JPS58106945U - 潤滑性被膜付基板収納治具 - Google Patents

潤滑性被膜付基板収納治具

Info

Publication number
JPS58106945U
JPS58106945U JP486082U JP486082U JPS58106945U JP S58106945 U JPS58106945 U JP S58106945U JP 486082 U JP486082 U JP 486082U JP 486082 U JP486082 U JP 486082U JP S58106945 U JPS58106945 U JP S58106945U
Authority
JP
Japan
Prior art keywords
substrate storage
storage jig
lubricant coating
conducted
jig
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP486082U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6233322Y2 (enrdf_load_stackoverflow
Inventor
鵜飼　勝三
Original Assignee
日電アネルバ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日電アネルバ株式会社 filed Critical 日電アネルバ株式会社
Priority to JP486082U priority Critical patent/JPS58106945U/ja
Publication of JPS58106945U publication Critical patent/JPS58106945U/ja
Application granted granted Critical
Publication of JPS6233322Y2 publication Critical patent/JPS6233322Y2/ja
Granted legal-status Critical Current

Links

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  • Packaging For Recording Disks (AREA)
  • Packaging Frangible Articles (AREA)
JP486082U 1982-01-18 1982-01-18 潤滑性被膜付基板収納治具 Granted JPS58106945U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP486082U JPS58106945U (ja) 1982-01-18 1982-01-18 潤滑性被膜付基板収納治具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP486082U JPS58106945U (ja) 1982-01-18 1982-01-18 潤滑性被膜付基板収納治具

Publications (2)

Publication Number Publication Date
JPS58106945U true JPS58106945U (ja) 1983-07-21
JPS6233322Y2 JPS6233322Y2 (enrdf_load_stackoverflow) 1987-08-26

Family

ID=30017686

Family Applications (1)

Application Number Title Priority Date Filing Date
JP486082U Granted JPS58106945U (ja) 1982-01-18 1982-01-18 潤滑性被膜付基板収納治具

Country Status (1)

Country Link
JP (1) JPS58106945U (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50148075A (enrdf_load_stackoverflow) * 1974-05-20 1975-11-27
JPS55143765A (en) * 1979-04-26 1980-11-10 Mitsubishi Electric Corp Ion injection device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50148075A (enrdf_load_stackoverflow) * 1974-05-20 1975-11-27
JPS55143765A (en) * 1979-04-26 1980-11-10 Mitsubishi Electric Corp Ion injection device

Also Published As

Publication number Publication date
JPS6233322Y2 (enrdf_load_stackoverflow) 1987-08-26

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