects 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- RPQDHPTXJYYUPQ-UHFFFAOYSA-N indium arsenide Chemical compound [In]#[As] RPQDHPTXJYYUPQ-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 235000012054 meals Nutrition 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S3/00—Direction-finders for determining the direction from which infrasonic, sonic, ultrasonic, or electromagnetic waves, or particle emission, not having a directional significance, are being received
- G01S3/78—Direction-finders for determining the direction from which infrasonic, sonic, ultrasonic, or electromagnetic waves, or particle emission, not having a directional significance, are being received using electromagnetic waves other than radio waves
- G01S3/782—Systems for determining direction or deviation from predetermined direction
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21576981A JPS58111727A (ja) | 1981-12-24 | 1981-12-24 | 光ビ−ムの照射位置検出装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21576981A JPS58111727A (ja) | 1981-12-24 | 1981-12-24 | 光ビ−ムの照射位置検出装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58111727A true JPS58111727A (ja) | 1983-07-02 |
| JPS622245B2 JPS622245B2 (enrdf_load_stackoverflow) | 1987-01-19 |
Family
ID=16677915
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21576981A Granted JPS58111727A (ja) | 1981-12-24 | 1981-12-24 | 光ビ−ムの照射位置検出装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58111727A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3803355A1 (de) * | 1988-02-05 | 1989-08-17 | Leybold Ag | Teilchenquelle fuer eine reaktive ionenstrahlaetz- oder plasmadepositionsanlage |
-
1981
- 1981-12-24 JP JP21576981A patent/JPS58111727A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS622245B2 (enrdf_load_stackoverflow) | 1987-01-19 |
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