JPS5795604U - - Google Patents
Info
- Publication number
- JPS5795604U JPS5795604U JP17233280U JP17233280U JPS5795604U JP S5795604 U JPS5795604 U JP S5795604U JP 17233280 U JP17233280 U JP 17233280U JP 17233280 U JP17233280 U JP 17233280U JP S5795604 U JPS5795604 U JP S5795604U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Control Of Fluid Pressure (AREA)
- Drying Of Solid Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17233280U JPS5795604U (ja) | 1980-12-01 | 1980-12-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17233280U JPS5795604U (ja) | 1980-12-01 | 1980-12-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5795604U true JPS5795604U (ja) | 1982-06-12 |
Family
ID=29530645
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17233280U Pending JPS5795604U (ja) | 1980-12-01 | 1980-12-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5795604U (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2019163913A (ja) * | 2018-03-20 | 2019-09-26 | 株式会社Ｓｃｒｅｅｎホールディングス | 減圧乾燥装置、基板処理装置および減圧乾燥方法 |
-
1980
- 1980-12-01 JP JP17233280U patent/JPS5795604U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2019163913A (ja) * | 2018-03-20 | 2019-09-26 | 株式会社Ｓｃｒｅｅｎホールディングス | 減圧乾燥装置、基板処理装置および減圧乾燥方法 |