JPS5787530U - - Google Patents
Info
- Publication number
- JPS5787530U JPS5787530U JP16453480U JP16453480U JPS5787530U JP S5787530 U JPS5787530 U JP S5787530U JP 16453480 U JP16453480 U JP 16453480U JP 16453480 U JP16453480 U JP 16453480U JP S5787530 U JPS5787530 U JP S5787530U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16453480U JPS5787530U (es) | 1980-11-17 | 1980-11-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16453480U JPS5787530U (es) | 1980-11-17 | 1980-11-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5787530U true JPS5787530U (es) | 1982-05-29 |
Family
ID=29523255
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16453480U Pending JPS5787530U (es) | 1980-11-17 | 1980-11-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5787530U (es) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07273077A (ja) * | 1994-03-28 | 1995-10-20 | Shin Etsu Handotai Co Ltd | ウエーハのリンス方法及びリンス装置 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5338769A (en) * | 1976-09-15 | 1978-04-10 | Phillips Petroleum Co | Method and apparatus for manufacturing uniform thickness of unwoven fabric |
| JPS544245A (en) * | 1977-06-13 | 1979-01-12 | Nec Corp | Washing equipment |
-
1980
- 1980-11-17 JP JP16453480U patent/JPS5787530U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5338769A (en) * | 1976-09-15 | 1978-04-10 | Phillips Petroleum Co | Method and apparatus for manufacturing uniform thickness of unwoven fabric |
| JPS544245A (en) * | 1977-06-13 | 1979-01-12 | Nec Corp | Washing equipment |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07273077A (ja) * | 1994-03-28 | 1995-10-20 | Shin Etsu Handotai Co Ltd | ウエーハのリンス方法及びリンス装置 |