JPS54147847A - Moving mechanism and aligning device provided with said moving mechanism - Google Patents
Moving mechanism and aligning device provided with said moving mechanismInfo
- Publication number
- JPS54147847A JPS54147847A JP5558678A JP5558678A JPS54147847A JP S54147847 A JPS54147847 A JP S54147847A JP 5558678 A JP5558678 A JP 5558678A JP 5558678 A JP5558678 A JP 5558678A JP S54147847 A JPS54147847 A JP S54147847A
- Authority
- JP
- Japan
- Prior art keywords
- slider
- moving mechanism
- horizontal moving
- elevating device
- bearing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Liquid Crystal (AREA)
Abstract
PURPOSE: To divide a horizontal moving device and an elevating device, minaturize the device and make possible highly accurate aligning by mounting a slider to the horizontal moving device and supporting the slider to the elevating device via spherical face.
CONSTITUTION: A horizontal moving device A and an elevating device B are divided and a slider 51 is mounted to the table 105 of said horizontal moving device A movably only in the perpendicular direction without clearance in the horizontal drection by a bearing 102, said slider 51 being suported to the elevating device B via ball 51. The elevating device B consists of a holder 63 holding the ball 61 by a spring 62, a plate 65 supporting the holder 63 by a spring 64 and a bearing 66, a first air bearing 72 fixing the top end of a piston 71 to the plate 65, a second air bearing 69 opposedly installing a piston 67 to said holder 63 and a stopper 60. The pistons 71, 67 of the first, second air bearings 72, 69 are supported by bearings 70, 68 and a shock absorber 73 is provided to the piston 67 of the second air bearing 69:
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5558678A JPS54147847A (en) | 1978-05-12 | 1978-05-12 | Moving mechanism and aligning device provided with said moving mechanism |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5558678A JPS54147847A (en) | 1978-05-12 | 1978-05-12 | Moving mechanism and aligning device provided with said moving mechanism |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS54147847A true JPS54147847A (en) | 1979-11-19 |
JPH0315171B2 JPH0315171B2 (en) | 1991-02-28 |
Family
ID=13002838
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5558678A Granted JPS54147847A (en) | 1978-05-12 | 1978-05-12 | Moving mechanism and aligning device provided with said moving mechanism |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54147847A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60154230A (en) * | 1984-01-24 | 1985-08-13 | Sony Corp | Detector for transparent electrode pattern |
JPS63311227A (en) * | 1987-06-12 | 1988-12-20 | Matsushita Electric Ind Co Ltd | Manufacture of liquid crystal display element |
-
1978
- 1978-05-12 JP JP5558678A patent/JPS54147847A/en active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60154230A (en) * | 1984-01-24 | 1985-08-13 | Sony Corp | Detector for transparent electrode pattern |
JPS63311227A (en) * | 1987-06-12 | 1988-12-20 | Matsushita Electric Ind Co Ltd | Manufacture of liquid crystal display element |
Also Published As
Publication number | Publication date |
---|---|
JPH0315171B2 (en) | 1991-02-28 |
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