JPS5773934A - Sample holder for electron beam exposure - Google Patents

Sample holder for electron beam exposure

Info

Publication number
JPS5773934A
JPS5773934A JP15030380A JP15030380A JPS5773934A JP S5773934 A JPS5773934 A JP S5773934A JP 15030380 A JP15030380 A JP 15030380A JP 15030380 A JP15030380 A JP 15030380A JP S5773934 A JPS5773934 A JP S5773934A
Authority
JP
Japan
Prior art keywords
wafer
plate
electron beam
stand
attractive force
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15030380A
Other languages
English (en)
Inventor
Hideo Kusakabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP15030380A priority Critical patent/JPS5773934A/ja
Publication of JPS5773934A publication Critical patent/JPS5773934A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3435—Target holders (includes backing plates and endblocks)

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
JP15030380A 1980-10-27 1980-10-27 Sample holder for electron beam exposure Pending JPS5773934A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15030380A JPS5773934A (en) 1980-10-27 1980-10-27 Sample holder for electron beam exposure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15030380A JPS5773934A (en) 1980-10-27 1980-10-27 Sample holder for electron beam exposure

Publications (1)

Publication Number Publication Date
JPS5773934A true JPS5773934A (en) 1982-05-08

Family

ID=15494051

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15030380A Pending JPS5773934A (en) 1980-10-27 1980-10-27 Sample holder for electron beam exposure

Country Status (1)

Country Link
JP (1) JPS5773934A (ja)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58122746A (ja) * 1982-01-05 1983-07-21 エテック・システムズ・インコーポレイテッド 静電カセツトアセンブリ装置
JPS5979546A (ja) * 1982-10-29 1984-05-08 Toshiba Corp カセツト装置
JPS6390130A (ja) * 1986-10-03 1988-04-21 Hitachi Ltd 電子線描画装置
US5250794A (en) * 1990-10-01 1993-10-05 Olympus Optical Co., Ltd. Apparatus for mounting card-like information recording medium
US5600530A (en) * 1992-08-04 1997-02-04 The Morgan Crucible Company Plc Electrostatic chuck

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58122746A (ja) * 1982-01-05 1983-07-21 エテック・システムズ・インコーポレイテッド 静電カセツトアセンブリ装置
JPS5979546A (ja) * 1982-10-29 1984-05-08 Toshiba Corp カセツト装置
JPS6390130A (ja) * 1986-10-03 1988-04-21 Hitachi Ltd 電子線描画装置
US5250794A (en) * 1990-10-01 1993-10-05 Olympus Optical Co., Ltd. Apparatus for mounting card-like information recording medium
US5600530A (en) * 1992-08-04 1997-02-04 The Morgan Crucible Company Plc Electrostatic chuck

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