JPS577931Y2 - - Google Patents

Info

Publication number
JPS577931Y2
JPS577931Y2 JP1977072926U JP7292677U JPS577931Y2 JP S577931 Y2 JPS577931 Y2 JP S577931Y2 JP 1977072926 U JP1977072926 U JP 1977072926U JP 7292677 U JP7292677 U JP 7292677U JP S577931 Y2 JPS577931 Y2 JP S577931Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1977072926U
Other languages
Japanese (ja)
Other versions
JPS53166142U (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1977072926U priority Critical patent/JPS577931Y2/ja
Publication of JPS53166142U publication Critical patent/JPS53166142U/ja
Application granted granted Critical
Publication of JPS577931Y2 publication Critical patent/JPS577931Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Combustion Of Fluid Fuel (AREA)
  • Gas Burners (AREA)
  • Air Supply (AREA)
JP1977072926U 1977-06-03 1977-06-03 Expired JPS577931Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1977072926U JPS577931Y2 (cs) 1977-06-03 1977-06-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1977072926U JPS577931Y2 (cs) 1977-06-03 1977-06-03

Publications (2)

Publication Number Publication Date
JPS53166142U JPS53166142U (cs) 1978-12-26
JPS577931Y2 true JPS577931Y2 (cs) 1982-02-16

Family

ID=28985077

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1977072926U Expired JPS577931Y2 (cs) 1977-06-03 1977-06-03

Country Status (1)

Country Link
JP (1) JPS577931Y2 (cs)

Cited By (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6871558B2 (en) 2002-12-12 2005-03-29 Molecular Imprints, Inc. Method for determining characteristics of substrate employing fluid geometries
US6900881B2 (en) 2002-07-11 2005-05-31 Molecular Imprints, Inc. Step and repeat imprint lithography systems
US6902853B2 (en) 2000-07-16 2005-06-07 Board Of Regents, The University Of Texas System Dual wavelength method of determining a relative position of a substrate and a template
US6908861B2 (en) 2002-07-11 2005-06-21 Molecular Imprints, Inc. Method for imprint lithography using an electric field
US6916584B2 (en) 2002-08-01 2005-07-12 Molecular Imprints, Inc. Alignment methods for imprint lithography
US6926929B2 (en) 2002-07-09 2005-08-09 Molecular Imprints, Inc. System and method for dispensing liquids
US6955868B2 (en) 1999-10-29 2005-10-18 Board Of Regents, The University Of Texas System Method to control the relative position between a body and a surface
US6980282B2 (en) 2002-12-11 2005-12-27 Molecular Imprints, Inc. Method for modulating shapes of substrates
US7019819B2 (en) 2002-11-13 2006-03-28 Molecular Imprints, Inc. Chucking system for modulating shapes of substrates
US7027156B2 (en) 2002-08-01 2006-04-11 Molecular Imprints, Inc. Scatterometry alignment for imprint lithography
US7060324B2 (en) 2000-10-12 2006-06-13 Board Of Regents, The University Of Texas System Method of creating a dispersion of a liquid on a substrate
US7070405B2 (en) 2002-08-01 2006-07-04 Molecular Imprints, Inc. Alignment systems for imprint lithography
US7090716B2 (en) 2003-10-02 2006-08-15 Molecular Imprints, Inc. Single phase fluid imprint lithography method
US7122079B2 (en) 2004-02-27 2006-10-17 Molecular Imprints, Inc. Composition for an etching mask comprising a silicon-containing material
US7136150B2 (en) 2003-09-25 2006-11-14 Molecular Imprints, Inc. Imprint lithography template having opaque alignment marks
US7179396B2 (en) 2003-03-25 2007-02-20 Molecular Imprints, Inc. Positive tone bi-layer imprint lithography method
US7396475B2 (en) 2003-04-25 2008-07-08 Molecular Imprints, Inc. Method of forming stepped structures employing imprint lithography
US7630067B2 (en) 2004-11-30 2009-12-08 Molecular Imprints, Inc. Interferometric analysis method for the manufacture of nano-scale devices
US9223202B2 (en) 2000-07-17 2015-12-29 Board Of Regents, The University Of Texas System Method of automatic fluid dispensing for imprint lithography processes

