JPS579287Y2 - - Google Patents

Info

Publication number
JPS579287Y2
JPS579287Y2 JP11568979U JP11568979U JPS579287Y2 JP S579287 Y2 JPS579287 Y2 JP S579287Y2 JP 11568979 U JP11568979 U JP 11568979U JP 11568979 U JP11568979 U JP 11568979U JP S579287 Y2 JPS579287 Y2 JP S579287Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP11568979U
Other languages
Japanese (ja)
Other versions
JPS5633210U (cg-RX-API-DMAC10.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11568979U priority Critical patent/JPS579287Y2/ja
Publication of JPS5633210U publication Critical patent/JPS5633210U/ja
Application granted granted Critical
Publication of JPS579287Y2 publication Critical patent/JPS579287Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Framework For Endless Conveyors (AREA)
JP11568979U 1979-08-24 1979-08-24 Expired JPS579287Y2 (cg-RX-API-DMAC10.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11568979U JPS579287Y2 (cg-RX-API-DMAC10.html) 1979-08-24 1979-08-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11568979U JPS579287Y2 (cg-RX-API-DMAC10.html) 1979-08-24 1979-08-24

Publications (2)

Publication Number Publication Date
JPS5633210U JPS5633210U (cg-RX-API-DMAC10.html) 1981-04-01
JPS579287Y2 true JPS579287Y2 (cg-RX-API-DMAC10.html) 1982-02-23

Family

ID=29347922

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11568979U Expired JPS579287Y2 (cg-RX-API-DMAC10.html) 1979-08-24 1979-08-24

Country Status (1)

Country Link
JP (1) JPS579287Y2 (cg-RX-API-DMAC10.html)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6211846Y2 (cg-RX-API-DMAC10.html) * 1981-05-28 1987-03-23
JPS61207143U (cg-RX-API-DMAC10.html) * 1985-06-18 1986-12-27
JPS6212509A (ja) * 1985-07-02 1987-01-21 Hitachi Electronics Eng Co Ltd ウェハ搬送装置
JPS62186640U (cg-RX-API-DMAC10.html) * 1986-05-16 1987-11-27

Also Published As

Publication number Publication date
JPS5633210U (cg-RX-API-DMAC10.html) 1981-04-01

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