JPS58105208A - Lighting device of microscope - Google Patents

Abstract

PURPOSE:To switch the lighting at a high speed, by arranging a reflector of each lighting device on an optical axis between an objective lens and an eyepiece of a microscope, and also providing a shutter. CONSTITUTION:A lighting device for a microscope is provided with light sources 1, 31 condensing lenses 2, 32 and lighting switching shutters 34, 35. Also, a bright view lighting reflector 6 and a dark view lighting reflector 5 are arranged in series between an eyepiece 12 and an objective lens 9. In case of bright view lighting, light which has passed through the condensing lens 2 and the shutter 34 from the light source 1 is reflected by a semipermeable mirror 6, passes through the center hole part of the reflector 5, and reaches a sample surface 10 through the objective lens 9. In case of dark view lighting, light from the light source 31 becomes like a ring through the condensing lens 32, the shutter 35 and a filter 3, is reflected by the reflector 5, and reaches a sample surface 11 through the objective lens 9. Switching of both lighting is executed at a high speed through the shutters 34, 35.

Description

DETAILED DESCRIPTION OF THE INVENTION This technical field relates to a device for changing wax in a microscope layer wII device KjP.

Technical Background of VSO Figure 1 An example of replacing the conventional OSP with fI beak and dark field illumination for a grunting mirror. A pigeon house with dark field illumination, the light from the light source (1) is transmitted through the dark field light lens (No.
The @ filter (3) converts the light into dense light.

Thereafter, the nuchal-shaped light is reflected by the dark-field illumination reflector (8) K toward the sample 1j11 angle, and is focused into a conical shape by a prism located outside the objective lens (9), and reaches the sample surface (II). .Next, in the ζOll@- position, the dark IlK′
To switch from night-time illumination to beak-sight illumination, there is a filter for dark-field illumination (3), a reflective bell for night-vision illumination, and a beak-field illumination-reflector (a cellar that confirms the season and supports you). Move the holder (to) to the (two holder (8) position ★),
Clear vision shoe - Tei clearing (6) with light source (1) and condensing lens G1
) was necessary because it was installed on the optical path of the

The light source (1) is reflected by the bright field illumination (6) through the condensing lens (2), passes through the objective lens (9), and is directed onto the sample. - Field illumination is provided.

In addition to the example of the ζO illumination device, there are mirrors equipped with multiple illumination devices, but most of them have a light source for each illumination device.

In this case, lighting switching is required for each light source.
Equipped with a self-propelled noodle machine and applying pattern recognition, etc., the number of high-quality self-noodle machines increased as production equipment. Things are becoming more and more complex, and it has become necessary to switch between multiple lights for pattern recognition.

However, in the above-mentioned prior art technology in which the lighting can be changed 9 times, the lighting device shown in the first example does not allow the lighting to be changed by manually moving the light holder (7), which is relatively heavy. rounding, high cut-off) switching is not possible. 9. A microscope that has a light source for each illumination device has 1lIj! due to the blinking of each light source. However, in the case of ζ0, as shown in Hiro No. 2 WJK, it takes time to stabilize the light amount of one light source lamp, which is a drawback for high-speed switching.

OBJECTS OF THE INVENTION Therefore, the present invention provides multiple illumination methods. 1j reconnaissance mirror, especially bright field illumination and dark field illumination, illumination F1
The present invention provides a device that enables high-speed switching of 4.

SUMMARY OF THE INVENTION In a microscope equipped with a plurality of illumination devices, the present invention can be used to switch the illumination without having to move the parts of each illumination device. The illumination is switched by nine shutters arranged and fixed in series between the lens and the light path between the light source and the reflecting mirror of each illumination device.

1ljli Example of the Invention The present invention will be explained using No. 31g1. As shown in Figure 3, in the microscope illumination device of the present invention, the bright field illumination device and the dark field illumination device are respectively a light source (1) and a *υ condensing lens (2).
)), @ and a shutter for switching illumination -9 (to). In addition, the field illumination reflector (6) and dark field illumination reflector (5) are the fixed lens ring and objective lens (9).
and are arranged in series on the OMO optical axis. Note that the shutter (to) and rs have a function of blocking the release of light from the light source (1) and H. For bright field illumination, the light f
The light traveling from (1) passes through the condensing lens (2) and the shutter (to), is reflected by the semi-transparent mirror (6) for bright field illumination, and is reflected by the hollow passage in the center of the reflective mirror (5) for dark field illumination. 9#L
◎On the other hand, in the case of dark field jll bright, the light from the light source C31) passes through the condenser lens (2) and the shutter (to) and reaches the sample surface (1 m) K through the objective lens (9). 1 kl is annularly reflected by the field illumination filter (3) and reflected by the dark field illumination reflector (5) K. The reflected nine-fractured light is condensed into a circular shape by the prism α and is focused on the sample surface (
Reach the shrine at 1υ. In this manner, in the bright field illumination system, the ITV camera 501 detects the object to be inspected using the dark field wA@, and transmits the signal to the microphone four-con beater or the like.

