JPS576688B2 - - Google Patents
Info
- Publication number
- JPS576688B2 JPS576688B2 JP16069977A JP16069977A JPS576688B2 JP S576688 B2 JPS576688 B2 JP S576688B2 JP 16069977 A JP16069977 A JP 16069977A JP 16069977 A JP16069977 A JP 16069977A JP S576688 B2 JPS576688 B2 JP S576688B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16069977A JPS5491183A (en) | 1977-12-28 | 1977-12-28 | Production of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16069977A JPS5491183A (en) | 1977-12-28 | 1977-12-28 | Production of semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5491183A JPS5491183A (en) | 1979-07-19 |
| JPS576688B2 true JPS576688B2 (ja) | 1982-02-06 |
Family
ID=15720548
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16069977A Granted JPS5491183A (en) | 1977-12-28 | 1977-12-28 | Production of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5491183A (ja) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62115164A (ja) * | 1985-11-14 | 1987-05-26 | Hitachi Ltd | パタン形成方法およびその装置 |
| NL1036308A1 (nl) * | 2007-12-19 | 2009-06-22 | Asml Netherlands Bv | Lithographic method. |
| CN104849966A (zh) * | 2015-04-13 | 2015-08-19 | 合肥京东方光电科技有限公司 | 掩模板及其制备方法、曝光设备 |
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1977
- 1977-12-28 JP JP16069977A patent/JPS5491183A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5491183A (en) | 1979-07-19 |