JPS5790440U - - Google Patents

Info

Publication number
JPS5790440U
JPS5790440U JP1980168972U JP16897280U JPS5790440U JP S5790440 U JPS5790440 U JP S5790440U JP 1980168972 U JP1980168972 U JP 1980168972U JP 16897280 U JP16897280 U JP 16897280U JP S5790440 U JPS5790440 U JP S5790440U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1980168972U
Other languages
Japanese (ja)
Other versions
JPS6141091Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1980168972U priority Critical patent/JPS6141091Y2/ja
Publication of JPS5790440U publication Critical patent/JPS5790440U/ja
Application granted granted Critical
Publication of JPS6141091Y2 publication Critical patent/JPS6141091Y2/ja
Expired legal-status Critical Current

Links

JP1980168972U 1980-11-25 1980-11-25 Expired JPS6141091Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1980168972U JPS6141091Y2 (enExample) 1980-11-25 1980-11-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1980168972U JPS6141091Y2 (enExample) 1980-11-25 1980-11-25

Publications (2)

Publication Number Publication Date
JPS5790440U true JPS5790440U (enExample) 1982-06-03
JPS6141091Y2 JPS6141091Y2 (enExample) 1986-11-22

Family

ID=29527510

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1980168972U Expired JPS6141091Y2 (enExample) 1980-11-25 1980-11-25

Country Status (1)

Country Link
JP (1) JPS6141091Y2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010164675A (ja) * 2009-01-14 2010-07-29 Dainippon Printing Co Ltd フォトマスクブランクス、フォトマスクの位置合わせ方法、両面フォトマスクの製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010164675A (ja) * 2009-01-14 2010-07-29 Dainippon Printing Co Ltd フォトマスクブランクス、フォトマスクの位置合わせ方法、両面フォトマスクの製造方法

Also Published As

Publication number Publication date
JPS6141091Y2 (enExample) 1986-11-22

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