JPS5774981U - - Google Patents
Info
- Publication number
- JPS5774981U JPS5774981U JP15072980U JP15072980U JPS5774981U JP S5774981 U JPS5774981 U JP S5774981U JP 15072980 U JP15072980 U JP 15072980U JP 15072980 U JP15072980 U JP 15072980U JP S5774981 U JPS5774981 U JP S5774981U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15072980U JPS6339253Y2 (enExample) | 1980-10-22 | 1980-10-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15072980U JPS6339253Y2 (enExample) | 1980-10-22 | 1980-10-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5774981U true JPS5774981U (enExample) | 1982-05-08 |
| JPS6339253Y2 JPS6339253Y2 (enExample) | 1988-10-14 |
Family
ID=29510080
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15072980U Expired JPS6339253Y2 (enExample) | 1980-10-22 | 1980-10-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6339253Y2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02111887A (ja) * | 1988-10-19 | 1990-04-24 | Ulvac Corp | 真空処理装置 |
-
1980
- 1980-10-22 JP JP15072980U patent/JPS6339253Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02111887A (ja) * | 1988-10-19 | 1990-04-24 | Ulvac Corp | 真空処理装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6339253Y2 (enExample) | 1988-10-14 |