Based on the transmitted good signals, the microcombinator performs pattern recognition. Here, switching between bright field illumination and dark field illumination is performed using shutters (to) and (to). In other words, bright-field illumination light II (1) and dark-field illumination light source 0) are always turned on, and the turtle is turned on in a corner.
In the case of bright field illumination, the shutter (to) is opened, and the shutter (to) is closed to block light from the light source o1. On the other hand, when performing dark field illumination, the shutter is closed and
All you have to do is release the shutter. So, this bright field illumination shutter and dark field illumination shutter (to)
When used in conjunction with the release/shutdown operations of JIFJA, high-speed switching of JiIFJA is possible, and it is fully compatible with automatic machines that apply recent pattern recognition and the like. In addition, in the present invention, there is no need to move the reflector of each wA@ device,
Since the illumination system inside the microscope is completely fixed and there is no need to touch the microscope body Km joint after adjusting the microscope, there is no risk of shifting the inspection surface of the object being inspected due to departmental duties, and pattern recognition is possible. etc.) will be highly reliable.

4 and 5 show modified examples of the microscope illumination device according to the present invention. In this embodiment, as shown at 411, the 1 illumination light source section (2) is separated from the microscope main body. Each light exit path is connected by a light guide @9°. 9. The illumination light source ll@ is the illumination light source (ILOυ, condensing lens Q), as shown in Figure 5.
and a lighting switching shutter. Jin's illumination switching shutter has the function of releasing or blocking light from the p1M bright light source (ILC (υ)), which is a shield plate driven by a rotary linenoid 6η. By separating from the main body,
Microscope body - Inner light @Kokisha, semi-transparent mirror for bright field illumination (6
), adjustment lens (4), reflector for dark-field illumination (5), filter (3), and adjustment lens, it is possible to reduce wrinkles in the microscope body, and it is especially suitable for X-Y recorders. When installed, it becomes a very suitable round object. 9. By using the light guide (1), the position of the p1 mirror housing and the illumination light source can be freely adjusted. Furthermore, in this embodiment, an ND filter operated by a rotary solenoid is provided in the light source section (branch) of the light source. This makes it possible to easily adjust the amount of light (4) and provide optimal illumination.

Above the effects of the invention, we will explain embodiments and modifications of the present invention, and II. This makes it possible to speed up switching. In addition, by fixing all the illumination devices inside the microscope, there is no risk of accidentally shifting the inspection surface when changing the illumination, making it more reliable. It is also possible to perform switching more frequently than by using a shutter mechanism. Furthermore, as a modification of the present invention, the illumination light source section is separated from the microscope main body, so that the microscope main body can be made into a shed. becomes. At the same time, various functions such as light intensity adjustment can be provided on the illumination light source side, and even more optimal illumination can be performed. Note that the shutter for switching the illumination may have any structure as long as it has the function of releasing or blocking light from the illumination light source.

[Brief explanation of the drawing]

Figure 1 is a conventional example of a Fi microscope illumination device; Figure 2 is a diagram showing the time it takes for the lamp to reach a certain amount of light;
Figure JllK3 is a configuration diagram of a microscope illumination device according to the present invention,
FIG. 4 shows an example of a microscope using the illumination device according to the present invention, and FIG. 5 shows (a) a cross-sectional view of the illumination light source section, and Φ) is a layout diagram of the shutter and ND filter in the illumination light source section. DESCRIPTION OF SYMBOLS 1... Light source lamp for bright field illumination, 2... Condensing lens for bright field illumination, 3... Filter for dark field illumination, 4.
...Dark field Mll bright adjustment lens, 5...Reflector for dark field illumination, 6...Semi-transparent mirror for bright field illumination, 7...Mirror holder, 8...Mirror holder movement position, 9・
... Objective lens, 10... Grism, 11... Sample surface, 12... Close-up lens, 31... Light source 2 lamp for bright field illumination, 32... Condensing lens for dark field illumination, 33・
・・ITV camera, 34・3S・・Shutter, 37
...Light source section for illumination, 40...Microscope main body, 41.4
2... Light guide, 44... Adjustment ring for dark field illumination, (, 5l-ND filter, 52... Shielding plate, s
6.57...Rotary solenoid agent Patent attorney
Noriyuki Chika 01 or 1 person) Tomi Figure 2 Figure A color lights up 16s Raichi-Iji'J63 Figure 164 Figure 5 id+

Claims (2)

[Claims] (1) In a nine-microscope equipped with a plurality of O1Ls, the front ffi is set so that light from the light source is supplied to the microscope sample 11.
Each illumination WA device can be arranged in series on the optical axis between the objective lens of the microscope and the II
The true value of the shutter mechanism is that it emits and cuts light, and we hired Nine Microscopes @Uryo. (2) The microscope body and the Zengji microscope body are separated and are equipped with at least a light source for illumination, a lens system, and a shutter mechanism that has the function of releasing and cutting off light. III
W14 optical placement part, - the microscope main body and the @@ shoes - straw bag equipment O