JPS58101874U - マグネトロン式スパツタ装置 - Google Patents

マグネトロン式スパツタ装置

Info

Publication number
JPS58101874U
JPS58101874U JP19303881U JP19303881U JPS58101874U JP S58101874 U JPS58101874 U JP S58101874U JP 19303881 U JP19303881 U JP 19303881U JP 19303881 U JP19303881 U JP 19303881U JP S58101874 U JPS58101874 U JP S58101874U
Authority
JP
Japan
Prior art keywords
transparent substrate
target
center
magnetron sputtering
sputtering device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19303881U
Other languages
English (en)
Japanese (ja)
Other versions
JPS621230Y2 (enExample
Inventor
有井　勝之
長島　節夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP19303881U priority Critical patent/JPS58101874U/ja
Publication of JPS58101874U publication Critical patent/JPS58101874U/ja
Application granted granted Critical
Publication of JPS621230Y2 publication Critical patent/JPS621230Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Physical Vapour Deposition (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP19303881U 1981-12-28 1981-12-28 マグネトロン式スパツタ装置 Granted JPS58101874U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19303881U JPS58101874U (ja) 1981-12-28 1981-12-28 マグネトロン式スパツタ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19303881U JPS58101874U (ja) 1981-12-28 1981-12-28 マグネトロン式スパツタ装置

Publications (2)

Publication Number Publication Date
JPS58101874U true JPS58101874U (ja) 1983-07-11
JPS621230Y2 JPS621230Y2 (enExample) 1987-01-13

Family

ID=30106412

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19303881U Granted JPS58101874U (ja) 1981-12-28 1981-12-28 マグネトロン式スパツタ装置

Country Status (1)

Country Link
JP (1) JPS58101874U (enExample)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56151364U (enExample) * 1980-04-10 1981-11-13

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56151364U (enExample) * 1980-04-10 1981-11-13

Also Published As

Publication number Publication date
JPS621230Y2 (enExample) 1987-01-13

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