JPS5764156U - - Google Patents
Info
- Publication number
- JPS5764156U JPS5764156U JP14023080U JP14023080U JPS5764156U JP S5764156 U JPS5764156 U JP S5764156U JP 14023080 U JP14023080 U JP 14023080U JP 14023080 U JP14023080 U JP 14023080U JP S5764156 U JPS5764156 U JP S5764156U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14023080U JPS5764156U (en) | 1980-09-30 | 1980-09-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14023080U JPS5764156U (en) | 1980-09-30 | 1980-09-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5764156U true JPS5764156U (en) | 1982-04-16 |
Family
ID=29500149
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14023080U Pending JPS5764156U (en) | 1980-09-30 | 1980-09-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5764156U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04188749A (en) * | 1990-11-22 | 1992-07-07 | Fuji Electric Co Ltd | Manufacture of semiconductor device |
| JP2012094793A (en) * | 2010-10-29 | 2012-05-17 | Disco Abrasive Syst Ltd | Wafer support plate and usage method of the same |
-
1980
- 1980-09-30 JP JP14023080U patent/JPS5764156U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04188749A (en) * | 1990-11-22 | 1992-07-07 | Fuji Electric Co Ltd | Manufacture of semiconductor device |
| JP2012094793A (en) * | 2010-10-29 | 2012-05-17 | Disco Abrasive Syst Ltd | Wafer support plate and usage method of the same |