JPS5771124A - Quartz tube device - Google Patents
Quartz tube deviceInfo
- Publication number
- JPS5771124A JPS5771124A JP14704880A JP14704880A JPS5771124A JP S5771124 A JPS5771124 A JP S5771124A JP 14704880 A JP14704880 A JP 14704880A JP 14704880 A JP14704880 A JP 14704880A JP S5771124 A JPS5771124 A JP S5771124A
- Authority
- JP
- Japan
- Prior art keywords
- tube
- quartz
- quartz tube
- hook
- tube device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
- C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
- C30B31/10—Reaction chambers; Selection of materials therefor
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
Abstract
PURPOSE:To prevent deflection of a quartz tube by mounting a quartz material on the external surface wall of the quartz tube. CONSTITUTION:A SIC-made soaking tube 12 having high heat resisting property is provided on the external circumference of a quartz tube 11 and a groove 12a is formed on the surface of the soaking tube 12. The lower portion of a quartz made hook 13 is welded through the groove 12a to the upper portion of a quartz tube 11. The hook 13 is formed in a T-shape and the upper portion of the hook 13 is positioned in the outside of the tube 12. In such a constitution, if the surface wall of the quartz tube 12 may be softened due to heating, the hook 13 can protect the tube 11 from deflection.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14704880A JPS5771124A (en) | 1980-10-21 | 1980-10-21 | Quartz tube device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14704880A JPS5771124A (en) | 1980-10-21 | 1980-10-21 | Quartz tube device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5771124A true JPS5771124A (en) | 1982-05-01 |
Family
ID=15421317
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14704880A Pending JPS5771124A (en) | 1980-10-21 | 1980-10-21 | Quartz tube device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5771124A (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4913659U (en) * | 1972-05-04 | 1974-02-05 |
-
1980
- 1980-10-21 JP JP14704880A patent/JPS5771124A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4913659U (en) * | 1972-05-04 | 1974-02-05 |
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