JPS53166142U - - Google Patents

Info

Publication number
JPS53166142U
JPS53166142U JP7292677U JP7292677U JPS53166142U JP S53166142 U JPS53166142 U JP S53166142U JP 7292677 U JP7292677 U JP 7292677U JP 7292677 U JP7292677 U JP 7292677U JP S53166142 U JPS53166142 U JP S53166142U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7292677U
Other languages
Japanese (ja)
Other versions
JPS577931Y2 (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1977072926U priority Critical patent/JPS577931Y2/ja
Publication of JPS53166142U publication Critical patent/JPS53166142U/ja
Application granted granted Critical
Publication of JPS577931Y2 publication Critical patent/JPS577931Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Combustion Of Fluid Fuel (AREA)
  • Gas Burners (AREA)
  • Air Supply (AREA)
JP1977072926U 1977-06-03 1977-06-03 Expired JPS577931Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1977072926U JPS577931Y2 (cs) 1977-06-03 1977-06-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1977072926U JPS577931Y2 (cs) 1977-06-03 1977-06-03

Publications (2)

Publication Number Publication Date
JPS53166142U true JPS53166142U (cs) 1978-12-26
JPS577931Y2 JPS577931Y2 (cs) 1982-02-16

Family

ID=28985077

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1977072926U Expired JPS577931Y2 (cs) 1977-06-03 1977-06-03

Country Status (1)

Country Link
JP (1) JPS577931Y2 (cs)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6873087B1 (en) 1999-10-29 2005-03-29 Board Of Regents, The University Of Texas System High precision orientation alignment and gap control stages for imprint lithography processes
WO2002008835A2 (en) 2000-07-16 2002-01-31 Board Of Regents, The University Of Texas System High-resolution overlay alignment methods and systems for imprint lithography
CN1262883C (zh) 2000-07-17 2006-07-05 得克萨斯州大学系统董事会 影印用于平版印刷工艺中的自动化液体分配的方法和系统
EP2306242A3 (en) 2000-10-12 2011-11-02 Board of Regents, The University of Texas System Method of forming a pattern on a substrate
US6926929B2 (en) 2002-07-09 2005-08-09 Molecular Imprints, Inc. System and method for dispensing liquids
US6900881B2 (en) 2002-07-11 2005-05-31 Molecular Imprints, Inc. Step and repeat imprint lithography systems
US7019819B2 (en) 2002-11-13 2006-03-28 Molecular Imprints, Inc. Chucking system for modulating shapes of substrates
US6908861B2 (en) 2002-07-11 2005-06-21 Molecular Imprints, Inc. Method for imprint lithography using an electric field
US7070405B2 (en) 2002-08-01 2006-07-04 Molecular Imprints, Inc. Alignment systems for imprint lithography
US6916584B2 (en) 2002-08-01 2005-07-12 Molecular Imprints, Inc. Alignment methods for imprint lithography
US7027156B2 (en) 2002-08-01 2006-04-11 Molecular Imprints, Inc. Scatterometry alignment for imprint lithography
US6980282B2 (en) 2002-12-11 2005-12-27 Molecular Imprints, Inc. Method for modulating shapes of substrates
US6871558B2 (en) 2002-12-12 2005-03-29 Molecular Imprints, Inc. Method for determining characteristics of substrate employing fluid geometries
US7179396B2 (en) 2003-03-25 2007-02-20 Molecular Imprints, Inc. Positive tone bi-layer imprint lithography method
US7122079B2 (en) 2004-02-27 2006-10-17 Molecular Imprints, Inc. Composition for an etching mask comprising a silicon-containing material
US7396475B2 (en) 2003-04-25 2008-07-08 Molecular Imprints, Inc. Method of forming stepped structures employing imprint lithography
US7136150B2 (en) 2003-09-25 2006-11-14 Molecular Imprints, Inc. Imprint lithography template having opaque alignment marks
US7090716B2 (en) 2003-10-02 2006-08-15 Molecular Imprints, Inc. Single phase fluid imprint lithography method
US7630067B2 (en) 2004-11-30 2009-12-08 Molecular Imprints, Inc. Interferometric analysis method for the manufacture of nano-scale devices

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5145633U (cs) * 1974-10-02 1976-04-03
JPS51118526U (cs) * 1975-03-22 1976-09-25

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5145633U (cs) * 1974-10-02 1976-04-03
JPS51118526U (cs) * 1975-03-22 1976-09-25

Also Published As

Publication number Publication date
JPS577931Y2 (cs) 1982-02-16

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