JPS5768001A - Titanium nitride moisture sensor - Google Patents

Titanium nitride moisture sensor

Info

Publication number
JPS5768001A
JPS5768001A JP55143698A JP14369880A JPS5768001A JP S5768001 A JPS5768001 A JP S5768001A JP 55143698 A JP55143698 A JP 55143698A JP 14369880 A JP14369880 A JP 14369880A JP S5768001 A JPS5768001 A JP S5768001A
Authority
JP
Japan
Prior art keywords
titanium nitride
moisture sensor
nitride moisture
sensor
titanium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55143698A
Other languages
Japanese (ja)
Other versions
JPS611881B2 (en
Inventor
Yuzuru Takahashi
Hideki Taguchi
Hisayuki Mizuno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
OOSAKAFU
Osaka Prefecture
Ube Corp
Original Assignee
OOSAKAFU
Osaka Prefecture
Ube Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by OOSAKAFU, Osaka Prefecture, Ube Industries Ltd filed Critical OOSAKAFU
Priority to JP55143698A priority Critical patent/JPS5768001A/en
Publication of JPS5768001A publication Critical patent/JPS5768001A/en
Publication of JPS611881B2 publication Critical patent/JPS611881B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Non-Adjustable Resistors (AREA)
JP55143698A 1980-10-16 1980-10-16 Titanium nitride moisture sensor Granted JPS5768001A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55143698A JPS5768001A (en) 1980-10-16 1980-10-16 Titanium nitride moisture sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55143698A JPS5768001A (en) 1980-10-16 1980-10-16 Titanium nitride moisture sensor

Publications (2)

Publication Number Publication Date
JPS5768001A true JPS5768001A (en) 1982-04-26
JPS611881B2 JPS611881B2 (en) 1986-01-21

Family

ID=15344878

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55143698A Granted JPS5768001A (en) 1980-10-16 1980-10-16 Titanium nitride moisture sensor

Country Status (1)

Country Link
JP (1) JPS5768001A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6329243A (en) * 1986-07-22 1988-02-06 Nok Corp Thin film temperature sensing element

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6329243A (en) * 1986-07-22 1988-02-06 Nok Corp Thin film temperature sensing element

Also Published As

Publication number Publication date
JPS611881B2 (en) 1986-01-21

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