JPS5768001A - Titanium nitride moisture sensor - Google Patents
Titanium nitride moisture sensorInfo
- Publication number
- JPS5768001A JPS5768001A JP55143698A JP14369880A JPS5768001A JP S5768001 A JPS5768001 A JP S5768001A JP 55143698 A JP55143698 A JP 55143698A JP 14369880 A JP14369880 A JP 14369880A JP S5768001 A JPS5768001 A JP S5768001A
- Authority
- JP
- Japan
- Prior art keywords
- titanium nitride
- moisture sensor
- nitride moisture
- sensor
- titanium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Non-Adjustable Resistors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP55143698A JPS5768001A (en) | 1980-10-16 | 1980-10-16 | Titanium nitride moisture sensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP55143698A JPS5768001A (en) | 1980-10-16 | 1980-10-16 | Titanium nitride moisture sensor |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5768001A true JPS5768001A (en) | 1982-04-26 |
JPS611881B2 JPS611881B2 (en) | 1986-01-21 |
Family
ID=15344878
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP55143698A Granted JPS5768001A (en) | 1980-10-16 | 1980-10-16 | Titanium nitride moisture sensor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5768001A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6329243A (en) * | 1986-07-22 | 1988-02-06 | Nok Corp | Thin film temperature sensing element |
-
1980
- 1980-10-16 JP JP55143698A patent/JPS5768001A/en active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6329243A (en) * | 1986-07-22 | 1988-02-06 | Nok Corp | Thin film temperature sensing element |
Also Published As
Publication number | Publication date |
---|---|
JPS611881B2 (en) | 1986-01-21 |
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