JPS576692B2 - - Google Patents

Info

Publication number
JPS576692B2
JPS576692B2 JP8688375A JP8688375A JPS576692B2 JP S576692 B2 JPS576692 B2 JP S576692B2 JP 8688375 A JP8688375 A JP 8688375A JP 8688375 A JP8688375 A JP 8688375A JP S576692 B2 JPS576692 B2 JP S576692B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP8688375A
Other languages
Japanese (ja)
Other versions
JPS5210681A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8688375A priority Critical patent/JPS5210681A/ja
Publication of JPS5210681A publication Critical patent/JPS5210681A/ja
Publication of JPS576692B2 publication Critical patent/JPS576692B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP8688375A 1975-07-15 1975-07-15 Method for treating surface of semiconductor substrate Granted JPS5210681A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8688375A JPS5210681A (en) 1975-07-15 1975-07-15 Method for treating surface of semiconductor substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8688375A JPS5210681A (en) 1975-07-15 1975-07-15 Method for treating surface of semiconductor substrate

Publications (2)

Publication Number Publication Date
JPS5210681A JPS5210681A (en) 1977-01-27
JPS576692B2 true JPS576692B2 (enrdf_load_stackoverflow) 1982-02-06

Family

ID=13899218

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8688375A Granted JPS5210681A (en) 1975-07-15 1975-07-15 Method for treating surface of semiconductor substrate

Country Status (1)

Country Link
JP (1) JPS5210681A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58218122A (ja) * 1982-05-10 1983-12-19 Internatl Rectifier Corp Japan Ltd 半導体装置の製造方法
JPS6199347A (ja) * 1984-10-19 1986-05-17 Fujitsu Ltd 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS5210681A (en) 1977-01-27

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