JPS5774981U - - Google Patents

Info

Publication number
JPS5774981U
JPS5774981U JP15072980U JP15072980U JPS5774981U JP S5774981 U JPS5774981 U JP S5774981U JP 15072980 U JP15072980 U JP 15072980U JP 15072980 U JP15072980 U JP 15072980U JP S5774981 U JPS5774981 U JP S5774981U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15072980U
Other languages
Japanese (ja)
Other versions
JPS6339253Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15072980U priority Critical patent/JPS6339253Y2/ja
Publication of JPS5774981U publication Critical patent/JPS5774981U/ja
Application granted granted Critical
Publication of JPS6339253Y2 publication Critical patent/JPS6339253Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Physical Vapour Deposition (AREA)
JP15072980U 1980-10-22 1980-10-22 Expired JPS6339253Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15072980U JPS6339253Y2 (enrdf_load_stackoverflow) 1980-10-22 1980-10-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15072980U JPS6339253Y2 (enrdf_load_stackoverflow) 1980-10-22 1980-10-22

Publications (2)

Publication Number Publication Date
JPS5774981U true JPS5774981U (enrdf_load_stackoverflow) 1982-05-08
JPS6339253Y2 JPS6339253Y2 (enrdf_load_stackoverflow) 1988-10-14

Family

ID=29510080

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15072980U Expired JPS6339253Y2 (enrdf_load_stackoverflow) 1980-10-22 1980-10-22

Country Status (1)

Country Link
JP (1) JPS6339253Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02111887A (ja) * 1988-10-19 1990-04-24 Ulvac Corp 真空処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02111887A (ja) * 1988-10-19 1990-04-24 Ulvac Corp 真空処理装置

Also Published As

Publication number Publication date
JPS6339253Y2 (enrdf_load_stackoverflow) 1988-10-14

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