JPS5785236A - Carrier device for glass substrate or the like - Google Patents

Carrier device for glass substrate or the like

Info

Publication number
JPS5785236A
JPS5785236A JP55162341A JP16234180A JPS5785236A JP S5785236 A JPS5785236 A JP S5785236A JP 55162341 A JP55162341 A JP 55162341A JP 16234180 A JP16234180 A JP 16234180A JP S5785236 A JPS5785236 A JP S5785236A
Authority
JP
Japan
Prior art keywords
base
slider
moved
protrusions
carrier device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55162341A
Other languages
English (en)
Japanese (ja)
Other versions
JPS623979B2 (enrdf_load_stackoverflow
Inventor
Jiro Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp, Nippon Kogaku KK filed Critical Nikon Corp
Priority to JP55162341A priority Critical patent/JPS5785236A/ja
Publication of JPS5785236A publication Critical patent/JPS5785236A/ja
Publication of JPS623979B2 publication Critical patent/JPS623979B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/66—Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Reciprocating Conveyors (AREA)
JP55162341A 1980-11-18 1980-11-18 Carrier device for glass substrate or the like Granted JPS5785236A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55162341A JPS5785236A (en) 1980-11-18 1980-11-18 Carrier device for glass substrate or the like

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55162341A JPS5785236A (en) 1980-11-18 1980-11-18 Carrier device for glass substrate or the like

Publications (2)

Publication Number Publication Date
JPS5785236A true JPS5785236A (en) 1982-05-27
JPS623979B2 JPS623979B2 (enrdf_load_stackoverflow) 1987-01-28

Family

ID=15752708

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55162341A Granted JPS5785236A (en) 1980-11-18 1980-11-18 Carrier device for glass substrate or the like

Country Status (1)

Country Link
JP (1) JPS5785236A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3713166C2 (de) * 1987-04-17 1994-07-14 Bbs Kraftfahrzeugtechnik KFZ Rad-Sicherungsvorrichtung

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS513743U (enrdf_load_stackoverflow) * 1974-06-25 1976-01-12

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS513743U (enrdf_load_stackoverflow) * 1974-06-25 1976-01-12

Also Published As

Publication number Publication date
JPS623979B2 (enrdf_load_stackoverflow) 1987-01-28

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