JPS579693B2 - - Google Patents

Info

Publication number
JPS579693B2
JPS579693B2 JP808578A JP808578A JPS579693B2 JP S579693 B2 JPS579693 B2 JP S579693B2 JP 808578 A JP808578 A JP 808578A JP 808578 A JP808578 A JP 808578A JP S579693 B2 JPS579693 B2 JP S579693B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP808578A
Other languages
Japanese (ja)
Other versions
JPS54101675A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP808578A priority Critical patent/JPS54101675A/en
Publication of JPS54101675A publication Critical patent/JPS54101675A/en
Publication of JPS579693B2 publication Critical patent/JPS579693B2/ja
Granted legal-status Critical Current

Links

JP808578A 1978-01-27 1978-01-27 Electron beam optical lens barrel Granted JPS54101675A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP808578A JPS54101675A (en) 1978-01-27 1978-01-27 Electron beam optical lens barrel

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP808578A JPS54101675A (en) 1978-01-27 1978-01-27 Electron beam optical lens barrel

Publications (2)

Publication Number Publication Date
JPS54101675A JPS54101675A (en) 1979-08-10
JPS579693B2 true JPS579693B2 (en) 1982-02-23

Family

ID=11683482

Family Applications (1)

Application Number Title Priority Date Filing Date
JP808578A Granted JPS54101675A (en) 1978-01-27 1978-01-27 Electron beam optical lens barrel

Country Status (1)

Country Link
JP (1) JPS54101675A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52130570A (en) * 1976-04-27 1977-11-01 Jeol Ltd Electron beam exposing device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52130570A (en) * 1976-04-27 1977-11-01 Jeol Ltd Electron beam exposing device

Also Published As

Publication number Publication date
JPS54101675A (en) 1979-08-10

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