JPS5773926A - Method of producing thin film pyroelectric element - Google Patents

Method of producing thin film pyroelectric element

Info

Publication number
JPS5773926A
JPS5773926A JP15121280A JP15121280A JPS5773926A JP S5773926 A JPS5773926 A JP S5773926A JP 15121280 A JP15121280 A JP 15121280A JP 15121280 A JP15121280 A JP 15121280A JP S5773926 A JPS5773926 A JP S5773926A
Authority
JP
Japan
Prior art keywords
thin film
pyroelectric element
producing thin
film pyroelectric
producing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15121280A
Other languages
Japanese (ja)
Other versions
JPS6146044B2 (en
Inventor
Kikuo Wakino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP15121280A priority Critical patent/JPS5773926A/en
Publication of JPS5773926A publication Critical patent/JPS5773926A/en
Publication of JPS6146044B2 publication Critical patent/JPS6146044B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Inorganic Insulating Materials (AREA)
JP15121280A 1980-10-27 1980-10-27 Method of producing thin film pyroelectric element Granted JPS5773926A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15121280A JPS5773926A (en) 1980-10-27 1980-10-27 Method of producing thin film pyroelectric element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15121280A JPS5773926A (en) 1980-10-27 1980-10-27 Method of producing thin film pyroelectric element

Publications (2)

Publication Number Publication Date
JPS5773926A true JPS5773926A (en) 1982-05-08
JPS6146044B2 JPS6146044B2 (en) 1986-10-11

Family

ID=15513679

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15121280A Granted JPS5773926A (en) 1980-10-27 1980-10-27 Method of producing thin film pyroelectric element

Country Status (1)

Country Link
JP (1) JPS5773926A (en)

Also Published As

Publication number Publication date
JPS6146044B2 (en) 1986-10-11

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