JPS577922A - Sheet cover for semiconductor wafer - Google Patents

Sheet cover for semiconductor wafer

Info

Publication number
JPS577922A
JPS577922A JP8350880A JP8350880A JPS577922A JP S577922 A JPS577922 A JP S577922A JP 8350880 A JP8350880 A JP 8350880A JP 8350880 A JP8350880 A JP 8350880A JP S577922 A JPS577922 A JP S577922A
Authority
JP
Japan
Prior art keywords
semiconductor wafer
sheet cover
breakdown
deterioration
constitution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8350880A
Other languages
Japanese (ja)
Inventor
Ryoji Ogata
Yutaka Morita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP8350880A priority Critical patent/JPS577922A/en
Publication of JPS577922A publication Critical patent/JPS577922A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)

Abstract

PURPOSE:To prevent the deterioration in characteristics and breakdown of a semiconductor circuit element by constituting the sheet cover of the semiconductor wafer by a transparent synthetic resin material with volume resistivity of 1X10<8>-1X 10<12>OMEGA.cm. CONSTITUTION:In order to protect the semiconductor wafer, on which integrated circuit elements are formed, from moisture, rubbish, dust, and the like, until it is actually used, it is covered by the sheet cover comprising the transparent synthetic resin material with volume resistivity of 1X10<8>-1X10<12>. In this constitution, induced electrostatic charge is very few, deterioration in characteristics and breakdown of the integrated circuit element do not occur, and the workability thereof is improved due to transparency.
JP8350880A 1980-06-18 1980-06-18 Sheet cover for semiconductor wafer Pending JPS577922A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8350880A JPS577922A (en) 1980-06-18 1980-06-18 Sheet cover for semiconductor wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8350880A JPS577922A (en) 1980-06-18 1980-06-18 Sheet cover for semiconductor wafer

Publications (1)

Publication Number Publication Date
JPS577922A true JPS577922A (en) 1982-01-16

Family

ID=13804418

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8350880A Pending JPS577922A (en) 1980-06-18 1980-06-18 Sheet cover for semiconductor wafer

Country Status (1)

Country Link
JP (1) JPS577922A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1993008595A1 (en) * 1991-10-25 1993-04-29 Mitsui Toatsu Chemicals, Incorporated Tray for integrated circuits

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1993008595A1 (en) * 1991-10-25 1993-04-29 Mitsui Toatsu Chemicals, Incorporated Tray for integrated circuits

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