JPS5780767U - - Google Patents
Info
- Publication number
- JPS5780767U JPS5780767U JP15897080U JP15897080U JPS5780767U JP S5780767 U JPS5780767 U JP S5780767U JP 15897080 U JP15897080 U JP 15897080U JP 15897080 U JP15897080 U JP 15897080U JP S5780767 U JPS5780767 U JP S5780767U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Sliding Valves (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15897080U JPS6040940Y2 (ja) | 1980-11-06 | 1980-11-06 | スル−スバルブ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15897080U JPS6040940Y2 (ja) | 1980-11-06 | 1980-11-06 | スル−スバルブ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5780767U true JPS5780767U (ja) | 1982-05-19 |
| JPS6040940Y2 JPS6040940Y2 (ja) | 1985-12-11 |
Family
ID=29518010
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15897080U Expired JPS6040940Y2 (ja) | 1980-11-06 | 1980-11-06 | スル−スバルブ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6040940Y2 (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009109006A (ja) * | 2007-10-10 | 2009-05-21 | Tokyo Electron Ltd | ゲートバルブ及びそれを用いた基板処理装置 |
-
1980
- 1980-11-06 JP JP15897080U patent/JPS6040940Y2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009109006A (ja) * | 2007-10-10 | 2009-05-21 | Tokyo Electron Ltd | ゲートバルブ及びそれを用いた基板処理装置 |
| JP2014016035A (ja) * | 2007-10-10 | 2014-01-30 | Tokyo Electron Ltd | ゲートバルブ及びそれを用いた基板処理装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6040940Y2 (ja) | 1985-12-11 |