JPS5759668B2 - - Google Patents
Info
- Publication number
- JPS5759668B2 JPS5759668B2 JP8856979A JP8856979A JPS5759668B2 JP S5759668 B2 JPS5759668 B2 JP S5759668B2 JP 8856979 A JP8856979 A JP 8856979A JP 8856979 A JP8856979 A JP 8856979A JP S5759668 B2 JPS5759668 B2 JP S5759668B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8856979A JPS5612744A (en) | 1979-07-12 | 1979-07-12 | Wafer prober |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8856979A JPS5612744A (en) | 1979-07-12 | 1979-07-12 | Wafer prober |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5612744A JPS5612744A (en) | 1981-02-07 |
JPS5759668B2 true JPS5759668B2 (en) | 1982-12-15 |
Family
ID=13946488
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8856979A Granted JPS5612744A (en) | 1979-07-12 | 1979-07-12 | Wafer prober |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5612744A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6183969U (en) * | 1984-11-06 | 1986-06-03 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4751458A (en) * | 1984-04-02 | 1988-06-14 | American Telephone And Telegraph Company, At&T Bell Laboratories | Test pads for integrated circuit chips |
JP2632894B2 (en) * | 1987-03-24 | 1997-07-23 | 東京エレクトロン株式会社 | Probe device |
JP3144672B2 (en) * | 1997-01-22 | 2001-03-12 | 東京エレクトロン株式会社 | Probe apparatus and probe needle polishing method |
-
1979
- 1979-07-12 JP JP8856979A patent/JPS5612744A/en active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6183969U (en) * | 1984-11-06 | 1986-06-03 |
Also Published As
Publication number | Publication date |
---|---|
JPS5612744A (en) | 1981-02-07 |