JPS5782238A - Large-capacity electron-ray storage medium - Google Patents
Large-capacity electron-ray storage mediumInfo
- Publication number
- JPS5782238A JPS5782238A JP15698980A JP15698980A JPS5782238A JP S5782238 A JPS5782238 A JP S5782238A JP 15698980 A JP15698980 A JP 15698980A JP 15698980 A JP15698980 A JP 15698980A JP S5782238 A JPS5782238 A JP S5782238A
- Authority
- JP
- Japan
- Prior art keywords
- electron
- electron rays
- information
- storage medium
- ray storage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
Abstract
PURPOSE:To make the tracking of information free, by irradiating electron rays on an electron ray resist and reproducing the developed information with electron rays. CONSTITUTION:The information is recorded on electron-ray resist material by irradiating electron rays to and develope it, and this is transfered to a material having higher contrast than that of the resist material to the electron rays and this is reproduced with the electron rays. As a material having higher contrast than that of the resist material, a material which can cause a change such as melting, evaporation, and sublimation due to heat by radiation of the electron rays is used and the information is tracked by causing this change with the electron rays.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15698980A JPS5782238A (en) | 1980-11-10 | 1980-11-10 | Large-capacity electron-ray storage medium |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15698980A JPS5782238A (en) | 1980-11-10 | 1980-11-10 | Large-capacity electron-ray storage medium |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5782238A true JPS5782238A (en) | 1982-05-22 |
Family
ID=15639737
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15698980A Pending JPS5782238A (en) | 1980-11-10 | 1980-11-10 | Large-capacity electron-ray storage medium |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5782238A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2017033943A1 (en) * | 2015-08-24 | 2017-03-02 | 学校法人関西大学 | Lithography material and manufacturing method therefor, lithography composition, pattern forming method, compound, resin, and refining method for compound and resin |
-
1980
- 1980-11-10 JP JP15698980A patent/JPS5782238A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2017033943A1 (en) * | 2015-08-24 | 2017-03-02 | 学校法人関西大学 | Lithography material and manufacturing method therefor, lithography composition, pattern forming method, compound, resin, and refining method for compound and resin |
JPWO2017033943A1 (en) * | 2015-08-24 | 2018-06-07 | 学校法人 関西大学 | Lithographic material and production method thereof, lithographic composition, pattern forming method, compound, resin, and purification method thereof |
US11852970B2 (en) | 2015-08-24 | 2023-12-26 | Mitsubishi Gas Chemical Company, Inc. | Material for lithography, production method therefor, composition for lithography, pattern formation method, compound, resin, and method for purifying the compound or the resin |
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