JPS5780732A - Manual probe - Google Patents

Manual probe

Info

Publication number
JPS5780732A
JPS5780732A JP15732880A JP15732880A JPS5780732A JP S5780732 A JPS5780732 A JP S5780732A JP 15732880 A JP15732880 A JP 15732880A JP 15732880 A JP15732880 A JP 15732880A JP S5780732 A JPS5780732 A JP S5780732A
Authority
JP
Japan
Prior art keywords
base
probe
air
durability
improved
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15732880A
Other languages
Japanese (ja)
Other versions
JPS5929147B2 (en
Inventor
Kazumasa Kaneda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NIPPON MAIKURONIKUSU KK
Micronics Japan Co Ltd
Original Assignee
NIPPON MAIKURONIKUSU KK
Micronics Japan Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NIPPON MAIKURONIKUSU KK, Micronics Japan Co Ltd filed Critical NIPPON MAIKURONIKUSU KK
Priority to JP15732880A priority Critical patent/JPS5929147B2/en
Publication of JPS5780732A publication Critical patent/JPS5780732A/en
Publication of JPS5929147B2 publication Critical patent/JPS5929147B2/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)

Abstract

PURPOSE:To increase the durability of a manual probe by providing an air bearing between the bottom surface of a base for mounting a wafer placing stand and the upper surface of the bottom late of a probe, thereby removing mechanism friction. CONSTITUTION:A stand 15 for adsorbing a wafer is mounted on the upper surface of a base 22, and a slide base 13 on the lower surface of a base 22 has a plurality of air diffusing holes on the bottom surface to inject compressed air. Thus, air film is formed between the bottom surface of the base 13 and the upper surface of the bottom plate 1 of a probe body faced with the base 13, the base 22 is floated, and air bearing is formed. In this manner, the base 22 can be moved on the bottom surface 1 of the probe with extremely small manual force, can be readily fixed, the operability can be improved, and the durability can also be improved.
JP15732880A 1980-11-08 1980-11-08 manual prober Expired JPS5929147B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15732880A JPS5929147B2 (en) 1980-11-08 1980-11-08 manual prober

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15732880A JPS5929147B2 (en) 1980-11-08 1980-11-08 manual prober

Publications (2)

Publication Number Publication Date
JPS5780732A true JPS5780732A (en) 1982-05-20
JPS5929147B2 JPS5929147B2 (en) 1984-07-18

Family

ID=15647285

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15732880A Expired JPS5929147B2 (en) 1980-11-08 1980-11-08 manual prober

Country Status (1)

Country Link
JP (1) JPS5929147B2 (en)

Also Published As

Publication number Publication date
JPS5929147B2 (en) 1984-07-18

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