JPS5763765A - Super-high voltage discharge lamp - Google Patents
Super-high voltage discharge lampInfo
- Publication number
- JPS5763765A JPS5763765A JP13588680A JP13588680A JPS5763765A JP S5763765 A JPS5763765 A JP S5763765A JP 13588680 A JP13588680 A JP 13588680A JP 13588680 A JP13588680 A JP 13588680A JP S5763765 A JPS5763765 A JP S5763765A
- Authority
- JP
- Japan
- Prior art keywords
- mercury
- contracted
- discharge
- enclosed
- tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70008—Production of exposure light, i.e. light sources
- G03F7/70016—Production of exposure light, i.e. light sources by discharge lamps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/82—Lamps with high-pressure unconstricted discharge having a cold pressure > 400 Torr
- H01J61/822—High-pressure mercury lamps
Abstract
PURPOSE:To set an exact amount of the enclosed mercury so as to stabilize a discharge, by forming a contracted area of smaller diameter on the inside walls of both ends of an arc-shaped glass tube and enclosing mercury in the space toward the end from the contracted areas. CONSTITUTION:A discharge portion 1a is provided by forming about 130 deg. range of a quartz made glass tube 1 into a circular arc shape, and electrode portions 1b are formed on its both ends. Furthermore, a contracted portion 1c projecting to the circumferential direaction is formed on the predetermined position of the inside wall of each electrode portion 1b, mercury 3 is enclosed in a section toward each end of the tube 1 from each contracted portion 1c, and an electrode 2 is provided, while allowing it to project by 0.7-1.0mm. into the inside of the tube from each surface of mercury 3. Then, plasma arc is generated to carry on discharge, by applying an electric field of 20-100V/mm. potential gradient to the space between electrodes 2, 2. Thereby, the quantity of enclosed mercury 3 can be set exactly by the contracted portions 1c, and the lamp current can be stabilized during a discharge.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13588680A JPS5763765A (en) | 1980-10-01 | 1980-10-01 | Super-high voltage discharge lamp |
US06/306,714 US4482842A (en) | 1980-10-01 | 1981-09-29 | Curved tube type ultra high pressure mercury arc discharge lamp device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13588680A JPS5763765A (en) | 1980-10-01 | 1980-10-01 | Super-high voltage discharge lamp |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5763765A true JPS5763765A (en) | 1982-04-17 |
Family
ID=15162079
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13588680A Pending JPS5763765A (en) | 1980-10-01 | 1980-10-01 | Super-high voltage discharge lamp |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5763765A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006335534A (en) * | 2005-06-03 | 2006-12-14 | Chugoku Electric Power Co Inc:The | Mounting vehicle equipped with telescopic boom |
-
1980
- 1980-10-01 JP JP13588680A patent/JPS5763765A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006335534A (en) * | 2005-06-03 | 2006-12-14 | Chugoku Electric Power Co Inc:The | Mounting vehicle equipped with telescopic boom |
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