JPS58110955U - Charged particle beam detection device - Google Patents

Charged particle beam detection device

Info

Publication number
JPS58110955U
JPS58110955U JP712682U JP712682U JPS58110955U JP S58110955 U JPS58110955 U JP S58110955U JP 712682 U JP712682 U JP 712682U JP 712682 U JP712682 U JP 712682U JP S58110955 U JPS58110955 U JP S58110955U
Authority
JP
Japan
Prior art keywords
particle beam
charged particle
detection device
deflector
signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP712682U
Other languages
Japanese (ja)
Other versions
JPS6314373Y2 (en
Inventor
穴沢　紀道
Original Assignee
日本電子株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電子株式会社 filed Critical 日本電子株式会社
Priority to JP712682U priority Critical patent/JPS58110955U/en
Publication of JPS58110955U publication Critical patent/JPS58110955U/en
Application granted granted Critical
Publication of JPS6314373Y2 publication Critical patent/JPS6314373Y2/ja
Granted legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

１　　　図面は本考案の一実施例を示すブロック線図で
・　　ある。 ）　　　　ｌａ、　　ｌｂ：検出器、２：粒子線、３ａ
、　　３ｂＨ増幅；　器、４：Ａ−Ｄ変換器、５ａ、　
　５ｂ：比較回路、６：基］　　単電源、７ニフリツプ
フロツプ回路、８：偏向電源、１９：偏向器。1. The drawing is a block diagram showing one embodiment of the present invention. ) la, lb: detector, 2: particle beam, 3a
, 3bH amplification; device, 4: A-D converter, 5a,
5b: Comparison circuit, 6: Base] Single power supply, 7 flip-flop circuit, 8: Deflection power supply, 19: Deflector.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 夫々異った感度を有した荷電粒子線検出器を初数個並置
し、いずれかの検出器にのみ荷電粒子線が入射するよう
に該荷電粒子線を偏向するための偏向器を荷電粒子線通
路にそって配置し、前記名検出器の出力信号を基準信号
と比較し、前記出火信号の大きさに対応してパルス信号
を発生する汁較回路を設け、このパルス信号によって前
記偏向器−１の供給信号を切り換えるように偏向電源を
匍御する手段を備えていることを特徴とする荷電粒［子
線検出装置。An initial number of charged particle beam detectors having different sensitivities are arranged side by side, and a deflector is installed to deflect the charged particle beam so that the charged particle beam enters only one of the detectors. A comparison circuit is disposed along the path and compares the output signal of the deflector with a reference signal and generates a pulse signal in response to the magnitude of the fire signal, and the pulse signal causes the deflector to 1. A charged particle [particle beam detection device] comprising means for controlling a deflection power source so as to switch one supply signal.
JP712682U 1982-01-22 1982-01-22 Charged particle beam detection device Granted JPS58110955U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP712682U JPS58110955U (en) 1982-01-22 1982-01-22 Charged particle beam detection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP712682U JPS58110955U (en) 1982-01-22 1982-01-22 Charged particle beam detection device

Publications (2)

Publication Number Publication Date
JPS58110955U true JPS58110955U (en) 1983-07-28
JPS6314373Y2 JPS6314373Y2 (en) 1988-04-22

Family

ID=30019890

Family Applications (1)

Application Number Title Priority Date Filing Date
JP712682U Granted JPS58110955U (en) 1982-01-22 1982-01-22 Charged particle beam detection device

Country Status (1)

Country Link
JP (1) JPS58110955U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01196580A (en) * 1987-12-11 1989-08-08 Hewlett Packard Co <Hp> Power sensor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01196580A (en) * 1987-12-11 1989-08-08 Hewlett Packard Co <Hp> Power sensor

Also Published As

Publication number Publication date
JPS6314373Y2 (en) 1988-04-22

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