JPS5761941A - Humidity sensitive element - Google Patents

Humidity sensitive element

Info

Publication number
JPS5761941A
JPS5761941A JP55136735A JP13673580A JPS5761941A JP S5761941 A JPS5761941 A JP S5761941A JP 55136735 A JP55136735 A JP 55136735A JP 13673580 A JP13673580 A JP 13673580A JP S5761941 A JPS5761941 A JP S5761941A
Authority
JP
Japan
Prior art keywords
humidity sensitive
substrate
pollutants
thick film
film method
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP55136735A
Other languages
Japanese (ja)
Inventor
Nobuo Sato
Shoichi Iwanaga
Akira Ikegami
Takanobu Noro
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP55136735A priority Critical patent/JPS5761941A/en
Publication of JPS5761941A publication Critical patent/JPS5761941A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/121—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid for determining moisture content, e.g. humidity, of the fluid

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Non-Adjustable Resistors (AREA)

Abstract

PURPOSE:To prevent sticking of pollutants and to obtain a humidity sensitive element having high sensitivity and stability, by forming the lower part electrode, a humidity sensitive part and the upper part electrode on a substrate by a thick film method and convering the surface of the humidity sensitive part with a porous filter. CONSTITUTION:After forming a lower part electrode 2 on an alumina substrate 1 by a thick film method, a humidity sensitive part 3 is formed on it and moreover, an upper part electrode 4 is formed on the part 3 and also, a resistance heating body for heating cleaning 5 is formed on the opposite side of the substrate 1. A porous filter 6 having many pores of 0.1-0.5mum diameter is formed by the thick film method so as to cover the surface of the part 3. By such constitution, the heating cleaning of the part 3 is carried out by the body 5 provided on the back of the substrate 1 and also, pollutants stuck to the filter 6 can be removed by burning off the pollutants.
JP55136735A 1980-10-02 1980-10-02 Humidity sensitive element Pending JPS5761941A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55136735A JPS5761941A (en) 1980-10-02 1980-10-02 Humidity sensitive element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55136735A JPS5761941A (en) 1980-10-02 1980-10-02 Humidity sensitive element

Publications (1)

Publication Number Publication Date
JPS5761941A true JPS5761941A (en) 1982-04-14

Family

ID=15182274

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55136735A Pending JPS5761941A (en) 1980-10-02 1980-10-02 Humidity sensitive element

Country Status (1)

Country Link
JP (1) JPS5761941A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5982847U (en) * 1982-11-25 1984-06-04 ティーディーケイ株式会社 moisture sensing element
JPS6182259U (en) * 1984-11-02 1986-05-31

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5982847U (en) * 1982-11-25 1984-06-04 ティーディーケイ株式会社 moisture sensing element
JPS6182259U (en) * 1984-11-02 1986-05-31

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