JPS54147847A - Moving mechanism and aligning device provided with said moving mechanism - Google Patents

Moving mechanism and aligning device provided with said moving mechanism

Info

Publication number
JPS54147847A
JPS54147847A JP5558678A JP5558678A JPS54147847A JP S54147847 A JPS54147847 A JP S54147847A JP 5558678 A JP5558678 A JP 5558678A JP 5558678 A JP5558678 A JP 5558678A JP S54147847 A JPS54147847 A JP S54147847A
Authority
JP
Japan
Prior art keywords
slider
moving mechanism
horizontal moving
elevating device
bearing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5558678A
Other languages
Japanese (ja)
Other versions
JPH0315171B2 (en
Inventor
Mitsuyoshi Koizumi
Nobuyuki Akiyama
Yoshimasa Oshima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP5558678A priority Critical patent/JPS54147847A/en
Publication of JPS54147847A publication Critical patent/JPS54147847A/en
Publication of JPH0315171B2 publication Critical patent/JPH0315171B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Liquid Crystal (AREA)

Abstract

PURPOSE: To divide a horizontal moving device and an elevating device, minaturize the device and make possible highly accurate aligning by mounting a slider to the horizontal moving device and supporting the slider to the elevating device via spherical face.
CONSTITUTION: A horizontal moving device A and an elevating device B are divided and a slider 51 is mounted to the table 105 of said horizontal moving device A movably only in the perpendicular direction without clearance in the horizontal drection by a bearing 102, said slider 51 being suported to the elevating device B via ball 51. The elevating device B consists of a holder 63 holding the ball 61 by a spring 62, a plate 65 supporting the holder 63 by a spring 64 and a bearing 66, a first air bearing 72 fixing the top end of a piston 71 to the plate 65, a second air bearing 69 opposedly installing a piston 67 to said holder 63 and a stopper 60. The pistons 71, 67 of the first, second air bearings 72, 69 are supported by bearings 70, 68 and a shock absorber 73 is provided to the piston 67 of the second air bearing 69:
COPYRIGHT: (C)1979,JPO&Japio
JP5558678A 1978-05-12 1978-05-12 Moving mechanism and aligning device provided with said moving mechanism Granted JPS54147847A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5558678A JPS54147847A (en) 1978-05-12 1978-05-12 Moving mechanism and aligning device provided with said moving mechanism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5558678A JPS54147847A (en) 1978-05-12 1978-05-12 Moving mechanism and aligning device provided with said moving mechanism

Publications (2)

Publication Number Publication Date
JPS54147847A true JPS54147847A (en) 1979-11-19
JPH0315171B2 JPH0315171B2 (en) 1991-02-28

Family

ID=13002838

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5558678A Granted JPS54147847A (en) 1978-05-12 1978-05-12 Moving mechanism and aligning device provided with said moving mechanism

Country Status (1)

Country Link
JP (1) JPS54147847A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60154230A (en) * 1984-01-24 1985-08-13 Sony Corp Detector for transparent electrode pattern
JPS63311227A (en) * 1987-06-12 1988-12-20 Matsushita Electric Ind Co Ltd Manufacture of liquid crystal display element

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60154230A (en) * 1984-01-24 1985-08-13 Sony Corp Detector for transparent electrode pattern
JPS63311227A (en) * 1987-06-12 1988-12-20 Matsushita Electric Ind Co Ltd Manufacture of liquid crystal display element

Also Published As

Publication number Publication date
JPH0315171B2 (en) 1991-02-28

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