JPS5785666A - Method and apparatus for manufacturing silicon ingot - Google Patents

Method and apparatus for manufacturing silicon ingot

Info

Publication number
JPS5785666A
JPS5785666A JP56151339A JP15133981A JPS5785666A JP S5785666 A JPS5785666 A JP S5785666A JP 56151339 A JP56151339 A JP 56151339A JP 15133981 A JP15133981 A JP 15133981A JP S5785666 A JPS5785666 A JP S5785666A
Authority
JP
Japan
Prior art keywords
silicon ingot
manufacturing silicon
manufacturing
ingot
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP56151339A
Other languages
Japanese (ja)
Inventor
Roishieru Konraato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens Schuckertwerke AG
Siemens Corp
Original Assignee
Siemens Schuckertwerke AG
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Schuckertwerke AG, Siemens Corp filed Critical Siemens Schuckertwerke AG
Publication of JPS5785666A publication Critical patent/JPS5785666A/en
Pending legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/02Single-crystal growth by pulling from a melt, e.g. Czochralski method adding crystallising materials or reactants forming it in situ to the melt
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/002Continuous growth
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/08Downward pulling

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Silicon Compounds (AREA)
  • Silicon Polymers (AREA)
  • Biological Depolymerization Polymers (AREA)
  • Formation And Processing Of Food Products (AREA)
JP56151339A 1980-09-26 1981-09-24 Method and apparatus for manufacturing silicon ingot Pending JPS5785666A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19803036372 DE3036372A1 (en) 1980-09-26 1980-09-26 Silicon ingot, esp. rod prodn. - by casting melt at rate matching crystallisation rate to save material and operating time (NO 19.4.82)

Publications (1)

Publication Number Publication Date
JPS5785666A true JPS5785666A (en) 1982-05-28

Family

ID=6112941

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56151339A Pending JPS5785666A (en) 1980-09-26 1981-09-24 Method and apparatus for manufacturing silicon ingot

Country Status (8)

Country Link
JP (1) JPS5785666A (en)
AU (1) AU7567081A (en)
BR (1) BR8106150A (en)
CA (1) CA1194384A (en)
DE (1) DE3036372A1 (en)
IT (1) IT1138624B (en)
NO (1) NO813244L (en)
ZA (1) ZA816673B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60124452A (en) * 1983-12-07 1985-07-03 Hitachi Ltd Production of metallic sleeve having high purity
JPS62107855A (en) * 1985-11-07 1987-05-19 Mitsubishi Metal Corp Method for producing materials for vapor deposition or sputtering targets

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60124452A (en) * 1983-12-07 1985-07-03 Hitachi Ltd Production of metallic sleeve having high purity
JPS62107855A (en) * 1985-11-07 1987-05-19 Mitsubishi Metal Corp Method for producing materials for vapor deposition or sputtering targets
JPH0262110B2 (en) * 1985-11-07 1990-12-21 Mitsubishi Metal Corp

Also Published As

Publication number Publication date
DE3036372A1 (en) 1982-05-13
ZA816673B (en) 1982-09-29
IT1138624B (en) 1986-09-17
IT8124144A0 (en) 1981-09-25
AU7567081A (en) 1982-04-01
BR8106150A (en) 1982-06-15
CA1194384A (en) 1985-10-01
NO813244L (en) 1982-03-29

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