JPS57968B2 - - Google Patents

Info

Publication number
JPS57968B2
JPS57968B2 JP4478576A JP4478576A JPS57968B2 JP S57968 B2 JPS57968 B2 JP S57968B2 JP 4478576 A JP4478576 A JP 4478576A JP 4478576 A JP4478576 A JP 4478576A JP S57968 B2 JPS57968 B2 JP S57968B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP4478576A
Other languages
Japanese (ja)
Other versions
JPS52128132A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4478576A priority Critical patent/JPS52128132A/en
Publication of JPS52128132A publication Critical patent/JPS52128132A/en
Publication of JPS57968B2 publication Critical patent/JPS57968B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
JP4478576A 1976-04-20 1976-04-20 Positive type electron beam sensitive composition Granted JPS52128132A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4478576A JPS52128132A (en) 1976-04-20 1976-04-20 Positive type electron beam sensitive composition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4478576A JPS52128132A (en) 1976-04-20 1976-04-20 Positive type electron beam sensitive composition

Publications (2)

Publication Number Publication Date
JPS52128132A JPS52128132A (en) 1977-10-27
JPS57968B2 true JPS57968B2 (en) 1982-01-08

Family

ID=12701052

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4478576A Granted JPS52128132A (en) 1976-04-20 1976-04-20 Positive type electron beam sensitive composition

Country Status (1)

Country Link
JP (1) JPS52128132A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02297883A (en) * 1989-01-26 1990-12-10 Teledyne Inc Printed wiring bdard which improved current control

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5622429A (en) * 1979-08-01 1981-03-03 Agency Of Ind Science & Technol Photosensitive resin composition
JPS5677843A (en) * 1979-11-30 1981-06-26 Fujitsu Ltd Resist pattern forming method
JPS56137347A (en) * 1980-03-29 1981-10-27 Tokyo Ohka Kogyo Co Ltd Photosensitive composition for dry development
JPS5852634A (en) * 1981-09-25 1983-03-28 Tokyo Ohka Kogyo Co Ltd Photosensitive composition
JPS58114033A (en) * 1981-12-28 1983-07-07 Fujitsu Ltd Formation of pattern
JPS6070442A (en) * 1983-09-28 1985-04-22 Fujitsu Ltd Formation of pattern
JPH0499373U (en) * 1991-01-16 1992-08-27

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49103632A (en) * 1972-12-21 1974-10-01 Philips Nv

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49103632A (en) * 1972-12-21 1974-10-01 Philips Nv

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02297883A (en) * 1989-01-26 1990-12-10 Teledyne Inc Printed wiring bdard which improved current control

Also Published As

Publication number Publication date
JPS52128132A (en) 1977-10-27

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