JPS5780571A - Surface potential measuring apparatus - Google Patents

Surface potential measuring apparatus

Info

Publication number
JPS5780571A
JPS5780571A JP55158607A JP15860780A JPS5780571A JP S5780571 A JPS5780571 A JP S5780571A JP 55158607 A JP55158607 A JP 55158607A JP 15860780 A JP15860780 A JP 15860780A JP S5780571 A JPS5780571 A JP S5780571A
Authority
JP
Japan
Prior art keywords
grid
detecting element
measured
voltage
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55158607A
Other languages
Japanese (ja)
Other versions
JPS599864B2 (en
Inventor
Kazumasa Yamamoto
Teruo Kobayashi
Noriaki Hara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP55158607A priority Critical patent/JPS599864B2/en
Publication of JPS5780571A publication Critical patent/JPS5780571A/en
Publication of JPS599864B2 publication Critical patent/JPS599864B2/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R29/00—Arrangements for measuring or indicating electric quantities not covered by groups G01R19/00 - G01R27/00
    • G01R29/24—Arrangements for measuring quantities of charge

Abstract

PURPOSE:To accurately measure the potential at an object to be measured in an electrostatic copying machine or the like in a non-contact manner, by employing a grid cutting off an incident electric flux and an electrode directly connected with an FET. CONSTITUTION:An electrode 17 placed on the stepped portion of an insulator 14 is connected to the gate of an FET16 housed in a tubular cap 11 having an electric flux incident opening 13. A detecting element 21 of such an arrangement is used to measure the potential at an object 18 to be measured to which a voltage is applied from a DC power source 19. In other words, a base 20 equipped with the detecting element 21 is provided with a grid 22 between the object 18 and the detecting element 21, and an FF circuit 23 is connected between the grid 22 and the ground. The grid 22 is periodically grounded by the FF circuit 23. Consequently, the electric line of force generated from the object 18 and reaching the electrode 17 in the detecting element 21 is interrupted by the grid 22, so that a voltage is induced between the drain and the source of the FET16. Measuring the voltage permits the surface potential of the object 18 to be measured in a non-contact manner.
JP55158607A 1980-11-10 1980-11-10 Surface potential measuring device Expired JPS599864B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55158607A JPS599864B2 (en) 1980-11-10 1980-11-10 Surface potential measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55158607A JPS599864B2 (en) 1980-11-10 1980-11-10 Surface potential measuring device

Publications (2)

Publication Number Publication Date
JPS5780571A true JPS5780571A (en) 1982-05-20
JPS599864B2 JPS599864B2 (en) 1984-03-05

Family

ID=15675392

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55158607A Expired JPS599864B2 (en) 1980-11-10 1980-11-10 Surface potential measuring device

Country Status (1)

Country Link
JP (1) JPS599864B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6482541A (en) * 1987-09-25 1989-03-28 Hitachi Ltd Method and device for measuring semiconductor surface

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6482541A (en) * 1987-09-25 1989-03-28 Hitachi Ltd Method and device for measuring semiconductor surface

Also Published As

Publication number Publication date
JPS599864B2 (en) 1984-03-05

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