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS557717Y2 (cs) * 1974-10-02 1980-02-20
JPS51118526U (cs) * 1975-03-22 1976-09-25

Cited By (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7098572B2 (en) 1999-10-29 2006-08-29 Board Of Regents, The University Of Texas System Apparatus to control displacement of a body spaced-apart from a surface
US7060402B2 (en) 1999-10-29 2006-06-13 Board Of Regents, The University Of Texas System Method of orientating a template with respect to a substrate in response to a force exerted on the template
US6955868B2 (en) 1999-10-29 2005-10-18 Board Of Regents, The University Of Texas System Method to control the relative position between a body and a surface
US6986975B2 (en) 2000-07-16 2006-01-17 Board Of Regents, The University Of Texas System Method of aligning a template with a substrate employing moire patterns
US6902853B2 (en) 2000-07-16 2005-06-07 Board Of Regents, The University Of Texas System Dual wavelength method of determining a relative position of a substrate and a template
US7303383B1 (en) 2000-07-16 2007-12-04 Board Of Regents, The University Of Texas System Imprint lithography system to produce light to impinge upon and polymerize a liquid in superimposition with template overlay marks
US6916585B2 (en) 2000-07-16 2005-07-12 Board Of Regents, The University Of Texas Systems Method of varying template dimensions to achieve alignment during imprint lithography
US9223202B2 (en) 2000-07-17 2015-12-29 Board Of Regents, The University Of Texas System Method of automatic fluid dispensing for imprint lithography processes
US7060324B2 (en) 2000-10-12 2006-06-13 Board Of Regents, The University Of Texas System Method of creating a dispersion of a liquid on a substrate
US6926929B2 (en) 2002-07-09 2005-08-09 Molecular Imprints, Inc. System and method for dispensing liquids
US6908861B2 (en) 2002-07-11 2005-06-21 Molecular Imprints, Inc. Method for imprint lithography using an electric field
US6900881B2 (en) 2002-07-11 2005-05-31 Molecular Imprints, Inc. Step and repeat imprint lithography systems
US7027156B2 (en) 2002-08-01 2006-04-11 Molecular Imprints, Inc. Scatterometry alignment for imprint lithography
US7070405B2 (en) 2002-08-01 2006-07-04 Molecular Imprints, Inc. Alignment systems for imprint lithography
US6916584B2 (en) 2002-08-01 2005-07-12 Molecular Imprints, Inc. Alignment methods for imprint lithography
US7019819B2 (en) 2002-11-13 2006-03-28 Molecular Imprints, Inc. Chucking system for modulating shapes of substrates
US6980282B2 (en) 2002-12-11 2005-12-27 Molecular Imprints, Inc. Method for modulating shapes of substrates
US6871558B2 (en) 2002-12-12 2005-03-29 Molecular Imprints, Inc. Method for determining characteristics of substrate employing fluid geometries
US7179396B2 (en) 2003-03-25 2007-02-20 Molecular Imprints, Inc. Positive tone bi-layer imprint lithography method
US7396475B2 (en) 2003-04-25 2008-07-08 Molecular Imprints, Inc. Method of forming stepped structures employing imprint lithography
US7136150B2 (en) 2003-09-25 2006-11-14 Molecular Imprints, Inc. Imprint lithography template having opaque alignment marks
US7090716B2 (en) 2003-10-02 2006-08-15 Molecular Imprints, Inc. Single phase fluid imprint lithography method
US7122079B2 (en) 2004-02-27 2006-10-17 Molecular Imprints, Inc. Composition for an etching mask comprising a silicon-containing material
US7630067B2 (en) 2004-11-30 2009-12-08 Molecular Imprints, Inc. Interferometric analysis method for the manufacture of nano-scale devices

Also Published As

Publication number Publication date
JPS53166142U (cs) 1978-12-26

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